High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 15 for changed part. Number corresponds with the parts number on the construction drawing.

Compact and

15 Suction flow rate 30 Air consumption Suction flow rate 40 40 40 10 10 20 20 20 20 5 5 10 0 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 12 14 16 Suction flow rate [L/min(ANR)] Suction flow rate [L/min(ANR)] Supply pressure [MPa] Supply pressure [MPa] ZU07SA Exhaust Characteristics Exhaust Characteristics Flow Rate Characteristics Flow

Counter/Extension Cable

Wiring for control signal input (Selection among Reset, Hold, Bank) Make each control signal to be the transistor which can run more than 15 mA or the contact output. Input time for reset signal should be more than 10 ms. Bank selection and hold will function only when the input signal is applied. COM is common to each signal input. Applicable to NPN and PNP input.

AMD

Option Bracket J: With drain guide (Option) female thread T: With element service indicatior Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

AME

15 16 20 24 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 9 11 13 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41

AMF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket (Option) 2-port size Maintenance space M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100

AMH

Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

REC

Stroke H L Z+Stroke RR ZZ+Stroke (mm) A AL B1 CD CX D E F G H H1 I K L MM N NA Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 30 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 34.5 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 150 to 1000 M14 X 1.5 40 24 21 22 10 15

High Power Cylinder:

Auto Switch Setting Position Auto Switch Mounting Height (mm) (mm) D-C7 D-C8 D-C73C D-C80C D-H7l D-H7C D-G5NTL D-H7lW D-H7lF D-H7BAL D-B5 D-B6 D-A3l D-A44 D-G39 D-K39 D-B59W D-C7 D-C8 D-H7l D-H7lW D-H7lF D-H7BAL D-B5/B6 D-B59W D-G5NTL D-A3l D-G39 D-K39 D-A44 D-C73C D-C80C Bore size (mm) A B A B A B A B A B A B A B HS HS HS HS HS 20 20.6 9 14.6 8.5 14.1 14 10.5 16.1 12.5 18.1 11.9 17.5 19.6 15

10-my1b-e

MY50-16A-Stroke 14 Seal belt 1 MY50-16B-Stroke MY63-16B-Stroke MY80-16B-Stroke MY100-16B-Stroke Dust seal band 15 1 MYB50-15CA7165B MYB63-15CA7166B MYB80-15CK2470B MY100-15CK2471B Side scraper 27 2 14, 15, 27 and 34 are not included in the seal kit. Order them as required with by individual part numbers.

Cooling capacities: 10 kW or 15 kW ; Temperature range setting: 5 to 35°C ; Temperture stability: ±1.0°C ; Power supply requirement: 3-phase 200 VAC 50 Hz or 200~230 VAC 60 Hz ; Waterproof specification: IPX4 ; Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution

Cooling capacities: 10 kW or 15 kW ; Temperature range setting: 5 to 35°C ; Temperture stability: ±1.0°C ; Power supply requirement: 3-phase 200 VAC 50 Hz or 200~230 VAC 60 Hz ; Waterproof specification: IPX4 ; Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution

The arm opening angle ranges from 15° to 135°and can be easily changed by replacing the stopper body. Available in 50 and 63 bore sizes. The operating time for arm opening angles of 15° to 90° can be set to 0.6 s. Compiles with NAAMS standard (CKZ5N); 9 opening angles: 15, 30, 45, 60, 75, 90, 105, 120, 135; Easier mechanism unlocking; Space-saving and lightwieght; High clamping force

, Length A(mm): 32, Compatible Fluid: Compressed air, Body size: 15

, Length A(mm): 32, Compatible Fluid: Compressed air, Body size: 15

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT, ACTUATOR, CQ2-Z COMPACT CYLINDER, GD, 16MM CQ2-Z DOUBLE-ACTING, .15400 lb, SeriesModelActionNoteCQ2StandardCQ2Double acting, Single rodExcept with rubber bumper

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT, ACTUATOR, CQ2 COMPACT CYLINDER, GC, 16MM CQ2 OTHERS (COMBO), .00000 lb, SeriesModelActionNoteCQ2StandardCQ2Double acting, Single rodExcept with rubber bumper

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, COMPACT, CUSHION, ACTUATOR, CQ2 COMPACT CYLINDER, GD, 16MM CQ2 DOUBLE-ACTING, 1.32000 lb, SeriesModelActionNoteCQ2StandardCQ2Double acting, Single rodExcept with rubber bumper

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, TUBE ASSY, ACTUATOR, CQ2 COMPACT CYLINDER, G1, 16MM CQ2 PART, .00000 lb, SeriesModelActionNoteCQ2StandardCQ2Double acting, Single rodExcept with rubber bumper