MLGP

200 200 200 44 60 70 11 14 14 13 9 14 118 146 158 7.5 9 9 24 24 28 86 110 124 106 130 142 48 48 52 72 92 110 300 300 300 40 50 63 M8 x 1.25 M8 x 1.25 21.5 130 M10 x 1.5 M10 x 1.5 28 130 M10 x 1.5 M10 x 1.5 WB Bore size (mm) X XA XB YY YL Z XC XL st25 25

3 Port Air Operated Valve Series SYJA300 1

Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

14 J.S.T.

VHK

R-12F-12F 22 12 12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Applicable tubing O.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 22 36 110 180 544 612 873

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

L FT FX B + Stroke (mm) FZ FX A + Stroke Bore size (mm) Stroke range (mm) FZ A B CL CD CT CU 10 10 to 40 61.5 90.5 84.5 5 4 10 Double clevis type: MQQLD 16 10 to 60 70.5 107.5 98.5 8 5 12 20 10 to 60 79 119 109 10 5 14 CU CD hole H10 Shaft d9 Cap bolt 25 10 to 50,75,100 84.5 126.5 116.5 10 5 14 30 10 to 50,75,100 104 148 138 10 6 14 40 10 to 50,75,100 104 158 144 14 7 20 Bore size (mm) CX

Escapements Series MIW/MIS

Note 2) Refer to page 14 for lead wire length.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

14 100 44 16 12 44 54 120 M6 34 52 6.5 14 4 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 11 12 14 107 44 20 16 47 64 148 M8 35 64 6.8 19 50 7 13.5 16.5 115 49 20 16 50 78 162 M10 38 77 7.5 19 63 16.5 6.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 27 27 40 20 6.6 11 7.5 1/8 13 38 30 104 44 118 86 106 40 M8 x 1.25 M8 x 1.25 21.5 32 32 46 22 8.6 14 9 1/4 9 47 40

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

14 Power cable b View b View a a Wiring Cable description Color Signal description Pin no.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 090 110 Bore size (mm) 16 20 PA 40 50 PB 94 100 PG 3.5 4.5 PP Q 153 191 QQ 9 10 QW 48 45 RR 11.0 14.5 TT 15 18 UU 14 12 VV 10.0 12.5 W 102 110 WW 13 14 YW 54 58 Z 180 220 SS 2.5 5.5 07.5 11.5 Hole sizes for centralized piping on the bottom Bore size (mm) 16 20 S 9 6.5 WX 30 32 Y 6.5 8 Applicable O-ring C6 C6 (Mounting side should be machined to these

MXS Series Air Slide Table

End Lock Specifications Model MXS8 MXS12 MXS16 MXS20 MXS25 8 12 16 20 25 Bore size (mm) 2-20 in/s (50~500m/s) Operating speed range 5.62 13.5 24.7 36.0 56.2 Holding force (lbf) 1 lbf = 4.4482 N Note) Refer to P. 14 for cautions on end lock.

VHK

20.8 21.8 14 3.2 51 68 19 64 71 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-03S-12F VHKl-04S-10F 22 46 78.2 30.5 47.7 80.2 31.5 48.7 21.5 4 20.8 21.8 14 3.2 72 70 22 70 72 10 12 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-04S-12F 1 4 17.5 16.1 9.7 7.2 3 8 17.5 16.1 17.5 16.1 1 2 3 port valve Reference dimensions after insertion of R(PT) threads.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

For details, refer to the WEB catalog or Best Pneumatics No. 3. 14

7

) Grommet 3 m 2-wire Solid state auto switch CKG1 24 VDC 2-color indicator 5 m 2-wire (34) Relay, PLC Pre-wired connector 0.3 m 2-wire (14) 3 m Grommet 2-wire 5 m 2-color indicator Pre-wired connector 24 VDC 2-wire (14) 0.3 m Reed auto switch DC/AC magnetic field CKP1 3 m 24 VDC 100 VAC 1-color indicator Grommet 2-wire 5 m DNote 1) Refer to page 433 when ordering the auto switch mounting

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Z + Stroke S + Stroke CA BA 0 0.3 BA 0 0.3 Drawing of view (E) (mm) Bore size Z 9.5 9.5 M5 x 0.8 M4 x 0.7 MM M12 x 1.0 M10 x 1.0 NN S 54 55 83 82 16 10 A Y 9 9 28 28 LB 21.5 23 LC 5.5 5.5 LH 14 14 LT 2.3 2.3 LX 33 33 LY 25 25 LZ 42 42 20.5 20.5 NA NB X 6 6 15 15 18.3 15 BA BB 18.3 12 CA 17 20 20 14 CB D 5 4 F 8 8 5 5 GA GB 5 5 GC 11 11 H With air cushion With air cushion type is not available

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 R

15

+ Y2) CY1SG6-Z RJ0604N M4 x 0.7 M3 0.5 25 25 49 52 16 1 7.5 15 42 10 14 M6 x 0.75 46 11.5 7.5 19 66 15 CY1SG10-Z RJ0806HN M8 x 1 M4 x 0.7 M5 0.8 25 38 61 60 24 1 5.5 11 47 12.5 16.5 58 14 10 24 76 24 CY1SG15-Z RJ0806LN M8 x 1 M4 x 0.7 M5 0.8 30 50 76 75 30 1 5.5 11 62 12.5 17.5 73 14 9 23 92 23 DCY1SG20-Z RJ1007LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 90 90 38 4.5 9 16.5 21.5 M10

7

14 120 52 113 82 52.5 ( ): Denotes the Normally Open (N.O.) dimensions. 154 Pilot Operated 2 Port Solenoid Valve VXD Series High temperature oil Heated water Replacement Parts DIN Connector Part No.

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

240

6 10 Bearing stopper Size 6: Aluminum alloy Size 10: Carbon steel 11 Motor plate Aluminum alloy Anodized 12 Guide ring Aluminum alloy Size 10 only 13 Bearing 14 Bushing Oil impregnated sintered copper alloy 15 Soft wiper r w !5 !4 !3 e u !