Coolant Valve

. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F 2B Flange Semi-standard 2 B 1 2 Flange 65F 65 (45) 8 Electrical entry/With light/surge voltage suppressor 3B Valve size 1 Valve size 2 to 9 80F 80 (56) 9 Symbol Electrical entry Flange Values in parentheses are N.C. at 1 MPa.

Cylinder with lock

2 For 40 to 100 12 BUSHING 1 32 TIE ROD 4 13 HEXAGON SOCKET CAP BOLT 4 33 TIE ROD NUT 8 14 HEXAGON SOCKET CAP BOLT 2 34 WEAR RING B 1 15 WEAR RING A 2 35 ROD END NUT 1 16 PISTON SEAL A 1 36 MAGNET (1) For MDWB 17 ROD SEAL A 1 37 ROD SEAL B 1 18 GASKET 1 38 PISTON SEAL B 1 19 ELEMENT 1 39 CUSHION SEAL 2 20 RELEASE BOLT 1 40 CUSHION VALVE SEAL 2 41 CYLINDER TUBE GASKET 2 43 - Revision history

Air/Manually Operated High Purity Chemical Valve Series LV

A B A B Non-locking Locking Threaded Type LVH20 4 LVH30 8 LVH40 12 Model Orifice diameter Material SUS316 PPS PFA 1/4 3/8 3/8 3/8 SUS316 PPS PFA 3/8 1/2 1/2 1/2 SUS316 PPS PFA Port size 1/8 1/4 1/4 1/4 Symbol Type Basic type Valve type N.C. A B A B Non-locking Locking Manifold (5 stations max.)

Micro Mist Separator

How to Order 30 03 B AFD D Symbol Description Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 06 3/4 Nil Without mounting option a Mounting B With bracket Option Nil Without auto drain b Float type auto drain C N.C. (Normally closed) Drain port is closed when pressure is not supplied. D N.O.

ChemicalThermo-con

Signal contents A DC output B DC output C DC output 1) Common to HED003-C2A, HED005-C2A, HED007-C2A RS-485 D DC output E DC output Pin No. Signal contents D C F DC output 1 RS-485 BUS + 5 4 3 DC connector (HED007-C2l) G FG 2 RS-485 BUS 2 1 3 Unused 4 Unused 3.

Mist Separator

How to Order 30 03 B AFM D Symbol Description Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 06 3/4 Nil Without mounting option a Mounting B With bracket Option Nil Without auto drain b Float type auto drain C N.C. (Normally closed) Drain port is closed when pressure is not supplied. D N.O.

KJ

8 9.6 10 17.5 15.5 2.5 1 8 1 4 1 8 10.4 10 18 16 3 5 32 1 4 1 8 1 4 13.2 10 20.5 17 4.6 1 4 3 8 Applicable tubing 1 4 3 8 3 8 17.9 17 25.5 21 7 Connection thread 1 2 3 8 21.7 17 28 22 9.6 1 2 1 2 Reference dimensions after NPT thread installation.

Manifold Specifications

Type 21P Single base/B mount Common SUP/Common EXH 3 to 12 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP), R(EXH) Valve stations A, B port location 1(P), 3(R) port 4(A), 2(B) port Port size Valve (1) effective area (mm2) (Cv factor) 1 4: 0.48, 4 3: 0.85 VZ1120 Socket: 26 pins MIL, with strain relief (Conforming to MIL-C-83503) Applicable flat ribbon cable connector Internal wiring

Pressure Relief 3 Port Valve with Locking Holes

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

Series AP3100

B A B B 45 45 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 1.0 (25.4) 1.0 (25.4) AP3650 AP3657 1.88 (47.8) 0.44 (11.2) 3.02 (76.7) 0.13 (3.3) 0.4 (10.2) 1.87 (47.5) A B B 0.44 (11.2) 3.6 (91.4) 45 1.0 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) A B B Connections A B inch inch (mm) (mm) FV4 MV4 TW4 FV6 MV6 TW6 FV4 MV4 TW4 FV6 MV6 TW6

VER2000/4000

proportional valve (VEP type) Current 5 (R1) 4 (A) 1(P) 2 (B) 3 (R2) IRV Simplifying circuit design Space-saving and piping work eliminated 2 (A) 1 (P) Selection of inlet pressure or atmosphere 3 (R) 5 (R1) 4 (A) VEX1 1(P) 2 (B) 3 (R2) SRH SRP SRF System Diagram ARX20 Power amplifier VEA25 VCHR Control circuit Voltage Current ITV 0 to 5 VDC 4 (A) IC 2 (B) PVQ Electro-pneumatic proportional

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Direction A 1.

Suction cups with flange

Plate B (with O-ring) Tighten by hand and give it an additional turn approx. 1/4 rotations with a wrench.

HRX-OM-W060

(B contact). Contact output signal 3 WRN alarm selects N.O. (A contact) or N.C. (B contact). (1) (2) (3) Setting of contact output signal 1 to 3 Table 5.4-27 Setting of contact output signal 1 to 3 No.

SYJ300-OMU0003

ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

240

1 t !

Power Valve: Economy Valve Series VEX5

Port size E F G H I L M P Q A Model B J R T U C D K N O S Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions

MHY2/MHW2

D-Y7 W N B D-Y7BA D-Y69 A B D-Y7 WV N B Protrusion [mm] In-line Perpendicular A B D-Y59 O MHW2-20D S 7 12 5 12 12 O MHW2-25D S 7 11 5 10 11 O MHW2-32D S 4 9 2 8 9 O MHW2-40D S 3 8 1 7 8 Hysteresis Switch operating position (ON) O MHW2-50D S 1 6 5 6 Switch return position (OFF) N B D-Y7BA Auto switch model No. Gripper model No.

Rotary Gripper Series MRHQ

MRHQ16 P1 b MRHQ10 1 0.5 Dimension of load>attachment Dimension of load1] Moment of Inertia: 1 x 10-5 kgm Rotation time: 0.3s/90

PFxx-OMJ0005CN

relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4