LEC-OM07605CN

PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

P

Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 0 to 1.0MPa, Effective area (Cv): 19mm 2 (1.0), Fluid temperature: -5° to 60°C (no freezing), Port size (nominal size): Rc(PT) 1/4 (8A), MECHANICAL VALVE, MECHANICAL VALVE,

Thermo-chiller/Rack Mount Type

2 [ ] lamp Lights up when AL.01 Low level in tank abnormal or AL.02 Low level in tank alarm is generated !3 Digital display (11-segment, 1 digit) X is displayed when maintenance notification is generated. !4 [RMT] lamp Lights up during remote operation by communication function !5 [KEYLOCK] lamp Lights up when key lock setting is active !

Modular Type Lubricators Series AL

(This is not applicable to VHS40) Body Size Symbol Port Size Body Size 20 30 40 02 03 04 1/4 3/8 1/2 Effective area (mm2) 5 5 Model VHS20 VHS30 Note: Other sizes, thread forms, options, etc. may be possible, please contact SMC for availability.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

Ozone Resistant

220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000

PA300/500/700

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

Booster Regulator Series VBA1110 to 4200 1

Pressure gauge Lubrication Not required ITV Installation Horizontal AN200-02 AN400-04 AN300-03 AN300-03 AN400-04 Silencer Pressure adjustable mechanism Relieving type IC How to Order Pressure VBA Pressure increase ratio 2.0 MPa 1 Twice 4 times 0 1 VE Pressure setting Handle operated type 1 Port size VBA1110-02 VY1 Body size Port size Rc 1/4 Symbol 02 1/4 1 VBA1-02 G VBA 1 1 02 1 0 GN Series