] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: None, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 24 V DC, Cable Connector Type: Right-angle

] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: None, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 24 V DC, Cable Connector Type: No

] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: None, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 24 V DC, Cable Connector Type: Straight

] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-5V] Voltage Source Type DC 0~5V, Accessory: Flat-type bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector

] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-5V] Voltage Source Type DC 0~5V, Accessory: Flat-type bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector

] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-5V] Voltage Source Type DC 0~5V, Accessory: L-bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector Type

] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-5V] Voltage Source Type DC 0~5V, Accessory: None, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector Type: Right-angle

] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: Flat-type bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector

] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: Flat-type bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector

] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: None, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector Type:

PA3000/5000/PAX1000

(except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PA3-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PA3-32 KT-PAX1-36 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PA3-36 KT-PAX1-37 Check valve kit Check valve kit Switching valve parts kit

O

AKB/AKH CHECK VALVES Available with One-Touch Fitting; Bushing Type and Straight Type; Applicable OD in metric: 4, 6, 8, 10, 12 and in imperial: 5/32, 1/4, 5/16, 3/8, 1/2. ASD DUAL SPEED CONTROLLER ZFC VACUUM FILTER Inline Type with One-Touch Fittings; Applicable Tube Sizes Metric: 4, 6, 8mm; Imperial: 5/32, 1/4 5/16; Cartridge Type allows Element Replacement.

Pressure Control Equipment

4 1 2Note) to 2 4 1 32 Auto feed lube ALF400 to 900 With auto lubrication function Bracket 14-13-6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 1 32 Auto feed tank ALT-5/-9 With inlet pressure insulation function Float switch 5,000 9,000 14-13-6 AIR OIL 8 3

VCL

Note 1) TL is available only for standard specifications valve. 3/4 (20A) 17-2-32 5 Series VCL Direct Operated 2 Port Solenoid Valve For Oil Specifications Standard specifications High temperature specifications Valve construction Direct operated poppet Oil [50 mm2/s] or less Fluid Withstand pressure (MPa) 5.0 Body material C37, Stainless steel Valve specifications Coil specifications Seal

VVXA21/22

Series VVXA31/32 Common (C.O.) Fluid Standard specifications Option Note) Air (Standard, Dry) Vacuum (up to 1.3 x 102 Pa) Turbine oil Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 101 Pa)(V) Non-leak (106 Pam3/s or less) (V) Other Note) Refer to page 17-3-14 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.

VXA21/22

Series VXA31/32 Dimensions P port Bracket Pilot port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J M 14.5 17 L 29 32 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5

ZFC Series

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

ZPT/ZPX

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions Dimensions A (mm) ZL (mm) Model Model A B C D E F G Y B C D E F G Y ZY ZPT40HB-B8 ZPT40HB-A14 M8 x 1.25 40 41.4 28.4 43.2 20.5 32 62 13 40 41.4 28.4 43.2 20.5 32 13 ZPT50HB-A14 -B10 M10 x 1.5 50 51.9 35.7 54 24 35.5 65.5 16.5 ZQ ZPT50HB-B8

/ 69 mm, Width: 1.26 in / 32 mm, Height: 1.26 in / 32 mm, Net Weight: .29 lbs. / .13 Kg Series Configured Datasheet.

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6