Type: Electronic Electropneumatic Regulator, Supply Side Connection Type: Rc (R), Supply Side Plumbing Thread Nominal: 1/4, Control Side Plumbing Pipe Thread Nominal: 1/4, Set Pressure Range(kPa): -1.3～-80, Control Method: Internal Pilot, Shape: Retainer Pin/Stopper Set, Connector Branch: -, Control Side Connection Type: Rc (R), Cable connector: Right angle type 3 m, Communication signal: RS

Type: Electronic Electropneumatic Regulator, Supply Side Connection Type: Rc (R), Supply Side Plumbing Thread Nominal: 1/4, Control Side Plumbing Pipe Thread Nominal: 1/4, Set Pressure Range(kPa): -1.3～-80, Control Method: Internal Pilot, Shape: Retainer Pin/Stopper Set, Connector Branch: -, Control Side Connection Type: Rc (R), Cable connector: Right angle type 3 m, Communication signal: RS

Electronic Electropneumatic Regulator, Supply Side Connection Type: Rc (R), Supply Side Plumbing Thread Nominal: 1/4, Control Side Plumbing Pipe Thread Nominal: 1/4, Set Pressure Range(kPa): -1.3～-80, Control Method: Internal Pilot, Shape: Retainer Pin/Stopper Set, Connector Branch: -, Control Side Connection Type: Rc (R), Cable connector: Without cable connector, Communication signal: RS

Type: Electronic Electropneumatic Regulator, Supply Side Connection Type: Rc (R), Supply Side Plumbing Thread Nominal: 1/4, Control Side Plumbing Pipe Thread Nominal: 1/4, Set Pressure Range(kPa): -1.3～-80, Control Method: Internal Pilot, Shape: Retainer Pin/Stopper Set, Connector Branch: -, Control Side Connection Type: Rc (R), Cable connector: Straight type 3 m, Communication signal: RS

Type: Electronic Electropneumatic Regulator, Supply Side Connection Type: NPT, Supply Side Plumbing Thread Nominal: 1/4, Control Side Plumbing Pipe Thread Nominal: 1/4, Set Pressure Range(kPa): -1.3～-80, Control Method: Internal Pilot, Shape: Retainer Pin/Stopper Set, Connector Branch: -, Control Side Connection Type: NPT, Cable connector: Right angle type 3 m, Communication signal: RS-232C

Type: Electronic Electropneumatic Regulator, Supply Side Connection Type: NPT, Supply Side Plumbing Thread Nominal: 1/4, Control Side Plumbing Pipe Thread Nominal: 1/4, Set Pressure Range(kPa): -1.3～-80, Control Method: Internal Pilot, Shape: Retainer Pin/Stopper Set, Connector Branch: -, Control Side Connection Type: NPT, Cable connector: Right angle type 3 m, Communication signal: RS-232C

Type: Electronic Electropneumatic Regulator, Supply Side Connection Type: NPT, Supply Side Plumbing Thread Nominal: 1/4, Control Side Plumbing Pipe Thread Nominal: 1/4, Set Pressure Range(kPa): -1.3～-80, Control Method: Internal Pilot, Shape: Retainer Pin/Stopper Set, Connector Branch: -, Control Side Connection Type: NPT, Cable connector: Right angle type 3 m, Communication signal: RS-232C

Communication: RS-232C

Communication: RS-485

Communication: RS-485, Option: NPT 1/4

Communication: RS-232C, Option: NPT 1/4

Communication: RS-485, Option: -

Communication: RS-232C, Option: -

The SX series valves are available with numerous manifold options which allow for easier installation and improved operation., SUPPLY/EXHAUST BLOCK (RS, VALVE, SS5Y5 MANIFOLD SY5000, 21, SS5Y5 NO SIZE RATING, .17600 lb

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).

Various options include earth leakage breaker, and communications function (RS-485).

Various options include earth leakage breaker, and communications function (RS-485).? Dustproof filters are available for the air-cooled refrigerator type.Temperature stability: ?1.0C , Cooling capacity: 9.0/9.5kW, 10.0/11.0kW, 13.0/14.5kW, 14.5/16.5kW?

Various options include earth leakage breaker, and communications function (RS-485).

10%3020Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)