Vacuum Pad

flats 14 25 2.5 25 2.5 2 2 Dimensions Dimensions Part no.

MY2

8.5 11 NV 4.5 6.6 9 NW 85.2 124.8 150.1 NX 7.3 10.5 14 PP 5.3 8 16 Q 140 185 290 QQ 16.4 20.4 25.5 Model MY2HT16G MY2HT25G MY2HT40G U 5 6 8 UU 3 4.4 2 VV 10.5 15.3 29 X 7 9 12 XX 12 14 23 Y 5 8 12 Z 160 210 330 "P" indicates cylinder supply ports.

RZQ

22.4 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 45 33 14 40 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 50 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 63 130 102 39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5

CJP

Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

A_HEC-OM-K001

1.5.4 Disposing of Product . 1-14 1.5.5 Safety Interlock . 1-14 Chapter 2 Description and Function of Each Part . 2-1 2.1 Temperature Controller . 2-1 2.2 Heat Exchanger . 2-2 Chapter 3 Composition and Function of Product . 3-1 3.1 Composition . 3-1 3.1.1 Outline . 3-1 3.2 Function . 3-2 3.2.1 Auto tuning function . 3-2 3.2.2 Off-set function . 3-2 3.2.3 Learning control function . 3-2 3.2.4

HRX-OM-W032

This function resets the accumulated operation time. 5.16 14 Anti-freezing Circulating fluid is protected from freezing during winter or night.

JXCx-OMY0008

JXC-OMY0008-A 14.

CE

20 18 36 10 57.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 195.2 59 71.5 65.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 46 177.4 95 9 9 91 80 92 60 203 238 14 224 20 30 22 44 14 89.5 84.5 97 109.5 113 107 108 Dimensions for auto switch model D-F79W. 16 Series CEU Series

Series IDG

(67) (46) (26) IN Port size: 1/4 OUT Port size: 1/4 8 Width across flats 14 Width across flats 14 Width across flats 19 Width across flats 17 Purge air discharge tubing port for dehumidification Applicable tube O.D.: 6 (NPT thread: 1/4 inch) With fitting for purge air discharge (Option: P) (86) Purge air outlet for dehumidification (34) (67) (25) Width across flats 14 Width across flats

MQQ

Series MQM Refer to the standard type on page 14 for other dimensions.

VZS

Other dimensions are the same as the grommet type. 3-7-14 15 Series VZS2000 Manifold Specifications Refer to page 3-7-4 for wiring specifications. Plug-in Type: Stacking Type Manifold Base with D-sub Connector Wide range of interchangeability (D-sub connector (25P) conforming to MIL standard) Quick wiring permits easier installation.

o

-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .

Air Pilot Operated

Choose Manitold Block desired. e.g. #12, #14 or #16. 4. To specily a valve mounted on a manilotd btock Insd manitold number into valve number i.e. NVSA 41 1 4-'l 1 N b a NVSA 41 1 4-0ON vatle mount , on a #11 block. 't1 '12 = Mouoled on siacking manilotd block r,, NPT side ports (2) '14 = Mounled on stacking manifold block 7."

o

-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .

MXW Series Long Stroke Slide Table

14 14 14 V 121 141 166 191 216 A 56.5 31.5 31.5 31.5 31.5 31.5 B 138.5 163.5 188.5 213.5 238.5 263.5 5.5 MXW16 W 42.5 17.5 17.5 17.5 17.5 17.5 V 152.5 177.5 202.5 227.5 252.5 277.5 A 65.5 40.5 40.5 40.5 40.5 40.5 40.5 B 171.5 196.5 221.5 246.5 271.5 296.5 321.5 7 MXW20 W 51.5 26.5 26.5 26.5 26.5 26.5 26.5 V 185.5 210.5 235.5 260.5 285.5 310.5 335.5 A 83.5 71.5 41.5 41.5

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

-NVJAs14 1pc.NVJ4324 1pc.VJ300-10-14 Dimensions inch (mm) Body Ported Type: NVJA3O2-M3 (-F) 1.12\24.4) 0.14(3.5)Dia 2 l\,,lounting holes , 0.87 M3x0.5 0.04(1)Dia T 6 * : .

HRX-OM-W004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 AL01 : Low level in tank abnormal 1 AL02 : Low level in tank 2 AL03 : Phase loss / phase reverse error 7 3 AL04 : Water leakage 1 4 AL05 : Pump inverter error 2 5 AL06 : Internal fan stop 3 Alarm flag 1 6 AL07 : Fan Inverter error 8 7 Unused 8 AL09

Thermo-con/Rack Mount Type

This may shorten the pump life. 14. If tap water is used, it should satisfy the quality standards shown below.

CE

20 18 36 10 57.5 195.2 7 11.2 6.6 59 33 158.4 71.5 64 79.5 78 5.5 76.5 8 65.5 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 84.5 46 177.4 97 95 109.5 113 9 107 9 91 80 92 108 60 203 238 14 224 20 30 22 44 14 89.5 Dimensions for auto switch model D-F79W. 10-12-25 25 Series