XM, XY ) [both main & initial exhaust valves] Fluid Inactive gas under vacuum Operating temperature (C) 5 to 60 (High temperature type: 5 to 150) 1 x 10-6 up to atmospheric pressure Operating pressure (Pa)(abs) Main exhaust valve 14 45 80 160 200 Conductance (L/s) Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10 {1 x 10-10} at ambient temperatures, excluding gas
Power clamp cylinder European type Symbol Bore size D1 6 6 6 6 8 8 8 8 D2 7 9 9 9 10.2 10.2 10.2 10.2 H 16 20 20 25 20 20 20 25 40 50 63 80 40 50 63 80 S Bore size 40 40 50 63 80 50 63 80 B For 40 of A015, S type only Offset Arm position A015 A045 Offset 15 Offset 45 D1 Right D2 H R Center D1 D2 C H Left D1 D2 L H 192 Power Clamp Cylinder Series CKZT Cylinder Specifications 40 50 63 80
With auto switch Without auto switch B A B D Stroke range Bore size (mm) BP C E F G H I J K L M N Q O OA OB P RA RB S T U V Z A 82 36 10 to 50 Rc 1/8 15.6 14 Rc 1/4 63 16.5 46 92 8 1.6 15 20 38 M10 x 1.5 103 17 60 M8 x 1.25 53 16 4.2 47.5 19 93 7 9 10.5 77 92 46 depth 12 depth 10.5 75, 100 96.5 43.5 10 to 50 19.6 17.5 Rc 3/8 Rc 1/4 80 106.5 53.5 18.5 10 2 21 25 43 M16 x 2.0 132 22 77 M10
G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8
/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA RB S U Z , TN, TF , TN, TF 38 10 5 60 58.5 4.5 28 19.8 7 34 5.5 9 7 58.5 31.5 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66
(inch) H (Width across flats) Connection thread NPT Model Min. port size 2-Applicable tubing Note) Weight (g) Q A M D L P KQ2U01-34S KQ2U01-35S KQ2U03-34S KQ2U03-35S KQ2U05-34S KQ2U05-35S KQ2U07-34S KQ2U07-35S KQ2U07-36S KQ2U09-34S KQ2U09-35S KQ2U09-36S KQ2U11-35S KQ2U11-36S KQ2U11-37S KQ2U13-35S KQ2U13-36S KQ2U13-37S 9.6 40.5 9.6 1 8 1 4 1 8 1 4 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1
M8 x 1.25 12 7.6 63 (45 x 2) 8.6 14 8 Rc1/8 NPT1/8 G1/8 20.5 24 26 30 30 62 47 128 100 146 20 40 M10 x 1.5 15 9.5 8 JMGP Series Bore Size 80 (56 x 2), 100 (71 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view 2 x P (Plug) WA + Stroke/2 Z 4 x MM depth ML 4 x OA through 4 x OB counterbore depth OL L (OL) 4 x NN through 2 x P (Plug) U X PW VA PE R H T 2 x P D GC GB S Q 2 x
Platform Cylinder Series CXT 32, 40 (N) S+Stroke X+Stroke H 4-M8 X 1.25 4-8.7 Through, Counter bore 14 Depth 8 HP Depth 12 HG 12 Back side 4-M10 X 1.5 Depth 15 (N) T PA T CL d d MLGC RW RW CNA M20 X 1.5 CB QW PW GP PB W E CV/MVG Y Z CXW 2-Rc(PT)1/8 CXS CXT G G 2-RB2015 (Option) 2 HT F MX A L HN (MAX.)
size Sealant R(PT) 1/8 NPT 1/8 None With sealant 01 N01 S X201 Lead wire length 3m Operating pressure range 0.1 to 0.6MPa X202 Lead wire length 3m Operating pressure range 0.1 to 0.6MPa X215 3.12-1 Mechanical Style Pressure Switch IS1000 Construction 5 50 20 500 t PSE u ZSE4 ISE4 0.1 (1) 0.2 (2) y 0.3 (3) ZSE5 ISE5 0.4 (4) i MPa {kgf/cm2} 58.5 ZSE6 ISE6 q Components !
)5 S07A5 2(B) 4(A) 2 (B) 3 (R2) 1 (P) 4 (A) 5 (R1) y t 4-Position Dual 3-Port Valve 5(R1) 3(R2) u r e w q 1(P) N.C. + N.C.
1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231
300 mm 300 mm 300 mm 4 s 4 s 6 s 6 s 8 s 0 8 s 0 8 s 2 s 4 s 6 s 8 s 0 2 s 4 s 6 s 8 s 0 2 s 2 s 300 mm 300 mm 300 mm 300 mm 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 0 2000 0 400 800 1200 1600 2000 Installation distance [mm] 0 400 800 1200 1600 2000 Installation distance [mm] 1600 2000 m] Extensive static neutralization area can
Metal piping attachment Indicator LED (OUT1) Indicator LED (OUT2) Lock ring Function selection mode PFM7 button (SET) Nominal thread size Required torque S Connector Piping port (OUT side) Rc (NPT)1/8 7 to 9 Nm Rc (NPT)1/4 12 to 14 Nm Thank you for purchasing an SMC PFM7 Series Digital Flow Switch.
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setting 25 mm OUT2 White 3 [F 4] Setting of switch output response time 1 s DC(-) Analogue Blue1 Grey 2 URL http://www.smcworld.com [F 5] Select analogue output filter ON Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 [F 6] Setting of security code OFF [F98] Setting of all functions OFF Note: Specifications are subject
Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.
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Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Port size 1/8 (6A) 1/4 (8A) All IN ports are 3/8.
4 !3 !2 y u !8 !9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.
23.6 28.6 40.5 20.6 13.4 8 4.2 100 58.9 13 29.8 Q Q 2 x O Oval type Round type 4, 6 8 to 16 2 x N M Q L1 L2 Q D D 1: D is maximum diameter.