AC

Q[l/min(ANR)] = X X 60 X C X D2 X W 4 X 106 (P2 + 0.101) 0.101 Q[l/min(ANR)] = X X 60 X 1 = 841 X 1002 X 200 4 X 106 (0.8 + 0.101) 0.101 Refer to p.1.13-2 for flow rate characteristics table. Select booster regulator size from flow characteristic stable.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) MM TC W NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22 22 23 25 28.5 33 40.5 47.5 60.5 71 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 x 0.8 M6 x 0.75

Tie-rod Type Hydraulic Cylinder

2 M12 x 1.75 139 38 6.5 118 19 27 34 14 118 90 35.5 16 13 35 35 80 32 27 14 231 90 125 34 80 M14 x 2 M27 x 2 170 38 6.5 140 19 27 34 16 140 112 35.5 16 15 35 35 100 32 27 16 247 112 160 43 100 M16 x 2 M33 x 2 197 42 9 174 22 28 38 18 174 140 45 18 17 40 38 110 36 36 18 275 140 (mm) Without rod boot With rod boot Bore size (mm) P R X Y S T V W H ZZ e f h ZZ l 40 7.5 8 1/4 37 27 8 66 207 55

33

Q = m x C x (T0 Tt) it = r x V x C x iT it = 1 x 20 x 4.2 x 103 x 12 900 = 1120 [J/s] 1120 [W] Q = m x C x (T0 Tt) it x 860 = c x V x 60 x C x iT it x 860 Cooling capacity = Considering a safety factor of 20%, 1120 [W] x 1.2 = 1344 [W] = 1 x 20 x 60 x 1.0 x 103 x 12 Thermo-chiller Q x t: Heat capacity [kJ] 15 x 860 1120 [W] 20C Water bath Cooling capacity = Considering a safety factor

Hydraulic Filters

1.5 x 30 FH441 FH541 FH641 FH341 FH441 FH541 FH641 FH341 FH441 FH541 FH641 FH341 FH441 FH541 FH641 FH341 FH441 FH541 FH641 FH341 FH441 FH541 FH641 FH441 FH441 lP 04 Differential pressure indication switch M10 x 1.5 x 40 M10 x 1.5 x 30 M10 x 1.5 x 40 M12 x 1.75 x 40 M12 x 1.75 x 45 M12 x 1.75 x 40 M12 x 1.75 x 45 M16 x 2 x 50 M16 x 2 x 60 M16 x 2 x 50 M16 x 2 x 60 M20 x 2.5 x 65 M22 x 2.5

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-SYJ333 M5 x 0.8 M3 x 0.5 0.9 Type 10-SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27 0.15

Vacuum Pad

7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made to Order Note) The

Vacuum Pad

7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made to Order Note) The

Vacuum Pad

7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made to Order Note) The

Vacuum Pad

7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made to Order Note) The

Air Slide Table Series MXP

Stroke: S MXQ 2 x M4 x 0.7, depth 6 2 x M5 x 0.8, depth 8 MXP16-20 MXF A Width across flats 8 Width across flats 3 H Piping port 4 x M5 x 0.8, depth 7 17 11 26.7 (Plug: M-5P) 2 x M5 x 0.8 M6 x 1 10.5 MXW 5 MXJ 5.5 MXP 35 34 MXY 8.5 MTS 4 x M6 x 1 4H9 0 +0.030 , depth 4 4H9 0 +0.030 , depth 4 A Pilot hole diameter 5.1 19 6.5 320.05 0.50.05 30 D B 2 x M5 x 0.8 Piping port W 47 46 13 4H9 0 +

0.4

Load factor: ((Load weight x 9.8) /Theoretical force) x 100% Construction Conditions Base mounted Series CJ2 Series CM2 Series MB, CA2 Tube x Length Speed controller Silencer Tube x Length Speed controller Silencer T0604 x 1 m AS3002F-06 AN110-01 SQ1000 AN20-02 AS4002F-10 T0604 x 1 m AS3002F-06 T1075 x 1 m T1209 x 1 m SQ2000 Front matter 2 EX510 Gateway-type Serial Transmission System Plug-in

Modular F.R.L. Units

r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Double acting with spring Vm/min -X Transferred article W Transferred article W Transferred article W Transferred article W Bracket Cancel cap Auto switch capable 20Mounting is possible with no protrusion from the body surface.

Thermo-chiller

37.6 [Height 1585 x Width 1185 x Depth 955] HRS150-A -20 481 [218] HRS100-W -20 410 [186] Height 58.5 x Width 36.4 x Depth 37.6 [Height 1485 x Width 925 x Depth 955] HRS150-W -20 417 [189] HRS100-A -20-A 509 [231] Height 67.3 x Width 46.7 x Depth 37.6 [Height 1710 x Width 1185 x Depth 955] HRS150-A -20-A 522 [237] HRS100-W -20-A 452 [205] Height 63.4 x Width 36.4 x Depth 37.6 [Height 1610

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

S2 S3 S6 S7 AC servo motor (Incremental encoder) 100 W PNP 2pcs. AC servo motor (Incremental encoder) 200 W PNP 3pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 125l x 150l M10 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 130l x 155l M10 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 30l x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 110l x 135l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l

Thermo-chiller

2 x 4 !3 w Parts List (170) No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300