VM

Fluid Air Operating pressure 0 to 1.0MPa A variety of actuator styles.

180

Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 25 Gripping force (N) External grip Gripping force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20

COQ2BP

These features plus its small wear area make the figure-8 more efficient and guarantee that it will have a longer life than the "0" ring or "U" packing. Standard Small lK)lnt Q f contacl f!)$utls In 1 8% 1 1'11:11011.

KJ

0 !1 !2 !

Process Pump Series PA3000/5000/PAX1000 Series PB1000

EXH Thread type FLUID IN Nil T Rc NPTF G NPT Built-in solenoid valve type F N T, F, N are order made specifications.

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

ZPT/ZPX

0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5

MQQ

A B C D E F Part no.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYP32 (M1) CYP32 (M2) CYP32 (M3) 0.05 0.05 0.05 0.04 0.04 0.04 Deflection (mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.5 1 1.5 2 0 0.5 1 1.5 2 0 0.5 1 1.5 2 0 Moment (Nm) Moment (Nm) Moment (Nm) Vertical Operation Intermediate Stop When using in vertical

MQQ

0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Intrinsically Safe Valve

Class I, II, III Division 1 Groups A, B, C, D, E, F, G Class I Division 1 Groups A, B, C, D Hazardous Locations Warning Note) Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009) (Refer to page 40 for details) Note) Based on dynamic performance test, JIS B 8375-1981.

VDW Series

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

Compact and Lightweight

)] Vacuum pressure 80 80 100 80 100 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] 60 60 75 60 75 60 Air consumption Suction flow rate 40 40 50 40 50 40 Suction flow rate Vacuum pressure 20 20 25 20 25 20 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 10 20 30 40 50 Supply pressure [MPa] 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 10 20 60 80 Supply pressure [

I/O Configurator (NFC version)

The number of effective points is limited within the set range of the output size. 0 to 32 points (0 to 4 bytes) Increase and decrease by 8 points (1 byte). d) Valve manifold 32 points/ 4 bytes Available output size e) Wireless communication Active/Idle Active Available If it is set to "Idle", the wireless communication is disconnected. f) AD refresh time 0.1/0.2/0.5/1/2/5/10/30/60 s 1 s

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

(mm) Deflection (mm) Deflection (mm) 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.1 0.2 0.3 0 0.1 0.2 0.3 0 0.1 0.2 0.3 0 Moment (Nm) Moment (Nm) Moment (Nm) CYV32 (M1) CYV32 (M2) CYV32 (M3) 0.05 0.05 0.05 Deflection (mm) Deflection (mm) Deflection (mm) 0.04 0.04 0.04 0.03 0.03 0.03 0.02 0.02 0.02 0.01 0.01 0.01 0.5 1 1.5 2 0 0.5 1 1.5 2 0 0.5 1 1.5 2 0 Moment (Nm) Moment (Nm) Moment (

I/O Configurator (NFC version)

control Clear Available 0 to 128 points (0 to 16 bytes) Increase and decrease by 16 points. 128 points/ 16 bytes Available b) Input size 0 to 128 points (0 to 16 bytes) Increase and decrease by 16 points. 128 points/ 16 bytes Available c) Output size Slave unit setting The valve output size is included in the output size of each station.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

HRX-OM-R005

0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 60Hz 50Hz Fig. 9-4 Cooling capacity(HRS060--20-(BJM)) 1. 5 1. 5 1. 5 1. 5 1. 5 1. 5 kW kW kW kW kW kW 1 1 1 1 1 1 0. 5 0. 5 0. 5 0. 5 0. 5 0. 5 0 0 0 0 0 0 9.5 Heating capacity 0 2 0 2 0 2 0 1 2 0 1 2 0 1 2 HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2050Hz HRS060-A-2060Hz HRS060-A-2060Hz HRS060

CE

0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.