39

13.7 95 166 10 12 55 376.6 155.5 78.4 M10 x 1.5 19 13 36.5 9.5 M8 x 1.25 10 95.5 110 54 12 16.6 99 10 12 55 391.6 161 78 M10 x 1.5 22 13 36.5 15 M8 x 1.25 10 171.5 100.5 Bore size (mm) PA PB PC PD R RB RR S V VA VB VC VD RA VE VF W XA XB XC 104.5 50 63 50 45 10 55 46 68 46 48 11 8 30 32 63.5 71.5 12 3.5 78.4 138.5 134 92 50 45 10 55 52 78 52 54 11 8 30 32 63.5 71.5 12 3.5 78 151 146.5 17

EXxx-OMN0035CN

Bit 13 Bit 15 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 (EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 3 Bit 1 Bit 3 Bit

Secondary Batteries

and up) SUS304 (6 and 8) Aluminum (12 and up) SUS304 (6 and 8) Aluminum (12 and up) Material Piston Anodized (12 and up) Chromate (12 and up) Electroless Ni-plated (6 and 8) Chromate (12 and up) Treatment SUS304 SUS303, SUS304 Iron SUS304 SUS303 Iron Brass Electroless Ni-plated Brass Electroless Ni-plated Iron Material Air slide table MXQ Piston spacer Treatment Material Packing support

LEH_C

6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V) 4 - 4.

44

I.D. 1/8" (3.18) 0.086" (2.18) KFG2E0122-00 8 1.1 16 12 12 32.8 29.4 5 1.5 10 H2 H3 H1 H2 5/32" (4) 0.098" (2.5) KFG2E0325-00 8 1.6 16 12 12 32.6 29 5 1.8 11 d 5/32" (3.95) 1/4" (6.35) KFG2E0704-00 12 6 39 17 17 39 34.6 6 3.3 13.5 5/16" (8) 0.236" (6) M M KFG2E0906-00 14 17 43 17 17 40.4 35.8 6.6 5.3 15 L2 L1 3/8" (9.53) 1/4" (6.35) KFG2E1163-00 17 19 84 22 22 46.8 41.4 7.6 5.6 20 1/2" (12.7

EXxx-OMU0020CN

(M12 ) . 66 11. . 67 11.1. . 67 12. . 68 12.1. EX245-SPN1 . 68 12.2. EX245-DX1 . 70 12.3.

Compressed Air Preparation Filter

AM20 AM30 AM40 12 16 14 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 14 12 10 Inlet pressure 0.5 MPa 12 Inlet pressure 0.5 MPa 10 Inlet pressure 0.5 MPa 8 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 10 Max. flow capacity line 8 Max. flow capacity line Max. flow capacity line 8 6 6 6 4 4 4 2 2 Inlet pressure 0.7 MPa 2 Inlet pressure 0.7 MPa Inlet pressure

3

4 12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6 4 12 8 8 0 Note 1) ( ): D-A96, A9V Note 2) When setting an auto switch, confirm the operation and adjust its mounting position.

MTS

Mounting 20Data W W Mounting orientation L Direction for L can be up, down, left, right, or diagonal. 600 800 Maximum speed (mm/s) 300 500 30 (13) Stroke (mm) 10 (8) 100 50 150 200 50 100 150 200 20 (9) 30 (10) 10 (11) 20 (12) 8 Selection graph (15) (14) (16) (17) (18) (19) (20) (21) 12 to 40 L: Overhang The distance between the cylinders central axis and the load

Wedge Cam Operation Provides

17 MHKL2-20S 314 34 16 18 20 32 MHKL2-25S 565 41 19 22 25 53 L1 Single acting MHKL2-12C 105 20 9 11 12 11 L2 MHKL2-16C 166 28.6 14.6 14 16 22 MHKL2-20C 314 34 16 18 20 40 MHKL2-25C 565 41 19 22 25 63 Note) At the pressure of 0.5MPa , when holding point L is 20mm.

Hydraulic Cylinders

11 10 M6 x 1 8 5.5 6.5 12 M6 x 1 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 12 M6 x 1 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 16 M8 x 1.25 40 69 55 14 22.4 19 16 M12 x 1.75 15 8 10 20 M10 x 1.5 50 75 60 15 28 24 21 M16 x 2 20 9.5 11.5 24 M12 x 1.75 63 85 67 18 35.5 31 27 M20 x 2.5 24 11.5 14 24 M16 x 2 80 99 78 21 45 39 36 M27 x 3 33 15 17 27 M18 x 2.5 100 122 96 26 56 48 41 M30 x 3.5 36

Miniature Fittings M3, R(PT) 1/8, M5 Series M

6 4 15.2 21 3 6 12 23.5 30.2 13.7 14 15 13.7 14 15 13.7 16 14.7 16.8 16 14.7 16.8 17 15.7 16.8 17 15.7 16.8 21.3 22.3 21 21.3 22.3 21 23.3 22 25.3 23.3 22 25.3 25.5 24.2 25.3 25.5 24.2 25.3 9.5 28.2 21.5 4 5 11 23.5 30.2 14 12 8 16.2 12 28.2 21.5 5 6 16 30.2 23.5 18 12 31.8 24.5 5.5 6.5 20 33.8 26.5 14 10 17 18.8 23 12 31.8 24.5 7.5 6.5 26 14 33.8 26.5 24 7 8 30 19.3 19 14 34.3 27.5 12 27

Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

200mm/s 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 Female threads Male threads Rod end threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 +1.0 0 mm M5 x 0.8 M5 x 0.8 11 Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

JXCx-OMT0028CN

1 0 Address 251 ID8 ID7 ID6 ID5 ID4 ID3 ID2 ID1 252 ID12 ID11 ID10 ID9 (6) LEC ID ID 2 1 2 0 12 12 3 2 1 0 ID 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 11 1 0 1 1 12 1 1 0 0 (GW [OUT Data]Address.250, bit5)] 48 - 12.LEC 12.1GW LEC GW LEC LEC () () DRIVE ON(1) OUT0~5 DRIVE ON(1)OFF(0) DRIVE OFF(0) OUT05 IN05 INP ON(1)BUSY OFF(0) DRIVE ON(1)OUT05 OFF(0)DRIVE OUT05 OFF RESET ON

IDX-OM-W053

K 11-1 . 11-1 11-2 . 11-1 12 L 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 13 R 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 14-5 . 14-3 15 V 15-1 . 15-1 15-2 . 15-2 15-3 . 15-2 16 16-1 . 16-1 2 i i i 1 () OFF 3 ON OFF i 1 1 3 i 1 i i 2 5 i 2 1 i-2 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 i-3 i i 2 6 WARNING !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

: 0.5 MPa 12, 13 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 10, 11, 12 Effective area (mm2) Effective area (mm2) 08, 09 AS 06, 07 ASP ASN AQ Number of needle rotations Number of needle rotations ASV AK JIS Symbol Flow Direction Symbols on Body ASS Meter-out type Meter-in type ASR Symbol JIS Symbol ASF Flow Rate and Effective Area AS121F AS131F AS221F-01 AS231F-01 AS221F-02 AS231F

REC

18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 30 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 200 to 1000 ZZ NN P RR S U Z Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 9 146 14 217 226 150 to 700