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RUN Operation at occurrence of low flow rate alarm LOFL ALARM(Alternately displayed) 5.5 Advanced setting mode HRR Series 5-34 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Set value Contents Initial value OFF Alarm is not generated. WRN Operation of this product will continue when the alarm occurs. FLT Operation of this product will stop when the alarm occurs.

5.15.1 Data reset function . 5-34 5.15.2 How to operate reset function . 5-34 5.16 Accumulated Operating Time Reset Function . 5-35 5.16.1 Accumulated operating time reset function . 5-35 5.16.2 How to operate accumulated operating time reset function . 5-35 5.17 Warming Up Function . 5-39 5.17.1 Warming up function. 5-39 5.17.2 Setting/checking of warming up function . 5-40 5.18 Anti-Snow

Theoretical Output OUT IN [N] Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 12 6 OUT 113 23 34 45 57 68 79 90 102 113 IN 85 17 25 34 42 51 59 68 76 85 16 8 OUT 201 40 60 80 101 121 141 161 181 201 IN 151 30 45 60 75 90 106 121 136 151 20 10 OUT 314 63 94 126 157 188 220 251 283 314 IN 236 47 71 94 118 141 165

(4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator light 5 1 3 5 1 3 32.5 29.5 32.5 29.5 37 34 2-4.6 mounting holes Manual override 2-4.6 mounting holes Manual override 37 34 M8 connector M8 connector 74.5 74.5 66.5 23 23 66.5 PE port PE port PE port PE port 13.5 13.5 8.5 8.5 SMC SMC 16 16 1/8-2 ports 3, 5 port 1/8 1 port 16 16 1/8-2 ports 3

Auto switch internal circuits D-F9NW, F9NWV DC (+) Brown [Red] Auto Switch Weight Unit: g Switch main circuit Switch main circuit Switch main circuit OUT Black [White] D-F9NW(V) D-F9PW(V) D-F9BW(V) Model DC (-) Blue [Black] 0.5 7 7 7 Lead wire length (m) 3 34 34 32 5 56 56 52 D-F9PW, F9PWV DC (+) Brown [Red] Auto Switch Dimensions Unit: mm OUT Black [White] D-F9W Mounting screw M2.5 x 4 Slotted

D-F9NW(V) Auto Switch Weight Table Unit: g DC (+) Brown [Red] Model D-F9BWV D-F9BW D-F9PWV D-F9PW D-F9NWV D-F9NW Main switch circuit OUT Black [White] Lead wire length 0.5m 7 7 7 7 7 7 Lead wire length 3m 32 32 34 34 34 34 DC () Blue [Black] Auto Switch Dimensions D-F9NW, D-F9PW, D-F9BW D-F9PW(V) DC (+) Brown [Red] Main switch circuit OUT Black [White] DC () Blue [Black] D-F9BW(V) OUT (+)

wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3 14.5 3 14.5 3 20 20 20 20 23 23 23 23 27 Refer page 4-4-61 for dimensions with connector cable. 4-4-22 23 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Base Mounted (With sub-plate) [ ] for AC Grommet (G), (H): SYJ54G H -01 1/8 (A port) 18 8.5 V100 SY 2-4.5 (For mounting) 4 34

DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

Hs 12 Auto switch 24.5 34 SMC AUTO SWITCH SMC AUTO SWITCH A 49 A 33 6.5 B D-G5, D-K5, D-G5W, D-G5BA, D-K9W, D-G59F, D-G5NT D-A44 12 Auto switch Approx. Hs 36 Approx.

(4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator light 5 1 3 5 1 3 32.5 29.5 32.5 29.5 37 34 2-4.6 mounting holes Manual override 2-4.6 mounting holes Manual override 37 34 M8 connector M8 connector 74.5 74.5 66.5 23 23 66.5 PE port PE port PE port PE port 13.5 13.5 8.5 8.5 SMC SMC 16 16 1/8-2 ports 3, 5 port 1/8 1 port 16 16 1/8-2 ports 3

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

DC (+) N C DC () OUT Pin no. 1 2 3 4 2-3.4 43 Flow direction Dimension L 100 106 Model PFW504 PFW520 PFW540 62 78.2 120 1.6 23 50 60 34 2-Port size 4-4.5 34 50 40 48 (43.5) Flow direction 25 Series PFA Dimensions/Remote Type Display Unit for Water PFW3-A Panel mount type Internal circuits and wiring Sensor 41.8 Blue Brown Black N.C. 40.3 40 1 2 3 4 4.3 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2

(4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator light 5 1 3 5 1 3 32.5 29.5 32.5 29.5 37 34 2-4.6 mounting holes Manual override 2-4.6 mounting holes Manual override 37 34 M8 connector M8 connector 74.5 74.5 66.5 23 23 66.5 PE port PE port PE port PE port 13.5 13.5 8.5 8.5 SMC SMC 16 16 1/8-2 ports 3, 5 port 1/8 1 port 16 16 1/8-2 ports 3

) 27.2 (R1, R2 port) 63 VM/VR VH 2 position double: SYJA7220-01 2 position double: SYJA72400 0 1 2 4.3 22-M5 X 0.8 63.6 34 8.5 (Mounting holes) (Pilot port) 1 A B 13 3 1 B A 17 2-M5 X 0.8 34 3.2 227 B A 35 (Pilot port) (Mounting holes for manifold) 1 R1 P R2 31.5 3.2 235 18 63.6 (Mounting holes) (Non-locking) Manual override 74.6 28 29 25 21 14 74.6 (Non-locking) Manual override 55 2-1.8

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VP4 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VQ L A Dimensions VQ4 Applicable fitting d Part No.

22 6 12.8 3.2 12.8 58.5 34 22 6 12.8 3.2 12.8 61 34 22 6 12.8 3.2 12.8 61 34 22 6 12.8 3.2 12.8 66 37 23 6 12.8 4.2 12.8 70 37 23 6 12.8 4.2 12.8 74.5 42.5 27.5 8 13.7 4.2 15.3 79.5 42.5 27.5 8 13.7 4.2 15.3 B C D E F G H ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 14.2 14.2 S type: White color L type: Black

Hexagon width across flats 24 25 G Width across flats 37 45 45 4-M4 x 0.7 4-M4 x 0.7 E 10 10 G Width across flats 37 F F E Y Y 8 8 34 34 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT63HB-A16 ZPT63HB-B8 63 65.1 45.5 67.6 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58.4 85.1 37 48.5 78.5 27.5 M10 x 1.5 63 65.1 45.5 67.6 31.5 43 21.5 -B12

AC voltage: S is not available for AC. 13-3-34 34 Series ZR Large Size Vacuum Module: Vacuum Pump System ZX Table (1) Valve Unit/Combination of Vacuum Switch Valve and Release Valve ZR Valve unit components Vacuum switch valve Solenoid valve Air operated Valve Unit function Release valve Solenoid valve Air operated Vacuum switch valve ZM Release valve Symbol Operation stop Vacuum adsorption

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Regulator Mounting: A (Direct Mount), IN/OUT Fitting Type: 34 [IN/ø6 (Elbow) - OUT/ø6 (Straight)], Accessory: A (w/Pressure Gauge), Options: None, Unit Representation: Z (Display Unit for Product Name Plate and Pressure Gauge: PSI)