Integrated Controller

H9 (+0.025 0 ) depth 3 120 n x 4.5 4 Motor mounting position: Left side parallel Motor mounting position: Right side parallel 5 48 128.5 128.5 3 H9 ( +0.025 0 ) depth 3 3 H9 ( +0.025 0 ) depth 3 8 46 46 47 47 G H 1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

High Vacuum Angle Valve

100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Electric Actuator with Integrated Guide

Contact pin (preassembled) N 3 Terminal Pin no.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

CXS

(Piping port) 20 20.5 5.5 42 + ST ST 5.5 4.5 32 + ST 13.4 5 + ST 2.75 11 12 1.2 M3 x 0.5 x 3 (Hexagon socket head set screw) M8 x 1.25 x 7.5 (Bolt holder) 3.8 3.8 0.5 45 45 3 3 25 0.2 25 0.2 5.3 5.3 32 31 16 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 3 3 45 45 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6 (Hexagon socket head cap screw) M3 x 0.5 x 12.5 (Hexagon

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

SMC

4 3 12-CY3B 4 3 12-CY1R Magnetically Coupled Rodless Cylinder (Direct Mount Type) 4 3 12-CY3R 4 3 12-REA Sine Rodless Cylinder 10111 3 2 CQSX 10111 3 2 CQ2X Low Speed Cylinder 10111 3 2 CM2X Note) The grade is different depending on the type of the adjuster option.

IDU/IDF

-7 18 Three phase Single turn 30 IDF55C-3, 75C-3 IDU55C-3, 75C-3 200V (50Hz) 200 to 220V (60Hz) 220V (50Hz) 220 to 240V (60Hz) 4kVA 275 259 240 IDF-TR4000-5 14 380, 400, 415V (50Hz) 380 to 400, 400 to 415, 415 to 440V (60Hz) IDF55C-3, 75C-3 IDU55C-3, 75C-3 200V (50Hz) 200 to 220V (60Hz) 220 A 4-11 4kVA 355 299 320 IDF-TR4000-6 35 440, 460V (50Hz) 440 to 460, 460 to 500V (60Hz) IDF55C-3, 75C

2/3 Port Valve

VN5-A4BB-3 VN5-A4BC-3 VN6-A3BA VN6-A3BB VN6-A3BC VN6-A4BA VN6-A4BB VN6-A4BC VN6-A3BA VN6-A3BB VN6-A3BC VN6-A4BA-3 VN6-A4BB-3 VN6-A4BC-3 VN7-A3BA VN7-A3BB VN7-A3BC VN7-A4BA VN7-A4BB VN7-A4BC VN7-A3BA VN7-A3BB VN7-A3BC VN7-A4BA-3 VN7-A4BB-3 VN7-A4BC-3 Plate assembly Valve material e(1) FPM EPR NBR (2) Valve element Valve material r(1) SF4--23 VO301-00 Pilot solenoid valve u L: Aluminum, S:

MY2

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !

MY1

Rc 3/8 (Port) W CH LH RR SS NE RR SS H PP QQ NH NC Cushion needle 2-Rc 3/8 (Hexagon socket head taper plug) 2-Rc 3/8 (Hexagon socket head taper plug) GA TT UU UU TT GC Rc 3/8 (Port) Rc 3/8 (Hexagon socket head taper plug) G NW A GB N Z + Stroke Rc 3/8 (Hexagon socket head taper plug) WW WW Rc 3/8 (Port) Rc 3/8 (Hexagon socket head taper plug) Rc 3/8 (Port) XX XX Centralized piping Centralized

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY3000-37-46A SYJ3 1 LO Z 1 3 2 3 For AC: SY3000-37-47A Double solenoid, 3 position type Type of actuation A, B port size 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 110 VAC (115 VAC) Symbol Nil M3 Port size Base mounted M3 x 0.5 Single solenoid SY3000-37-54A SY3000-37-55A Double solenoid, 3 position type Rated

CE

S 3pcs. 3 "n" pcs.

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Cylinder with Lock

3 io@1!4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

MGG

9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

DC: Can be attached to Grommet, Conduit, Conduit terminal. 3 8 03 CE-compliant: Electorical entry is applicable only for the DIN terminal.

VP4

Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Weight (kg) Port size Model Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2 (4.0) 4.8 (4.5) 5.5 (4.8) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29 (0.28) 0.24 (0.27) 0.23 (0.30) 16 19 21 16 19 21 15 18

MHF2

4 1.3 15 26 12 4 Accessory option: Hexagon socket head screw (special screws) 3 2-2H9 +0.025 0 depth 2 3 8 5 8 5 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 58 11 Low Profile Air Gripper Series MHF2 Dimensions MHF2-12D Scale: 65% 3H9 +0.025 0 depth 3 26 3H9 +0.030 0 depth 3 2-M4 x 0.7 thread depth 10 Mounting thread 4 42 4 40 52 2-M4 x 0.7 thread depth 5