Type VK3000 Series Rubber Seal [Option] Specifications C: 0.54 dm3/(sbar) (Passage {4/2 5/3 (A/B R1/R2)}) Compact: Width 18 x Length 68 (mm) Low power consumption 4 W DC (Standard type) 2 W DC (Low wattage type) Suitable for copper-free applications All the parts in contact with fluid are non-copper materials Type of actuation Direct operated type 2 position single solenoid Air 10 to 50C
LO: Without connector MO: Without connector 1313 VP3145/3165/3185 Series Specifications Symbol -X80 Valve configuration Type of actuation Fluid Operating pressure range Pilot pressure Ambient and fluid temperature Lubrication Note 1) External pilot 3 port solenoid valve Double solenoid (-X80), Single solenoid (-X81) Air 101.2 kPa to 0.8 MPa 85 to 115% of main pressure, Min. 0.2 MPa 0 to 50C
specifications Electrical specifications VQC1000/2000 VQC4000 Single 0.1 MPa 0.15 MPa 0.1 MPa Double VQC Min. operating pressure 3 position 0.1 MPa 0.2 MPa SQ 4 position 0.15 MPa Max. operating pressure Note 3) 1.0 MPa (0.7 MPa) VQ0 Single 0.15 MPa 0.2 MPa Min. operating pressure VQ4 0.15 MPa Double 3 position 0.15 MPa 0.2 MPa VQ5 1.5 MPa Proof pressure Ambient and fluid temperature VQZ 10 to 50C
Operation in a low temperature condition Do not operate the valve when the ambient temperature is not between 10C and 50C. Take appropriate measures to avoid freezing of drainage, moisture etc. in low temperature. 6. Operation for air blowing When using a solenoid valve for air blowing, use an external pilot type.
01 Port 1(P) 11 2 Port size 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 1 M5 M5 2 2 M5 2(A) 1 4 3(R) Weight (kg) (1) 0.11 0.009 MPa 0.005 MPa 0.005 MPa 10 ms 0.16 0.19 0.25 0.35 0.55 0.75 1.5 2 4 ARJ Hysteresis (2) 0.045 MPa 0.018 MPa 0.018 MPa 0.023 MPa 0.009 MPa 0.009 MPa 0.027 MPa 0.014 MPa 0.009 MPa Sensitivity (2) AR425 to 935 Repeatability (2) 30 ms Air 0 to 50C
For models with a solenoid valve, the temperature of the solenoid valve section should be no greater than 50C. Selection Caution I All models 1. For high vacuum valves used in the main exhaust lines of flat panel display manufacturing equipment and other large manufacturing equipment, the XLF(V) or XLG(V) series, which employ O-ring seals for improved durability, is recommended. 2.
For models with a solenoid valve, the temperature of the solenoid valve section should be no greater than 50C. 4. Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks.
to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order. 50 50 B Bellows ZL Flat (U) Flat with ribs (C) ZY ZP02U to 08U ZP10C to 50C
to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order. 50 50 B Bellows ZL Flat (U) Flat with ribs (C) ZY ZP02U to 08U ZP10C to 50C
OUT1: Green, OUT2: Red IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating/Stored: 35 to 85% RH (No condensation) 1000 VAC for 1 minute between terminals and housing 50 M or more (500 VDC measured via megohmmeter) between terminals and housing 2% F.S. (25C reference) Display Display accuracy Indicator light Enclosure Operating temperature range Operating humidity
Operating temperature range 5 to 50C (No freezing) Fluid Air Applicable tubing material FEP, PFA, Nylon, Soft nylon, Polyurethane Operating pressure range 0.1 to 0.6 MPa Standard supply pressure 0.45 MPa Ejector Specifications 1 Vacuum pressure reached2 [kPa] Maximum suction flow rate2 [L/min(ANR)] Air consumption2 Weight [g] Piping Model Nozzle diameter [mm] Caution Type S Type L Type S
AM250 AM250 AM350 ID-200S ID-300S ID-400S ID-600S ID-200Z ID-300Z ID-400Z ID-600Z ID-DPM8 Bracket Mist Separator Adsorbent set Note) Adsorbent set (for low dew point) Note) Indicator set Note) Adsorbent and adsorption tube filter for one air dryer (two adsorption tubes), set of O-rings Option Specifications (Low dew point) ID20 ID30 ID40 ID60 Outlet air atmospheric pressure dew point Model 50C
Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors. 11-7-18 19 Series CVRA1 Rotary Actuator with Solenoid Valve Rack & Pinion Style Specifications Fluid Air Proof pressure 1.35 MPa Max. operating pressure 0.9 MPa Min. operating pressure 0.15 MPa 0C to 50C (No freezing) Ambient and fluid temperature Lubrication Non-lube Mounting Basic style, Foot style CRB2 VF3
stop Input origin Automatic/Manual Manual: extended, retracted (2 bit) Reset Completion of positioning signal Completion to figure out origin signal Output signal Program END signal Abnormal signal NPN open collector (30 VDC, 50 mA) PNP open collector (30 VDC, 50 mA) Control output 20 kHz (kcps) Counting speed 90 to 110 VAC, 50/60 Hz and 21.6 to 26.4 VDC, 0.4 A Power supply 0 to 50C
Bore size(mm) 32, 40, 50, 63, 80, 100 Mounting Basic, Foot, Flange, Clevis, Trunnion 10 to 150C Ambient and fluid temperature Packing material Fluorine rubber Grease Heat resistant grease When using with the operating temperature fluctuated between 50C or less and 100C or more, the operating speed, etc. will be largely restricted by the durability. Prior to use, please contact SMC.
VFR4000, plug-in and non plug-in types, Maximum operating pressure: up to 0.9MPa, Ambient and fluid temperature: Max. 50C, Manual override: non locking push style VFR4000 SOL VALVE 4/5 PORT. VALVE DBL NON PLUGIN BASE MT. VALVE. VFR4000 BASE MT 1/2. 2.61369 lb. RE.
VFR4000, plug-in and non plug-in types, Maximum operating pressure: up to 0.9MPa, Ambient and fluid temperature: Max. 50C, Manual override: non locking push style VFR4000 SOL VALVE 4/5 PORT. VALVE DBL PLUG-IN BASE MOUNT. VALVE. VFR4000. 1.54323 lb. 2E.
VFR2000, plug-in and non plug-in types, Maximum operating pressure: up to 0.9MPa, Ambient and fluid temperature: Max. 50C, Manual override: non locking push style VFR2000 SOL VALVE 4/5 PORT. VALVE, MECH, COPPER FREE. VALVE. VFR2000. .96800 lb. 26.
VFR2000, plug-in and non plug-in types, Maximum operating pressure: up to 0.9MPa, Ambient and fluid temperature: Max. 50C, Manual override: non locking push style VFR2000 SOL VALVE 4/5 PORT. VALVE DBL PLUG-IN BASE MOUNT. VALVE. VFR2000. .91044 lb. 2G.
4.8), Coil rated voltage: 12, 24VDC; 100, 110, 200VAC, Response time: 5ms or less (VQ20); 20ms or less (VQ30), Ambient/fluid temp: -10 to 50C VQ1000/VQ20/VQ30 VALVE. VALVE, SOL. VALVE. VQ1000 BUILT IN FITTING >1/4. 0.24912 lb. WD.