Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

S

S07 1 1 5 Serial transmission kit 1 set Manifold base part no. 3 sets Valve part no. (Stations 1 to 3) 2 sets Valve part no. (Stations 4 to 5) 2 sets Valve part no. (Stations 6 to 7) 1 sets Blanking plate part no.

SMC VVQ1000-P-1-N7 ind supply spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $56.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-C6 ind exhaust

SMC VVQ1000-P-1-N7 ind supply spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $56.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-C6 ind exhaust

SMC VVQ1000-P-1-N7 ind supply spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $56.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-C6 ind exhaust

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

SMC VVQ1000-P-1-N7 ind supply spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $56.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-C6 ind exhaust

SMC VVQ1000-P-1-N7 ind supply spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $56.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-C6 ind exhaust

SMC VVQ1000-P-1-N7 ind supply spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $56.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-C6 ind exhaust

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PRODUCT SPECIFICATIONS S E R I E S I P 5 0 0 0 / I P 5 1 0 0 IP5000 (Linear) IP5100 (Rotary) SERIES 20 100 psi SUPPLY PRESSURE STROKE SENSITIVITY LINEARITY HYSTERESIS 0.4" 3.4" 60 100 degrees WITHIN 0.1% F.S. WITHIN 0.5% F.S. WITHIN 1% F.S. WITHIN 0.75% F.S. WITHIN 1% F.S. WITHIN 2% F.S. WITHIN 0.5% F.S.

AP10PA

(Top view) r r e Pressure gauge unit 2) Code Unit psig/bar MPa w q w q w q 1) Refer to gauge guide (P.1058) for gauge specifications.

 MICRO MIST SEPARATOR REGULATOR 

AW*-OMF0053-A PRODUCT NAME MICRO MIST SEPARATOR REGULATOR MODEL/ Series AWD20-(F,N)01(F,N)02(B,C,E,G,H)(-1,2,6,C,J,N,R,Z) AWD30-(F,N)02(F,N)03(B,C,D,E,G,H)(-1,2,6,8,J,N,R,W,Z) AWD40-(F,N)02(F,N)04(B,C,D,E,G,H)(1,2,6,8,J,N,R,W,Z) Contents PAGE 1. SAFETY INSTRUCTIONS 15 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 6 5. MAXIMUM APPLICABLE FLOW RATE 7 6.

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) RoHS How to Order LEFS 25 R B 200 S 1 6N 1 Motor mounting position Size Motor type 16 25 32 40 R Right side parallel L Left side parallel Symbol Type Applicable size Compatible controllers/ driver LEFS16 LEFS25 LEFS32 LEFS40 LECP6 LECP1 LECPA Nil Step motor (Servo

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt xing brackets 2 pcs.

Thermo-chiller

m/Height 1 m)5 dB(A) 75 Waterproof specication IPX4 Alarm code list sticker 1 pc.

Compact End Lock Cylinder Series CBQ2

W Z L M N O P 32 7 34 5.5 9 Rc 1/8 7 49.5 14 40 7 40 5.5 9 Rc 1/8 7 57 14 50 8 50 6.6 11 Rc 1/4 8 71 19 63 8 60 9 14 Rc 1/4 10.5 84 19 Series CBQ2 Dimensions Foot type/CBQ2L, CDBQ2L (mm) Foot type B + Stroke L With rear lock With front lock Bore size (mm) L L1 LD A B LS A B LS 89.7 65.5 49.5 82.2 58 42 17 38.5 6.6 32 Special cap bolt 99.2 75 59 88.7 64.5 48.5 17 38.5 6.6 40 LH LY 101.7 75.5

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket), Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment