VXF

LVA LVH LVD LVQ LQ LVN TI/ TIL PA PAX Conduit Terminal Conduit terminal: T VXF2150/2160 VXF2280 PB Q N K VXF2150 VXF2160 VXF2280 17-3-77 8 The VX series will be revised shortly.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 Note No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Soft Start-up Valve

The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. r w Exhaust OFF t e 6 AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

IDX-OM-U022

[IDFA150F-38/40] (100.7m) () (10 2m) DIN 80 268 217 20 8x 18 4x 18 A A 4x 20 A 160 1300 160 720 1290 9351 20 K K 64 75 DIN 80 (17 ) 40 1332 (14~18) 1432 R () P.1-5 P.1-5 P.1-5 () 9902 20 475 1030 950 IDFA100F150F 6 5 6.3 IDX-OM-U022 6. 6.4 [IDFA100F/125F] R R GFCI PE L1 L2 L3 TB1 THR MC1 CM OLR MC2 FM1 PRR FM2 T SWL PLC TB2 Y0 1 MC1 COM0 2 MC1 Y3 3 Y1 MC2 COM3 PRS1

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

VEX1

Construction Component Parts Description No. q w e r t y u i o !0 !1 !

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component Parts Material No.

3

V Ps + 0.1 293 S = 12.1 log10 () (6) t P + 0.1 T S : Effective area [mm2] V : Air tank capacity [L] t : Discharging time [s] Ps : Pressure inside air tank before discharging [MPa] P : Residual pressure inside air tank after discharging [MPa] T : Temperature inside air tank before discharging [K] Power supply Pressure switch Thermometer Pressure control equipment Control circuit Solenoid

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 705 Series ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 763 ARP20/30/40 Series Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Lubrication Equipment

When the volume of oil in the case reaches a certain level, float e ascends, valve t descends via lever r, nozzle w closes, and the feeding of oil stops, thus completing the oil feeding process. When the oil in the case is consumed, float e descends, valve t ascends via lever r, allowing oil to be fed from nozzle w. G AL Selection Warning qAir should not flow from the secondary side.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H F K H F Width across flats 7 Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10

IDX-OM-U021

18 K 75 K16K (17) 64 (K16K) 17) JIS 65A 10K JIS 65A 10K 40 51 1276 1418) (14~18) 1375 (1) () (1) 1,3 1,3 () 7122 20 350 700 752 (3) (2) (2) IDF100150F 6-3 6 3 IDX-OM-U021 6 IDF150F-30K16K (10,2m) () ) JIS 80A 10K ( (10 () () (K16K) JIS 80A 10K 2m) 0.7m) ( ( (10, 20 18 t 268 217 9351 t A A 8x23 8x19 75 20 4x A 1300 720 1290 160 150 t K K K16K 64 (K16K) (17) 17) JIS

80

110 VAC 1.6 D 200 VAC K L M N P Q R S T U V W 1.6 E 230 VAC 2.3 M5 Z Other voltages 3.2 Brass 1.6 2.3 1/8 For other special options, refer to page 462.

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

CJP

CJ2 CM2 Symbol A A' B C D E GA GB H J K MM NN Q T CD CH CK CT CU CX CY CZ Bore size (mm) 6 10 15 CG1 6 M10 x 1.0 18.5 7 9 14 16.5 3 10.5 11 17 6 8 M3 x 0.5 20.4 3 16 4 12 1.6 18 3.4 26 MB 6 M12 x 1.0 20.5 10 12 15 20 5 13 17 20 7 8 M4 x 0.7 23.9 5 20 6.5 13.5 1.6 24 4.5 33 6 M14 x 1.0 28 12 14 20 24.5 6 15.5 18.5 24 9 8 M5 x 0.8 31.7 6 25 8 17 2.9 29 5.5 42 MB1 Symbol S Z ZZ R Bore size (

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators HB HT HC X N A H HA CB W K 2 x plug 2 x P HP (Piping port) 4 x J x E T 4 x counterbore dia.