Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

NCQ8

Minimum Auto Switch Mounting Stroke (inch) D-M9, D-F9W D-M9V, D-F9WV No. of auto switches D-A9 D-A9V D-F9BAL Model NCDQ8A(B)-(C)(M) NCDQ8A(B)-100S(M) NCDQ8A(B)-200S(M) NCDQ8A(B)W-(C)(M) NCDQ8A(B)Z-(M) NCDQ8A(B)Z-100S(M) NCDQ8A(B)Z-200S(M) NCDQ8A(B)Z-100T(M) NCDQ8A(B)Z-200T(M) 0.62 (5/8") 0.25 (1/4") 0.62 (5/8") 0.25 (1/4") 1.00 (1") 1 0.62 (5/8") 0.37(3/8") 0.62 (5/8") 0.25 (1/4") 1.00 (1

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Rotary Actuator/Vane Type

D-M9m m: Operating range Size q m: Operating range q d: Hysteresis range 10, 15 170 20 20, 30 100 15 40 86 10 Actuated position: ON Auto switch d: Hysteresis range OFF D-S/T99(V)m, S9P(V), S/T79, S7P, D-97/93A, 90/90A, R73/80m (OFF) Magnet Size q m: Operating range q d: Hysteresis range 10, 15 110 10 20, 30 90 40 52 8 Note) Since the figures in the above table are provided as a guideline

Table of Contents

E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 5.5 6 6 7 7 AME150 1 8 1 4 3 8 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 , , 1 4 3 8 , AME250 1 2 3 8 1 2 , AME350 3 4 14-20-40 5

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

SYJ700-9-1(-Q) SYJ700-9-2(-Q) V111(T)SYJ700-19-1A Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel 7 Sub-plate Note) 1/8 1/4 Aluminum die-casted Pilot valve Bracket assembly 8 Note) Add suffix -Q for the CE-compliant product.

Aluminum High Vacuum Angle Valve

8-1 8-2 9 10 O-ring Part No.

JIS Standard Hydraulic Cylinder

n 4) 2 (n 4) 2 (n 4) 2 20 + 55 115 + 55 130 + 55 140 + 55 125 + 55 150 + 55 D-A59W n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) Different surfaces same surface 15 75 2 110 125 135 115 145 D-G5/K59 D-G5W D-K59W D-G59F D-G5BA D-G5NT D-B5/B64 (n 4) 2 15 + 50 (n 2) (n = 2,

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

/A80H D-A73C/A80C D-F7/J79/J79W D-F7V/J79C D-F7W/F7WV D-F7BAL/F7BAVL D-F79F D-M9 D-M9V D-F9W D-F9WV D-A79W D-A9 D-A9V D-F9BAL D-P5DWL D-A7/A80 Bore size (mm) A A B B A B A B A B A B A B 12 4.5 5.5 5 6 2 3 16 7.5 5 8 5.5 5 2.5 20 7.5 6.5 8 7 5 4 25 7.5 7 8 7.5 5 4.5 32 9.0 6 9.5 6.5 6.5 3.5 8 5 12 9 11 8 40 9 13 4.5 8.5 13.5 9 10.5 6 12 7.5 16 11.5 15 10.5 50 7 11 7.5 11.5 11.5 12

One-touch Fittings Series KQ2

O e b u t ) h c n i ( t h g i e W ) g ( . o N t r a P D L Q M . n i M . a i d e l o h 8 / 1 0 0 1 0 T 2 Q K 6 . 9 5 . 7 1 3 . 4 5 . 5 1 5 . 2 5 2 3 / 5 0 0 3 0 T 2 Q K 4 . 0 1 8 1 5 . 4 6 1 3 5 6 1 / 3 0 0 5 0 T 2 Q K 4 . 1 1 5 . 9 1 8 . 4 5 . 6 1 5 . 3 7 4 / 1 0 0 7 0 T 2 Q K 2 . 3 1 5 . 0 2 3 . 5 7 1 6 . 4 9 6 1 / 5 0 0 9 0 T 2 Q K 2 . 5 1 3 2 6 5 . 8 1 6 2 1 8 / 3 0 0 1 1 T 2 Q K 9 .

7

(V2) (U2) E C 32 VX2 25 T B VXK G1/2 R VXD VXD A VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5

Air Slide Table

Auto Switch Mounting Operating Range [mm] Caution Auto switch model Applicable bore size 6 8 12 16 20 25 D-M9m(V)/M9mW(V)/M9m 2.5 2.5 3 4 4.5 5 D-A9m(V) 4.5 5 6 7 8 9 MTightening torque Tightening Torque of Auto Switch Mounting Screw [Nm] * Values which include hysteresis are for reference purposes only.

High Power Cylinder:

Q Q Q Connector 5V 12V 24V IC C80C Q Q Q No Q A33 PLC Q 12V Terminal conduit A34 Q 100V 200V 12V Yes DIN terminal Relay PLC A44 Q Grommet Diagnostic indication (2 color) B59W Q Q 3 wire (NPN) 3 wire (PNP) H7A1 Q q Q 5V 12V IC H7A2 Q Grommet q Q H7B Q q Q 2 wire 12V H7C Q Q Connector Q Q Solid state switch 3 wire (NPN) 2 wire 5V 12V G39 IC Q Terminal conduit K39 12V 3 wire (NPN

MY1

(mm) PC 14.5 PD 32 PE 13 PF 5.5 VV 16 XX 28 YH 37.5 Z 220 ZZ PA PB PG Q PP QW QQ RR SS TT UU WW Model 60 50 7 206 12 42 16 16 6 14.5 15 12.5 MY1H25 Rc 1/16 80 60 8 264 17 51 11 16 4 16 16 16 MY1H32 15 42 13 6.5 19 32 47 280 Rc 1/16 100 80 9 322 18.5 59 11 24 10.5 20 22 19.5 MY1H40 23 36 340 59.5 20.5 37.5 23 8 Rc 1/8 2-d Y S R WX D Bottom ported (ZZ) (Applicable O-ring) Hole Size for Centralized

ZP

B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 40 43 18.5 19.5 6.2 8 6 3.3 32 6.5 10 1.7 12 12 3 27 21 21 50 53 33 7.5 3.8 6.2 12 5 8 8 6 13 1.8 15 12.5 3.5 27.5 21.5 21.5 16 1.2 18 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D

ZP3

B C D E Y q Pad dia.

VFR

U side mounting D U 1 2 8 stations Option D side 3 4 3 4 Max: 8 stations Refer to page 3-5-8.

VFS

U side mounting D U Symbol Plug assembly (Option) Refer to page 3-8-8.

Stopper Cylinder

Q D B 20 15 D L M9BW 20 to 50 y !

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25