Series VV100 is suitable for both direct or bracket mounting and can also accommodate various piping sizes including our miniature 2mm one-touch fittings.

Series VV100 is suitable for both direct or bracket mounting and can also accommodate various piping sizes including our miniature 2mm one-touch fittings.

Series VV100 is suitable for both direct or bracket mounting and can also accommodate various piping sizes including our miniature 2mm one-touch fittings.

Series VV100 is suitable for both direct or bracket mounting and can also accommodate various piping sizes including our miniature 2mm one-touch fittings.

Series VV100 is suitable for both direct or bracket mounting and can also accommodate various piping sizes including our miniature 2mm one-touch fittings.

SFOD-OMT0009CN

-COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

F/ISE

Do not attempt to insert or pull the pressure sensor or its connector when the power is on. 19 Series ZSE F/ISE Pressure Switch Precautions 1 Be sure to read before handling. Refer to pages 17 through 19 for safety instructions and pressure switch common precautions. 50 60 50 60 Handling Pressure Source Warning Warning 1. Use of toxic, corrosive or flammable gas.

ML2B

O 69 84 102 P 41 56 68 CC 16 19 23 BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 ND 5.6 6.8 8.6 MB M6 x 1

ML2B

O 69 84 102 P 41 56 68 CC 16 19 23 BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x

HRL

Laser optical system Laser oscillator Optical system CH2 Oscillator CH1 Oscillator Optical system CH1 CH2 Cooling capacity [kW] 9, 19, 26 1 (Max. 1.5) Temperature stability [C] 0.1 0.5 Set temperature range [C] 15 to 25 20 to 40*1 *1 CH2 CH1 Space saving, Reduced wiring Dual thermo-chiller Thermo-chiller 1 unit 2 units Footprint 22% reduction To oscillator To optical system CH2 To optical

VZS

For details, refer to pages 3-7-19 and 3-7-20.

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 19 Stations, A B Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 19 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103 108 118 128 106 111 116 121 126 131 141 151 5.5 9 4.5 20 25 15.5 18 32 50 10 29 40.5 M8 x 1.25 9.5 depth 9 22 22 23 20 8 748

3-Position Rotary Table

21 12 1.6 15.5 100 50 12.4 12.5 60.6 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU JV Q S SC SD SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M4 x 0.5 M10 x 1 34 132.5 46 50 27.3 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 37 168.5 58.5 63.5 39 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24

MHL2

X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38 54

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

1, @2 and @6 each. 12 MXY12-PS 8-9-11 11 Series MXY Dimensions 2-M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M-5P) 2-M5 x 0.8 (Plug: M-5P) 2-M5 x 0.8 Piping port FL 21 21 FH 2-M thread depth MM +0.03 0 Width across flats MB (lock plate fixing bolt) R 4-M thread depth MM PR RL PR +0.03 0 MA (Stroke

Plate Cylinder with Lock Series MLU

22 27 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 MLUB25 MLUB32 MLUB40 MLUB50 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc