CC

8 Pilot air port size RHC MK(2) Oil port size Rc RS Q G Throttle valve locking screw RS H A RZQ Oil port size Converter side Oil port size Cylinder side 2-S Wall mounting screw Unit port U1, U2 MI W S CEP1 CE1 CE2 (mm) Model Oil port size Rc A B CA CL GB GL KA KB KL L QA M NB NL QB QL R T GA 18 S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: W (Grommet / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

47 25.5 1 10 36 Flat washer 8 7 7 10 25.5 29.5 + Stroke 4.5 36 34 + Stroke 25 19 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 2 x 9 counterbore M6 x 1.0 effective depth 12 5.5 2 x 2 x M6 x 1.0 effective depth 10 Note 4) 2 x 5.4 through 52 12 1 28 40 Flat washer 10 7 7 10 5 32.5 + Stroke 28 37.5 + Stroke 40 Note 1) Standard strokes available in 5 mm increments.

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

VK300

Port size (A port) Rated voltage Option M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil None With bracket (Not assembled) P, R port: M5 4 5 6 24 VDC 12 VDC F Thread type 7 240 VAC, 50/60 Hz 9 Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

1 Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 How to Order Integration of a quick exhaust valve and an exhaust restrictor permits high-speed cylinder operation. 3 1 0 F 01 06 ASV S K Speed exhaust controller Option Nil None The effective area is two times larger.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series AS-F AS-F Model TMH Speed controller with Applicable tubing O.D. Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 AS421-04 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Uses flame resistant resin as standard.

High Pressure Coolant Valve

-15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth

Quick Exhaust Valve Series AQ 1

30 to 60C) 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Symbol 0 5 Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Port size Applicable series M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling

PF3A7xxH-L.eng

_1 Window comparator mode 1 1/2 60 mm Hysteresis H_1 Hysteresis WH1, WH2 x 2 70 mm Element Description Flow [L/min] Display See below.

Process Pump

8 84 72 60 41 7.5 45 2 x 4.5 Mounting hole Manual override pin 66 16 16 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76 64

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No. Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7

IDX-OM-W011

/6E/8E/11E/15E1-10-R IDF15E1-20-R IDF4E/6E/8E/11E-20-R (A) 10 5 (mA) 30 12-3 M5 9.5mm 2 1.25mm L ,N N L () () IDF Series 12-1 12 1 IDX-OM-W011 12 R AC100V M4 () AC200V (M3) 12-4 () () ONOFF 12-5 1-1 IDF Series 12-4 12 2 IDX-OM-W011 13.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011 13.S 13-2 IDF1EIDF3E L N PE M3 6.5mm 2 1.25mm IDF4E15E1 L N PE M3

VP300/500/700

VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544 VP744 Rc G NPT NPTF Symbol 1 2 4-8-5 6 Series VP300/500/700 Dimensions: VP300/Body Ported Grommet terminal (E) Grommet (G) Applicable lead wire O.D. 2.3 to 2.8 102.4 101.4 58.4 68.4 (External pilot port) (M5 x 0.8) (51.4) 48.9 58.9 20.4 16.5 (