Voltage: 24 VDC, Electrical Entry: DIN Terminal, Light/Surge Voltage Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Flush, Thread: NPT, Solenoid: Double Solenoid, CE Marking: CE Marked Product

Voltage: 24 VDC, Electrical Entry: DIN Terminal, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Type, Flush, Thread: NPT, Solenoid: Double Solenoid, CE Marking: CE Marked Product

Voltage: 24 VDC, Electrical Entry: DIN Terminal, Light/Surge Voltage Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Non-Locking Push Type, Extended, Thread: G, Solenoid: Double Solenoid, CE Marking: CE Marked Product

Voltage: 220 VAC, 50/60 Hz, Electrical Entry: Conduit Terminal, Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Type, Flush, Thread: NPT, Solenoid: Double Solenoid, CE Marking: CE Marked Product

Voltage: 24 VDC, Electrical Entry: Conduit Terminal, Light/Surge Voltage Suppressor: None, Manual Override: Non-Locking Push Type, Extended, Thread: NPT, Solenoid: Double Solenoid, CE Marking: CE Marked Product

Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal), Light/Surge Voltage Suppressor: None, Manual Override: B (Locking Type, Tool required), Thread: N (NPT), Solenoid: D (Double Solenoid), CE Marking: Q (CE Marked Product)

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Speed Controller with

Note) The applicable cylinder bore sizes (mm) for AS1002F-02 are 2.5, 4, 6.

Table of Contents

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

Brake mechanism added

Auto Switch Mounting Height (mm) D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NT D-G5W D-K59W D-G5BA D-G59F Auto switch model D-F5 D-J59 D-F5W D-J59W D-F5BA D-F59F D-F5NT D-Z7 D-Z80 D-Y59 D-Y7P D-Y7BA D-Y7W D-A9 D-M9 D-M9W D-M9A D-A3C D-G39C D-K39C D-A44C D-A9V D-M9V D-M9WV D-M9AV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-Y69 D-Y7PV D-Y7WV Bore size (mm) Ht Hs 40 50 63 80 100 Hw Hs Ht Hs Ht Hs Ht Hs

0.4

(D-sub connector) y u @0 i o !

REC

(Including band and screw) J Applicable auto switch Bore size (mm) 20 25 40 32 DD-C7, D-C80 D-C73C, D-C80C Reed -X BMA2-020 BMA2-032 BMA2-025 BMA2-040 D-H7, D-H7C D-H7W, D-H7NF,D-H7BAL D-B5, D-B64, D-B59W D-G5NTL Reed D-A3, D-A44 Solid state 20Reed Solid state BA-32 BA-01 BA-02 BA-04 Data BD1-01M BD1-02M BD1-02 BD1-04M Solid state D-G39, D-K39 Mounting screws set made of stainless steel

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Recommended speed controller Model Elbow type 10-AS2201F-01-06-X214 10-AS2201F-02-06-X214 10-AS2201F-02-06-X214 10-AS3201F-02-08-X214 10-AS3201F-02-08-X214 Model Straight type 10-AS2301F-01-06-X214 10-AS2301F-02-06-X214 10-AS2301F-02-06-X214 10-AS3301F-02-08-X214 10-AS3301F-02-08-X214 In-line type 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS3001F-08-X214 10-AS3001F-08-X214

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

CLA

light/Operation D-AS9W, D-8S9W, D-FS*W, D-GS*W, D HJS9W, D-FS' F, D-J59W, D-KS9W, D-'SBAL Solid Stat.

VQ5000

3 m Note) Note) Manifold Note) 1 Plug-in unit Note) Cylinder port Direct exhaust with silencer box: Exhaust from both U and D sides SB Stations 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed Note) Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust IP65 enclosure SD SU W 02 2 stations Note) ... ... 12 12 stations D U D U Note) Combination

VDW

Material Thread type Symbol Nil A G H Manifold material Seal material NBR FKM NBR FKM Rc G NPT Nil F N C37 1 D side 2 3 4 5 U side Stainless steel OUT port size Stations Series 20 Port size 02 2 stations Symbol 10 30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

CE2

For detailed specifications, refer to page 10-20-1. 50 7 63 9 80 9.5 100 10.5 CV D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G39/K39 D-G39C, D-K39C MVGQ Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W

Check Valve Series AK 1

4 6 8 10 12 3 5 10 17 25 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 2-Applicable tubing D Inch Size Weight (g) Effective area (mm2) D L M Model Applicable tubing O.D.