ASR

7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Compact Cylinder with Air Cushion

Rod end nut L1 10 Series RQ Accessories Single Knuckle Joint Double Knuckle Joint For I-G02, I-G03 For I-G04, I-G05 For Y-G02, Y-G03 For Y-G04, Y-G05 ND hole H10 Shaft d9 MM ND hole H10 Shaft d9 MM L NDH10 MM NDH10 MM L RR1 RR1 RR1 RR1 E1 E1 E1 E1 A1 L1 A NX NZ U1 A1 L1 A NX NX U1 A1 L1 A U1 A1 L1 A NX NZ U1 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

0.4

2 i o q y !1 !5 !4 w !3 !0 r e u t 426 B Exploded View of Manifold Housing assembly and SI unit no. No. Manifold Part no.

VCA

Series VCA30/40 y t r e q w Series VCA30 Series VCA40 Description No. Description No. Part no. AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

VM

POM Stainless steel Material Note y Description q Description Plunger Spring Valve Body T.T. = 2.5 mm only, w/threads w e u i Stainless steel Lever Packing O-ring NBR Valve Retainer Spring r POM o NBR t Stainless steel !

MU

Calculation Example 1: MUB40-15S(T) Basic weight0.62kg 2 pcs. 5 10 15 15 Example 2: MUC50-5S(T) Basic weight1.06 Additional weight (mounting bracket)0.40 1.06 + 0.40 = 1.46 kg 1 pc. 5 5 10 15 Construction Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

Compact Cylinder with Air Cushion and Lock Series RLQ

Rod side cylinder port Rc, NPT, G 1/8 Head side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 Head side cylinder port Rc, NPT, G 1/8 Rod side cylinder port Rc, NPT, G 1/8 Approx. 55.4 Approx. 40.4 w e r t q u i y w e r t q u i y Approx. Max. 77.4 Approx. Max. 77.4 Approx. 53.8 Approx. Max. 59.4 Approx.

Lubrication Equipment

Sight dome assembly Siphon tube nut seal Bowl O ring Housing O ring y u i o !

Plug-in/Plug Lead: Single Unit

w q w VQ5100 VQ5101 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P) 5 (

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3 @0 q MSQA (High precision type) Component Parts Description Material Description Material Deep groove ball bearing Needle bearing Deep groove ball bearing No. q w e r t y u No.

rep-modular-e

5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

CV/MVGQ

A1 E1 L1 MM NZ RR1 U1 ND L NX Y-04C 3 x 18l 16 + 0.3 + 0.1 22 24 55 M14 x 1.5 13 25 55.5 Polished round 12 38 12 Y-05C 50, 63 3 x 18l 16 + 0.3 + 0.1 27 28 60 M18 x 1.5 15 27 55.5 Polished round 12 38 12 Knuckle Pin, Clevis Pin Y-08C 80 4 x 25l 28 + 0.3 + 0.1 37 36 71 M22 x 1.5 19 28 76.5 Polished round 18 55 18 Y-10C 100 4 x 30l 30 + 0.3 + 0.1 37 40 83 M26 x 1.5 21 38 83 Polished round 20

Stainless Steel 316

Construction q w Material No.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Digital Flow Switch For Air/Water Series PF2A/PF2W

Digital Flow Switch Series PF2A/PF2W For Air/Water Description Integrated Display Type PF2A710, 750, 711, 721, 751 PF2W704(T), 720(T), 740(T), 11 Remote Type/Display Unit PF2A300, 301, 310, 311 PF2W300, 301, 330, 331 q q w t r SMC FLOW SWITCH w U P e SET e UNIT y RESET OUT2 OUT1 SET u DOWN t y u r RESET button ( + button) If the UP and DOWN buttons are pressed simultaneously, the RESET

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.