Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread, Connector Type: S (M12 Connector Type), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)
D F9NV S MIW Double finger type 20 30 1 A S D F9BV S Single finger type MIS Scraper Cylinder bore Nil S No Yes Number of auto switches 12mm 20mm 12 2 pcs. 1 pc.
Symbol 40, 50 40 50 40 50 63, 80 100, 125 A14 A14N A14F A16 A16N A16F B8 B10 B12 B16 Rc1/8 NPT1/8 NPFT1/8 Rc1/8 NPT1/8 NPFT1/8 M8 x 1.25 M10 x 1.5 M12 x 1.75 M16 x 1.5 63 63 M14 x 1 80 80 Male thread 100 100 Mounting 125 125 M16 x 1.5 Pad type Female thread H Heavy duty Material N S NBR Silicon rubber Urethane rubber Fluororubber U F E EPR 1190 Series ZPT Vacuum Pad: Large/Heavy Duty Type
CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.
Standardized T-type arms and S-type arms Shape selectable to meet specifications/application.
9 23 55 53 28 M8 X 1.25 10 86 6.9 9.5 16 MM (N) M (NA) NN PA* PB PW Q QW RB RW S T U W X Y Z Bore size (mm) 12 M4 X 0.7 M8 X 1.0 6 8 27 30 60 80 85 26 RB0806 17.5 96 13 1 77 22 7.5 5 16 M5 X 0.8 M8 X 1.0 8 8 27 45 70 95 90 40 RB0806 15 103 13 2 92 22 7.5 5 20 M6 X 1 M10 X 1.0 10 10 29 60 100 120 105 46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 X 1 M14 X 1.5 10 12 50 60 100 130 105 50 RB1411
0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3 33.3 8.8 22.8 19 3.5 4 Note) Through-hole mounting is not possible for 10. 925 Standard Type / Series MHZ2 Finger Option 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment
Rc NPTF G NPT F N T, F, N are order made specifications.
Rc NPTF G NPT F N T, F, N are order made specifications.
) Variations R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 Port size Leak rate 1 x 10 5 Pa. m 3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27 4 High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50 How to Order ISE50
of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings
CRA1 CRJ U 05 90 E M9B S With external stopper CRQ2 Number of auto switches MSQ Nil S 2 pcs. 1 pc.
0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G YES Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) YES This system cannot be used because its learning function will not operate properly and the stopping accuracy will be worsen.
0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G YES Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) YES This system cannot be used because its learning function will not operate properly and the stopping accuracy will be worsen.
M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.
A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22
How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are
Both of these become slower as the operating pressure is increased. 14 Technical Data 5 He leakage 8 Exhaust time (low/medium vacuum) The time (t) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is t=2.3(V/S)log(P1/P2).
x 0.8 Rc 1/8 (A port) M5 01 Body ported (Single type) VKF332 (With bracket) 5 G M5 Body ported (For manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Port size Light/Surge voltage suppressor Valve option 01 Nil For vacuum For low power consumption For vacuum/low power consumption Continuous duty type Rc 1/8 (With sub-plate) Without sub-plate Nil S None With surge voltage suppressor With
1.5 40 Z + Stroke 97 2 57 T ZZ + Stroke (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 72 17 Note) Refer to pages 13 and 14 for accessories. 6 Clamp Cylinder with Lock