Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Floating Joint

x 1.5 Basic Type: JA JA180 200--X530 Center of sphere M M U U D Width across flats F 60 B E H G P A R Dimensions (mm) DMaximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B D E F G H Weight (kg) Nominal size Pitch -X 180 JA180-40-150-X530 40 1.5 191 61 96 16 36 28 70 118 49 3 71000 5.3 Technical

Rubber seal 5 Port Solenoid Valve Series SYJ5000

) 2-2.6 (For mounting) 23 23 23 27 2-2.6 (For mounting) Refer to the page 91 for dimentions with connector cable. 29 Series SYJ5000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 3 4 5 G H Built-in one-touch fitting: SYJ5 20G H C4, N3 C6, N7 Grommet (G), (H): SYJ5 20-M5 G: Approx. 300 H: Approx. 600 (Lead wire length) 103.2 [107.6] 44.2 [46.4] 36.9 22.1 44.2 [46.4]

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Rubber seal 5 Port Solenoid Valve Series SYJ7000

Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H 3 4 5 G H C6, N7 C8, N9 Grommet (G), (H): SYJ7 20-01 Built-in one-touch fitting: SYJ7 20G: Approx. 300 H: Approx. 600 (Lead wire length) 122 [126.4] 54.5 [56.7] 45.3 32.3 3 13 B A B A Manual override 17 35 17 1/8 (A, B port) 2-3.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" :

Thermo-chiller

uid outlet temperature T1 : 20 [C] Circulating uid return temperature T2 : 23 [C] Circulating uid temperature difference T : 3 [C] (= T2 T1) Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860 [(cal/h)/W] Refer to page 20 for the typical physical property value of tap water or other circulating uids.

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

NAAMS Standards Compliant

F 200.03 10 E G F 200.03 10 G 300.025 300.025 9 through H 300.025 300.025 I 250.05 9 through J H 250.05 I 45 M6 x 1.0 R45 500.05 M6 x 1.0 750.05 6.5 18 R25 10 3 10 1 1 6.5 R6 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H I Weight [kg] CKZ-50A022 ACA246M 80.0 65.0 50.0 90.0 56.0 0.5 CKZ-50A023 ACA247M 110.0 95.0 80.0 65.0 50.0 120.0 86.0 0.6 CKZ-50A024 ACA248M 140.0

1

connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5

HRS100/150

/(kgfC)] Circulating fluid outlet temperature T1 : 20 [C] Circulating fluid return temperature T2 : 23 [C] Circulating fluid temperature difference iT : 3 [C] (= T2 T1) Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860 [(cal/h)/W] * Refer to page 119 for the typical physical property value of tap water or other circulating fluids.

Pneumatic Transfer System Series MF

Applicable cylinder D G F H L I C E J K M N Part No.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Note) ( ): Denotes the dimensions for long stroke. 726 Air Cylinder CG1-Z 2122CG1-Z/ 1011Rod Flange (F): CG1F, CG1F 10112122With rubber bumper FT F 4 x FD FX0.15 E 0 0.05 B FX0.15 H B (mm) FT 6 7 7 8 50 63 80 100 FD 5.5 5.5 6.6 6.6 FX 28 32 38 46 F 2 2 2 2 E 12 14 18 25 B 40 44 53 61 Bore size 20 25 32 40 30 32 2 2 58 70 9 11 9 9 40 3 82 11 11 50 3 100 14 14 76 92 104 128 Note) End boss is

MK

(mm) Operating Piston area (cm2) RHC direction 1.0 0.7 0.5 0.3 200 139 100 60.8 2 R 20 12 MTS 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 CC 490 341 245 149 4.9 H 600 418 300 182 6 R 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R 40 16 1250 870 625 380 12.5 H 1648 1149 825 502 16.5 R 50 20 1961 1365 980 596 19.6 H 2801 1950 1400 851 28 R 63 20 3121 2172 1560 948 31.2 H Note) Theoretical

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Sine Cylinder Series REC

Dimensions Basic style: RECB 2 x P (Rc, NPT, G) 2 x NN Width across flats B2 G H2 G Width across flats B1 H1 Plugged (M5 x 0.8) I 2 x Eh8 NA D MM AL K A 1.5 1.5 Effective thread length 2 x FL Width across flats KA NA F N N ZZ + Stroke S + Stroke F H (mm) A AL B1 B2 D E F FL G H H1 H2 I K KA N NA NN P S ZZ MM Bore (mm) 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 x 1.25 M20 x 1.5 18 15.5 13 26

Series VCS

Standard 1 2 3 4 5 6 7 Stainless steel Clip Stainless steel, Cu Tube assembly Class H Coil assembly Stainless steel, PTFE (FKM) Armature assembly PTFE (FKM) Seal Stainless steel Return spring Brass Body Dimensions (mm)/Bracket 1in = 25.4mm A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket mounting dimensions (mm) B C D E F G H J L A Bracket part no.

REC

Dimensions Basic style: RECB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com H2 2-RcP Width across flats B2 Width across flats B1 2-NN G G H1 Standard port Pluged (M5 x 0.8) I 2-Eh8 D MM AL K A N N F lNA S + Stroke H F ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Approx. 300 (Lead wire length) 13.5 13.5 13.5 98.6[103] 79 [83.4] 96.8 69 82 15 15 22.1 15 22.1 22.1 Refer to the page 91 for dimentions with connector cable. 6 Series SYJ3000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H Grommet (G), (H): SYJ3 20-M3 (-F) G: Approx. 300 H: Approx. 600 (Lead wire length) 91.7 [96.1] 40.2 [42.4] 18 29.3 1.8 5.3 4 8.2 A B M3 x 0.5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8