LX

-200B 6 3.5 44 52 1 2 5 34 Section F detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

Fieldbus System

Operating Environment Warning 1. Do not use in an atmosphere containing inflammable or explosive gases. Use in such an atmosphere is likely to cause a fire or explosion. This system is not explosion-proof. Caution 1. Select the proper type of enclosure according to the operating environment.

Sine Rodless Cylinder Series REBR Direct Mount Type

8 @0 @2 @1 o q !4 !3 y i #1 !5 #2 !9 !7 !1 !2 !0 #0 r t u @9 !6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.

XM, XY

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Ex.)

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

Clean Gas Filter

pressure 0.1 0.3 MPa 2 x Rc 1/4, NPT 1/4 HAA HAW 0.1 MPa Max. flow rate line B Pressure drop MPa AT IN 0.01 IDF IDU 0.7 MPa 0.5 MPa IDF FS A 0.001 IDFA A B Model Connection Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1

CL

1 !2 !3 !4 !5 !6 !7 No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

1 W DC (83 mA), 0.5 W DC (42 mA) 12 VDC Power consumption (Current) Inrush 0.5 VA (5 mA), Holding 0.5 VA (5 mA) 100 VAC Inrush 0.55 VA (5 mA), Holding 0.55 VA (5 mA) 110 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 200 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

Title not found

(114'l o 1 6 (5/8") * ln case of auto switch with 06 bore, add smm to S and Z.

α PneuAlpha HARDWARE MANUAL

Protection IP 20 Certications CE, UL/cUL Certications TV (AL-10MT-D, AL-10MR-D) Description Specication UL 508 EN60730-1 EN61010-1 EN50081-1 EN50082-1 EN50082-2 10 3.

Table of Contents - Tubing

Tightening of M3 and M5 screws 1) M3 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1.

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

'oO (114'l o 1 6 (5/8") * ln case of auto switch with 06 bore, add smm to S and Z.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

Plug-in Unit

input no. 1, 3, 5, 7.

Ozone Resistant

List of Ozone Resistant Products 1: Standard (HNBR) . 9 7. List of Ozone Resistant Non-HNBR Type Products 2: Series 80. 10 Reference Data: Photochemical Oxidants . 11 1.

Sine Cylinder Series REC

1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

2.0

Length 3 3 x 1 6 600 mm 10 1000 mm 3A 1/8" x 1/16" 4 4 x 2 4A 5/32" x 1/32" 6 6 x 4 6A 1/4" x 1/8" 100 mm Specifications Model LPV21 LPV22 Valve type N.C. N.O.

7.4

)5 S07A5 2(B) 4(A) 2 (B) 3 (R2) 1 (P) 4 (A) 5 (R1) y t 4-Position Dual 3-Port Valve 5(R1) 3(R2) u r e w q 1(P) N.C. + N.C.

VXA21/22

Min. 40 1 60 5 40 5 40 40 5 (1) 5 (2) Normally open (N.O.) Note 1) Dew point: 5C or less Note 2) 500cSt or less Note 3) "V" and "M" in the parenthesis are option symbols. Tightness of Valve(Leakage) Fluid Seal Non-leak Vacuum V, M 105atm cc/sec (1) (2) Liquid Air 1cm3/min 0.1cm3/min NBR, FPM, EPR Note 1) Different from the operating condition of pressure.