] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: L-bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 24 V DC, Cable Connector Type
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: L-bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 24 V DC, Cable Connector Type
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: L-bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 24 V DC, Cable Connector Type
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: None, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 24 V DC, Cable Connector Type: Right-angle
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: None, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 24 V DC, Cable Connector Type: No
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: None, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 24 V DC, Cable Connector Type: Straight
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-5V] Voltage Source Type DC 0~5V, Accessory: Flat-type bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-5V] Voltage Source Type DC 0~5V, Accessory: Flat-type bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-5V] Voltage Source Type DC 0~5V, Accessory: L-bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector Type
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-5V] Voltage Source Type DC 0~5V, Accessory: None, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector Type: Right-angle
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: Flat-type bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: Flat-type bracket, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector
] One-Touch (inch), Control Side, Connection Diameter: Ø5/32, Pressure Gauge: [Not Provided] No, Input Signal: [DC0-10V] Voltage Source Type DC 0~10V, Accessory: None, Set Pressure: 0.001 to 0.9 MPa, Specification: For single unit, In Side Tube Size / Fitting Size: SUP: ø5/32, Out Side Tube Size / Fitting Size: OUT: ø5/32$EXH: ø5/32, Power Supply Voltage: 12-15 V DC, Cable Connector Type:
PA3000/5000/PAX1000 (except IDG1, IDG5) Maintenance Part Lists PA3000/Automatically operated type PA5000/Automatically operated type PAX1000 KT-PA5-31 KT-PA3-31 KT-PAX1-31 Diaphragm kit (PTFE) Diaphragm kit (PTFE) Diaphragm kit (PTFE) KT-PA5-32 KT-PA3-32 KT-PAX1-36 Check valve kit Diaphragm kit (NBR) Diaphragm kit (NBR) KT-PA5-36 KT-PA3-36 KT-PAX1-37 Check valve kit Check valve kit Switching valve parts kit
AKB/AKH CHECK VALVES Available with One-Touch Fitting; Bushing Type and Straight Type; Applicable OD in metric: 4, 6, 8, 10, 12 and in imperial: 5/32, 1/4, 5/16, 3/8, 1/2. ASD DUAL SPEED CONTROLLER ZFC VACUUM FILTER Inline Type with One-Touch Fittings; Applicable Tube Sizes Metric: 4, 6, 8mm; Imperial: 5/32, 1/4 5/16; Cartridge Type allows Element Replacement.
4 1 2Note) to 2 4 1 32 Auto feed lube ALF400 to 900 With auto lubrication function Bracket 14-13-6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 1 32 Auto feed tank ALT-5/-9 With inlet pressure insulation function Float switch 5,000 9,000 14-13-6 AIR OIL 8 3
Note 1) TL is available only for standard specifications valve. 3/4 (20A) 17-2-32 5 Series VCL Direct Operated 2 Port Solenoid Valve For Oil Specifications Standard specifications High temperature specifications Valve construction Direct operated poppet Oil [50 mm2/s] or less Fluid Withstand pressure (MPa) 5.0 Body material C37, Stainless steel Valve specifications Coil specifications Seal
Series VVXA31/32 Common (C.O.) Fluid Standard specifications Option Note) Air (Standard, Dry) Vacuum (up to 1.3 x 102 Pa) Turbine oil Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 101 Pa)(V) Non-leak (106 Pam3/s or less) (V) Other Note) Refer to page 17-3-14 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.
Series VXA31/32 Dimensions P port Bracket Pilot port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J M 14.5 17 L 29 32 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5
Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.