Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8)

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP30-02BG For 0.4 MPa setting 1 l/min (ANR) or less (at P2 = 0.4 MPa) Air consumption Ex.) ARP30-02BG-1 For 0.2 MPa setting 0.6 l/min (ANR) or less (at P2 = 0.2 MPa) Ex.)

Compact Cylinder with Solenoid Valve/

Restrictor: ASN2-01 Pressure: 0.5 MPa Mounting orientation: Horizontal, No-load, Piston extended The above piston speed is for reference purpose only.

VCB

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K (mm) Electrical entry P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5

ZMA

min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) ZMA10H ZMA13H Exhaust Characteristics Exhaust Characteristics Flow Characteristics Flow Characteristics Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure

CC

min) 15 *Limited flow shows the limit of converter oil level speed (0.2m/s) which can maintain stability of converter oil level. 4.12-8 Air-hydro Converter Series CCT Air-hydro Converter/CCT63/CCT100/CCT160 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B ML1C REA REC RHC (mm) Model Air port size Rc (PT) Oil port size Rc (PT) A B lC DA DB DL H NL P QB QL S T W MTS CCT63-l CCT100-l CCT160-l 3/8 3/4 9.5 11

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AME

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.4.0-5 to 4.0-7 for more detailed precautions of every series. HAl w Make sure to install this product on horizontal piping.

AMF

(ANR)) 4B 1B B AMF250 AMF650 AMF1000 1 4 0.1 MPa 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) 2B AMF350 AMF800/801 B 3 8 0.1 MPa 0.1 MPa Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (m3/min (ANR)) Air flow rate (l /min

AFF

AFF2B AFF22B AFF75A 1 8B 2 3 4B B Max. flow line 0.1 MPa 0.1 MPa 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide

Stations: 01 (1 Station), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

AME

AME150 AME450 AME650 B 1 8B 1B 1 2 0.1 MPa 0.1 MPa 0.1 MPa Max. flow line Max. flow line Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

AMH

/min (ANR)) Air flow rate (l /min (ANR)) AMH550 AMH250 B B 3 4 1 4 Inlet air pressure Air pressure Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow rate (l /min (ANR)) AMH650 AMH350 B 1B 3 8 Inlet air pressure Air pressure Pressure drop (MPa) Pressure drop (MPa) 0.5 Max. flow line Max. flow line Air flow rate (l /min (ANR)) Air flow