Electric Actuator/Slider Type

Overhang: L1[mm] 1,500 Mep 1000 mm/s2 m 3000 mm/s2 1,000 L1 500 5000 mm/s2 00 5 10 15 20 Work load [kg] Based on the above calculation result, the LEFS25RA-200 is selected.

EX600-WEN_WSV.eng

Parameter Setting Hardware Configuration (EDS file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden (7) Set the Ethernet port Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

EXxx-OMV0028.eng

Parameter Setting Hardware Configuration (GSDML file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.

EXW1-NT1_eng

NETHERLANDS (31) 020 5318 De Ruyterkade 120, NL-1011 AB Amsterdam, the Netherlands NORWAY (47) 67 12 90 20 Vollsveien 13 C, Granfos Nringspark N-1366 Lysaker, Norway POLAND (48) 22 211 96 00 ul.

JXCx-OMT0005CN

(P.12) ) 84 - 21. 1byte 2byte 4byte 2byte 4byte (1)2byte 2byte Output Byte6,Byte7 100mm/s IO Output 12byte 100mm/s 16 0064h 00 64 h (2)4byte 64h 00h Byte6 Byte7 Bit7 Bit0 4byte Output Byte8Byte11 700.00mm IO Output 12byte 0.01mm 700.00mm 10 7016 00011170h 00 01 11 70 h (3) 11h 70h Byte8 Byte9 (6) 01h 00h Byte10 Byte11 ALM Bit7 Bit0 4byte Output Byte8Byte11 -700.00mm IO

AWG

Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa AWG20 Rc1/4 AWG30 Rc3/8 AWG40 Rc1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 00 200 400 600 800 00 0 500 1000 1500 0 1000 2000 3000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Conditions:

ZSE1/ISE1

Connector Socket Lead wire Hook 16-6-4 5 Compact Pressure Switch Series ZSE1/ISE1 Dimensions Grommet type: ZSE1-00-14/-15/-18/-19 Connector type: ZSE1-00-14C/-15C/-18C/-19C 23.4 Indicator light (Red) Indicator light (Red) 23 23 15 15 H HYS SET L H L H HYS SET L H Hysteresis setting trimmer Pressure setting trimmer Pressure setting trimmer Hysteresis setting trimmer ZSE ISE 23.4 23.4 Indicator

VQC

-A-1 Interface regulator (B regulator) ARBQ4000-00-B-1 Interface regulator (P regulator) ARBQ4000-00-P-1 P R1 R2 SUP/EXH block plate VVQ4000-16A 02 Rc 1/4 Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM). 03 Rc 3/8 C8 (N7) C10 (N9) With 8 (1/4") One-touch fitting With 10 (5/16") One-touch fitting With 12 (3/8") One-touch fitting C10 (N11) Bottom ported Rc 1/4 Single wiring Special

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

Connector Socket Lead wire Hook 776 Compact Pressure Switch Series ZSE1/ISE1 Dimensions Grommet type: ZSE1-00-14/-15/-18/-19 Connector type: ZSE1-00-14C/-15C/-18C/-19C 4 . 23 4 . 23 Indicator light (Red) Indicator light (Red) 23 23 15 15 H HYS SET L H L H HYS SET L H Pressure setting trimmer Hysteresis setting trimmer Hysteresis setting trimmer Pressure setting trimmer 4 . 23 4 . 23 Indicator

AC Servo Motor Driver (CC-Link Type)

Please select the station 00, if you want to use for the first time.

LC-OM089xx

64 76 10 00 Spain (34) 945-18 41 00 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 Fig.2-1 P-clip Fig.2-2 U-clip Fig.2-3 Soldering Country Telephone Country Telephone *Websites Kingdom Ireland (351) 1-403 9000 United SMC Corporation www.smcworld.com SMC

EXxx-OMA1018_Eng

(Recommended torque: 0.9 10% Nm) Summary of Product parts LATVIA (371) 781 77 00 Environment Dzelzavas str. 120g, Riga, LV-1021, Latvia Warning This device complies with Part 15 of the FCC Rules.

ø2 One-touch Fittings Series KJ

(mm) Applicable fitting size Model KJY02-M3 KJY02-M5 2 M3 x 0.5 M5 x 0.8 KJR02-04 4 2 KJU02-00 2 KJU02-23 KJU02-04 2 Bulkhead union KJE Plug KJP Applicable tubing O.D. (mm) Model Applicable fitting size Model KJE02-00 2 KJP-02 2 2 Polyurethane tubing Series TU 2 Miniature fittings Series M

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Flow Characteristics (Representative values) Condition: Inlet pressure 0.7 MPa ARG20 Rc1/4 ARG30 Rc3/8 ARG40 Rc1/2 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 00 200 400 600 800 00 500 1000 1500 0 1000 2000 3000 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Conditions:

LZ-OM003xx

Spain (34) 945-18 41 00 Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 Protection ground terminal (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 terminal on the end of motor, using a metal P-clip

LZ-OM004xx

B C D 44 Mounting J ig to the piston 43 Mounting to workpiece Fem ale thread type Male thread type D o No.LZ-OM00401 B (3/3) (44) 1908-56 38 88 Hungary (36) 1-371 1343 Turkey (90) 212 221 15 12 Finland (358) 9-859 580 Portugal (351) 22 610 89 22 Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 France (33) 1-64 76 10 00 Spain (34) 945-

Series AP3100

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

HRX-OM-X084

INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 4 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400 / / / / Contact input signal 1 OFF Detection timer Detection time of low flow rate alarm 4 5 00

HRX-OM-W002

INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 4 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400 / / / / Contact input signal 1 OFF Detection timer Detection time of low flow rate alarm 4 5 00