e q w VQC1100 VQC1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1
) Grommet W W U U X X U1 U1 X1 X1 z300 Q F D D z300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole R C C R E 1.2 1.2 1.2 1.2 E B1 B1 2 x P Port size 2 x P Port size B B DIN terminal Conduit terminal Y Y W W U U X X U1 U1 X1 X1 Cable 6 to 12 F Q 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D D S G1/2 Qp2 F 34 (44) 31.5 25 T C R R G1/2 E E Sp2 B1 2 x P Port size 2 x P Port size B1 B B (mm)
e, r, t, y q, w, t, y t Hexagon socket head plug r Plate mounting bolt MB Specifications and external dimensions other than above are the same as standard type.
) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts
3 e w !6 r !9 Note) With top cover removed !
W is width across flats dimension. M N LVQ 25 1 1/4 LVP Class 6 (E) Port size Class 2 to 5 R (NPT) LVW Metric sizes Inch sizes LQ1 LQ1 Connection threads R/NPT A E H L M N Min. port size W Connection threads R/NPT A E H L M N Min. port size W Model Applicable tubing O.D. Model Applicable tubing O.D.
3() PD20 0 S S S S () 0 r / m i n 0 r / m i n 1 S S S S 0 r / m i n 0 r / m i n 2 S S S S S S 0 r / m i n 0 r / m i n 3 S S S S S S S 0 r / m i n 0 r / m i n 6 40 7MR Configurator 7 MR Configurator .2 7.1 .2 7.2 .3 7.3 .5 7.4 .6 7.5 .8 7.6 .10 7.7 .14 7.7.1 JOG .14 7.7.2 .17 7.7.3 .19 7.7.4 (DO) .20 7.7.5 1 .22 7.8 .24 7.8.1 .24 7.8.2 .25
VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.
How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.
2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.
r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.
0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly !0 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !
Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.
H w H w H e e H H r 2.2-2 Series KJ Male connector: KJH Thread (T) UNF NPT 10-32UNF <10-32UNF> <10-32UNF> Tube O.D. (inch) H (Hex.) Min. hole dia.
Body oplrcn combnalon is Nominalbore size Aclualion I Nol ava labe vrthoul auto v tch l Nol avarlabe wth Double od (V/) r Nol availabe w h spnnq reLurn o.sp.ing enend. .r !
Contents No. q w e r t y u i o !0 !1 !2 !3 !
PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.