Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

( Up to 7% reduction in square area installation Up to 35% reduction in cubic area installation ( Wide variety of manifold option Accommodates enclosure IP65 Dust/Splashproof type 3-11-1 2 ISO Standard Solenoid Valve Size 1, 2, 3/Single Unit Series EVS7-6/7-8/7-10 How to Order S 3 EVS7 6 FG M0 Valve Size 6 8 10 Thread type Size 1 Nil F T Rc Size 2 G Size 3 NPTF Passage symbol Courtesy of

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Air Slide Table Series MXQ

Applicable cylinder bore size Metal stopper 6 8 12 16 20 25 6 8 12 16 20 25 3 Air Slide Table Series MXQ Shock Absorber Specifications Table Accuracy RB0805 RB0806 RB1007 RB1411 RB1412 Shock absorber model MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 B C Applicable slide table Radial internal clearance 19.6 14.7 5.88 2.94 0.98 Max. absorbed energy J 12 11 7 6 5 Stroke absorption mm M 50 to 500 Max. impact

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

A, B port specifications P, R port A, B port Port size M3 0.5 M5 0.8,N3T ( one touch fitting) SYJ3 23 0.9 (0.05) __ 1.2(0.067) Effective area Note 1) mm2(Cv) SYJ3 33 Socket : 26 poles MIL type with strain relief conforms to MIL-C-83503 Connector Internal wiring Note 2) Both for +COM and COM SYJ3 23 5 6 LOU -M3 SYJ3 33 5 6 LOU Applicable solenoid valve Rated voltage 24VDC,12VDC Note 1) Value

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 13 140 18.5 39 51.5 118 136.5 5 12.5 20 22 40 43 13 13 137 15.5 36 50 115 13 133.5 12.5 52.5 50 48.5 ZPT25F10-0-A14 ZPT50F10-0-A14 141 19.5 40 119 137.5 6 13.5 25 28 50 53 ZPT32F10-0-A14 135.5 16 36.5 115.5 134 13 32 35 49 Additional dimensions by stroke(mm) Additional dimensions by stroke(mm) K P Q: 6 Q: 8 K

Compact and Lightweight

Model 6 6 6 ZH05DA ZH07DA 1/4" 1/4" 1/4" ZH05DA ZH07DA One-touch One-touch SUP. EXH. 6 6 8 ZH10DA 1/4" 1/4" 5/16" ZH10DA 8 10 10 ZH13DA ZH15DA 5/16" 3/8" 3/8" ZH13DA ZH15DA 10 12 12 ZH18DA ZH20DA 3/8" 1/2" 1/2" ZH18DA ZH20DA One-touch Oval release button is only available with 6. VAC. One-touch and screw-in connection SUP. VAC. EXH. Model SUP. VAC. EXH.

energy saving effect

HRSH 090 6 Signal for the completion of preparation A signal is output when the circulating fluid temperature reaches the set temperature, when using contact input/output and serial communication. !0 !1 !2 !3 !4 !5 !6 HRSH HRSH No.

MIW/MIS

25 MB MA HC HE KB KA LA LB LC PA PB PD PC ME MD MIS12-10 MC HD HA, HB JB JA N Model 48 38 28 39 29 19 MIS12-30 MIS12-20 13 10 7 6 4 3.5 17.5 11.6 2.3 M2.6 x 0.45 19 4 M4 x 0.7 6 11 5 2.5H9 0 +0.025 18 6 MIS20-30 MIS20-20 MIS20-10 7 40.5 30.5 20.5 52 42 32 8.5 17.5 4H9 0 +0.030 5 5 2.8 M3 x 0.5 26 6 M6 x 1 9 25 12 8 10 15 14 26 10 Series MIW/MIS Finger options Tapped on upper and lower faces

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

Action D S Rod end threads Double acting Single acting (spring extended) Rod end female threads (4 without threads) Rod end male threads Nil M Table 2 Auto switch specifications Table 1 Standard strokes Action Bore size (mm) 4 6 8, 10 4 6 8, 10 Standard stroke (mm) 4, 6, 8, 10 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 4, 6 4, 6, 8 4, 6, 8, 10 Load voltage Lead wire length (m) Indicator light Wiring

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Q = D __ 4 6 _ 1000 Q = (D d) __ 4 6 _ 1000 Formula (1) .

AC Servo Motor Driver (Pulse input type)

Lists the history (Maximum 6 cases) of alarms that occurred in the past.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n 2) (n = 4, 6) Note 4) Rail mounting D-A7mH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) D-F7m D-J79 5 5 15 + 15 (n 2) (n = 4, 6) Note 4) D-F7mV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-F7mW/J79W D-F7BA/F79F/F7NT 10 15 15 + 20 (n 2) (n = 4, 6) Note 4) D-F7mWV D-F7BAV 10 15 10 + 15 (n 2) (n = 4, 6) Note 4)

E-P HYREG

0.7 MPa) Note 6) The supply pressure must be under the maximum operating pressure.

Aluminum High Vacuum Angle Valve

DBellows seal P.448 to P.453 10-6 to atmospheric pressure Single acting (N.C.) 10-10 10-11 XSA XLDV (With solenoid valves) O-ring seal Prevents a pump from running overloaded. XVD Standard XGT XLH CYV 10-6 to atmospheric pressure P.454 P.455 Particle free cleaned Bellows seal 10-10 10-11 Standard Standard Manual (Size 16: None) XLS P.456 to P.458 Single acting (N.C.)

Ionizer Nozzle type IZN10 Series IZS

Pressure gauge 6 Union tee fitting Flow meter O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) Ionizer Fig. 1: Flow rate characteristics measuring circuit 446 Technical Data IZN10 Series Ozone Concentration (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 0.03 IZS IZN IZN IZF Ionizer ZVB 0.02 Concentration [ppm] Energy saving static neutralization nozzle/

EXxx-OMN0037CN

5 5 20 20 F7FFE -3276732766 0 1 0 0 4 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -31No.EX-OMN0037CN-A -32No.EX-OMN0037CN-A EX600-AM B M12 (5 )4 2 2 M12 (4 ) No. 1 LED 2 () 3 () 4 5 6 () -33No.EX-OMN0037CN-A 1 24 V() 24 V() 2 + 3 0 V() 0 V() 4 0 V() 5 FE FE 1M12 (4 ) 1 1 24 V NC

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

6 !7 !8 q w e r t y u i o !0 !1 !2 !3 !4 !

MK

6 !7 !8 !

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Electrical entry G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

Electric Actuator Triple Axis P&P Unit

0 200 6 0 150 6 0 100 Stroke F E Stroke F E 20 7 900 20 7 850 18 6 800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 13 Electric Actuator/Maintenance Guide 1 Be sure to read before handling.