Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

Process Pump

7.5 52 37 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Model (2) (3) Response time (ms) (1) Series Valve configuration Model Weight(g) Effective area (mm2)(Cv) Standard: 1W High pressure: 1W Low wattage and AC VQZ100 Poppett 3.6 (0.2) VQZ115 N.C. 13 or less 25 10 or less Metal seal 8.1 (0.45) VQZ212 18 or less 14 or less N.C. Rubber seal 10.8 (0.6) VQZ232 20 or less 15 or less 58 VQZ200 Metal seal 7.2 (0.4) VQZ222 18 or less 14 or less N.O.

MHS

MH*-OMM0056 MHS2-D MHS3-D MHS4-D MHSJ3-D MHSH(J)3-D 1. 23 2. 2-1. 45 3. 3-1. 6 3-2. 67 3-3. 713 3-4. 13 3-5. 14 3-6. 14 3-7. 14 4. 4-1. 14 4-2. 1518 4-3. 1922 4-4. 2326 1 [ ][][] ISO4414*1)JISB8370*2) 1) ISO4414Pneumatic fluid power-Recommendations for the application of equipment to transmission and control systems. 2) JIS B8370 2 1. 2. 3. 4. 3 2 2-1 MHS2 MHS2 -16D MHS2 -20D MHS2 -25D

VK300

F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

PSxx-OML0002CN

01 N01 C4H C6H N7H C4L C6L N7L R1/8 M50.8 NPT1/8 M50.8 4 mm 5/32 inch 6 mm 1/4 inch 4 mm 5/32 inch 6 mm 1/4 inch C3602 () ) O HNBR PBTPOMSUS304C3604() O HNBR/NBR (3 2 m) 81 g 70 g 71 g 73 g 75 g 73 g 75 g (4 2 m) 85 g 74 g 75 g 77 g 79 g 77 g 79 g 43 g 32 g 33 g 35 g 37 g 35 g 37 g [mA] [V] A B C 0.0-101.0 kPa 0 -101 kPa -100.0100.0 kPa -100 kPa 100 kPa -0.1001.000 MPa -0.1 MPa 0

PSxx-OMS0006CN

, (1015 ) -54No.PS-OMS0006CN-G ZSE20(F)/ISE20 ,, (), No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 No.6 -55No.PS-OMS0006CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 -56No.PS-OMS0006CN-G No.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS22l1FSl-U01-01 1/8" 7.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS22l1FSl-U01-03 5/32" 8.2 AS22l1FSl-U01-07 1/4" 11.2 20.8 27.8 (27.7) 14 (13) AS22l1FSl-U01-09 5/16" 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-U02-01 1/8" 1/8 13 (12.7) 7.2

MXF

For details, refer to page 8-30-31. 8-6-14

EXxx-OMW0014CN

)mm 28.616061.5 150 g . 10-5 EX245-EA2-5 Item (WLH)mm 27.612061.5 120 g 73 No.EX-OMW0014CN-A 11. 11.1.

Digital Gap Checker

For ISA3-G type, the range is up to 280, with a hysteresis of 20.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

1 1 1 G Normally Closed (N.C.)

VFA3000

port) 3 (Breathing port) 5 x , 14 38 (Piping port) 5 x , 14 38 (Piping port) 3 position closed center/exhaust center/pressure center: VFA3 40-X1 3 4 5 02 03 2 x 4.3 2 x 18 (Mounting hole) (Pilot port) Breathing port 5 x , 38 14 (Piping port) 1766 5 Port Air Operated Valve Series VFA5000 How to Order Port size 02 03 1 4 3 8 Body ported VFA5 1 20 03 Base mounted VFA5 1 44 03 1(P) port location

CE2

13 14 14 17 14 16 15 18 Reed switch Without indicator light RB 8 7 5.5 6.5 6.5 J 2-color indication 2-color indication Water resistant 3.5 3.5 5 5 5 Grommet (In-line) D-F5BAL DSolid state switch D-F5NTL D-G5NTL D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV With timer 4 4 4.5 4.5 4.5 -X Grommet (Perpendicular) 2-color indication 20With pre-wire connector is also available in solid state auto switches

Compact Guide Cylinder

Stroke FB FA K J G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB GC GD H J JC K L MM ML NN Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1

CRQ2

Refer to Page 14 for details.

AKH/AKB Series

4 12.7 2.8 6.5 6.5 6.5 10 8 13.5 6 H 14 17 22 16 24 43 45 39 80 62 80 M 14 8 18.5 A 14 42 17 L 54.3 47.3 49.3 60.5 54.5 17 24 10 21 22 19 22 34 12 22 Connection thread Reference dimension after screwing into R threads.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Refer to Page 14 for details.

Air Cylinder

A AL B B1 C D E F G H H1 J K KA M MM N P S ZZ 32 Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to

53

Contents Applicable model HRS-EP022 NPT thread conversion fitting set HRSH090-W-l HRS-EP023 G thread conversion fitting set Part no.