Aluminum High Vacuum Angle Valve G after is grommet, C for conduit, T for terminal, and D for DIN. Note 2) Refer to Construction for component parts numbers.
kit r AXT100-2-TB2 (4) Terminal block assembly (8 terminals) T kit t VZ Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PS20) of q SI unit and w P kit (20 pin).
t e l a m e F ) T P ( c R 8 / 3 T P N 8 / 3 ) T P ( c R 3 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 3 6 8 0 1 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 3 ) T P ( R , 6 8 / ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 4 / 1 KM11 4 1 M K h c u o t e n O g n i t t i f g n i t
1 t !9 !2 !6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !
Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3
8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.
8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.
If Option T is selected, Option T1 cannot be selected.
ZP3-T(10/13/16)UM;(J/K)3-@ ZP3-T(10/13/16)B;(J/K)3-@ ZP3-T(10/13/16)UM;(J/K)6-@ ZP3-T(10/13/16)B;(J/K)6-@ ZP3-T(10/13/16)UM;(J/K)10-@ ZP3-T(10/13/16)B;(J/K)10-@ ZP3-T(10/13/16)UM;(JB/K)15-@ ZP3-T(10/13/16)B;(JB/K)15-@ ZP3-T(10/13/16)UM;(JB/K)20-@ ZP3-T(10/13/16)B(JB/K)20-@ Buffer assembly part no. Note 3) Buffer assembly part no. Note 3) Pad unit part no.
F Nil Rc G N T NPT NPTF Brackets are not installed.
Note 2) To insert the T-nuts, remove the covers at both ends of the body and insert them into the T-slots.
Kit (Terminal block) L Kit (Lead wire) M Kit (Circular connector) q SV e SYJ t t SZ VF VP4 VQ 1/2 y VQ 4/5 Corresponding kit S(EX600, EX250, EX126), F, P, T @0 VQC 1/2 !
Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.
During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.
O e b u t ) h c n i ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M R(PT) 6 1 / 3 8 / 1 S 1 0 5 0 T 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 5 . 2 2 4 2 5 . 6 1 6 2 1 4 / 1 S 2 0 5 0 T 2 Q K 4 1 5 . 6 2 6 2 1 2 8 / 1 S 1 0 7 0 T 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 3 2 6 2 7 1 6 . 4 2 1 4 / 1 4 / 1 S 2 0 7 0 T 2 Q K 4 1 5 . 7 2 8 2 2 2
( di spl ayed al t ernat el y) Press Skey f or 2 seconds or m ore, t hen go out f rom det ai l set t i ng m ode. ( Sel ect t he m enu w i t h or keys, t hen j um p t o anot her i t em . ) Lock keys ( ref er t o P9) Rel at i on bet w een set t i ng and sensi t i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y D ef aul t : 13 - Zero clear The display can be reset to
5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.
Construction The same symbol Without buffer Replacement of the symbol T ZP 02 A5 UN [Pad model no.]