KA

<M5, M6> Tube O.D. (mm) Soft nylon Polyurethane A <M5, M6> P D L M Part No.

MGC

Refer to p.0-44 to 0-46 for common precautions of auto switch.

3

VXS VXS Model/Valve Specifications, Fluid and Ambient Temperature, VXB Valve Leakage Rate P. 219 VXE How to Order P. 220 VXP Other Special Options P. 221 VXR Construction P. 223 VXH Dimensions VXF Body material: C37, Stainless steel P. 224 VX3 Replacement Parts P. 225 VXA Glossary of Terms P. 226 Solenoid Valve Flow Rate Characteristics P. 227 Flow Rate Characteristics P. 232 Specific

Pneumatic Transfer System Series MF

Plate mounting support bracket Body mounting side support Auto switches mountable (both sides) Types of Units and Parts Type of units and parts Type of units Type of parts Single units P.1 to P.9 Combination units P.11 to P.18 Set parts P.11 to P.14 Parts P.16 Spare parts P.4 & 5 Optional parts P.2 Catalog pages Parts for combination units.

Air Cylinder

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAVM9NA v v V v v IC circuit 3-wire (PNP) M9PAVM9PA v v V v v 2-wire 12 V M9BAVM9BA v v V v v Water resistant (2-color indicator) Water resistant type auto switches can be mounted on the above models, but

VFN2000N

A 24 VK M5 thread 8 deep, with or without insert depending on base material. VZ 32 VF A' VFR Coding stud.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

V V V V 32 V V V V V 40 V V V V V 11 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) i Controller Nil Without controller Cm1mm With controller 1 D T 7 C Communication plug connector, I/O cable*4 Interface (Communication protocol/Input/Output) Mounting Symbol Type Applicable interface Nil

IR1000/2000/3000

-X465 0.1 to 1 Set pressure range (MPa) Desolution of setting and display (MPa) Power supply voltage Specifications AU 0.001 Class 10 With M5 fitting (Applicable tubing O.D. 6) Pressure switch Cleanliness Breather port 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With reverse connection protection) 45 mA or less (but 70 mA or less at current output) AF IR1000/2000: With M5 fitting (Applicable

VCA

Q 27 30 32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: M5 (Female Thread)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread

Booster Regulator Series VBA1110 to 4200 1

V 10 10 10 T = t x = 110 x = 110 (s). V 10 10 10 T = t x = 2.4 x = 24 (s).

reduces flow setting time

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method AS 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSl-M5l M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSl-U10/32l 10-32UNF VNote 4) V V V V V V AS-FE KE AS2ll1FSl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSl-l02 1/4 VNote 4) V V V V VNote 4) V V V V AS-FG R NPT Note 1) Sealant AS3ll1FSl-l02

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: -, Bracket: -, Operation Manual: -