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Therefore, the pumping direction shown on the right figure(bellows side pumping) is recommended.Also, the operating conditions should be checked beforehand because it affects the life. 1 1 0 P a Endurance test conditions Valve side Bellows side Chamber Vacuum pump Recommended direction of exhaust 12 XL-OMP0001 8. Parts Replacement Procedure 8-1. Precautions Be sure to follow [1.

Note4) Figures in ( ) indicates the mass of CF (conflate) fittings. 18 Initial pumping conductance Initial exhaust valve condunctance l/s(Viscous flow) Shows flow rate XMD-63 XMD-80 (Standard value) L/s () P=0.1MPa 16 14 XMD-50 12 10 XMD-40 8 6 4 when 1 P=0.1MPa XMD-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 n Adjustment nut rotations n 7 XL-OMP0003-A 4.

How to Order FH100 06 0 0 0 P 005 Table1-7 Made to Order Symbol Made to Order Nil None (Standard) Table1-5 Element X0 Non-standard filtration equipped Symbol Element P Paper M Micromesh Note) The non-standard filtration is for micromesh elements only.

FU port FB port FA port R1 port R3 port P port R2 port 26 5-2. Electrical Wiring Diagram Perform wiring according to the connector pin numbers and the wiring diagram. (1) Connector pin numbers (Male side) Pin No.

P.1785 (/) (/) 19 18-2. 12 16 20 25 32 40 50 63 80 100 1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D MHF2-8D1 MHF2-8D2 GR-S-010(10g) MHF8-PS MHF8-PS MHF8-PS-2 122021 GR-L-005(5g) 122021 P.13 16 3-4. /2 MHF2-12D20D 1 12: 16 2 1620: 3 17 4 12:R 18 5 1620:C 6 19 7 20 NBR 8 A 21 NBR 9 B 22 NBR 10 C 11 12 13 14 15 MHF2-12D MHF2-12D1 MHF2-12D2 MHF12

P PLC Abbreviation of Programmable Logic Controller. It is a controller which sequential control by programs of the Boolean operation, the order operation, and the arithmetic operation, etc. R Remote device station It is the slave station that can use bit data and word data. Remote IO It is a memory area that treats the bit data.

O Occupied number of stations P PLC Abbreviation of Programmable Logic Controller. It is a controller which sequential control by programs of the Boolean operation, the order operation, and the arithmetic operation, etc. R Remote device station It is the slave station that can use bit data and word data. Remote IO It is a memory area that treats the bit data.

Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W: 2018 R: April X : 2019 Z: December -7- 5. Precautions for handling Fluid Warning (1) The operating fluids must be compressed air.

Subsonic flow when (P2+0.100)/ (P1+0.100)>0.5 Q=240S P(P1+0.100) Sonic flow when (P2+0.100)/ (P1+0.100)0.5 Q=120S (P1+0.100) Q: Air flow ratedm 3 /min(ANR) 2 ) P: Differential pressure P1P2MPa P1: Upstream pressureMPa P2: Downstream pressureMPa Correction for different air temperatures Multiply the flow rate calculated with the about formula by a coefficient from the table below.

PSE56PSE56--28 Applicable Liquid or gas that will not corrode stainless steel 316L Power supply voltage 12 to 24 VDC10%, ripple (p-p) 10% or less (Protected against inverse connection) Current consumption 10 mA or less Analogue output: 1 to 5 VDC Analogue output: 4 to 20mA (with rated pressure range) 0.6 to 1 VDC (with extension analogue output range) (with rated pressure range) Output specification

PSE530 PSE531 PSE532 PSE533 Rated pressure range 0 to 1 MPa 0 to -101 kPa 0 to 101 kPa -101 to 101 kPa Extension analog output range -0.1 to 0 MPa 10.1 to 0 kPa -10.1 to 0 kPa Withstand pressure 1.5 MPa 500 kPa Applicable Air, inert gases and incombustible gases Power supply voltage 12 to 24 VDC10%, ripple (p-p) 10% or less (Protected against inverse connection) Current consumption 15 mA

Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W: 2018 R: April X : 2019 Z: December -7- 5. Precautions for handling Fluid Warning (1) The operating fluids must be compressed air.

Refer to section [12.Dimensions] (p. 28 and p. 30) for necessary space. (3) Do not drop or apply impact during transportation or installation. Damage of products or pressure gauge can result in malfunction. (4) Do not install in areas with high humidity or high temperature.

PSE540(A) PSE541(A) PSE543(A) Rated pressure range 0 to 1 MPa 0 to -101 kPa -100 to 100 kPa Extension analog output range -0.1 to 0 MPa 10.1 to 0 kPa Withstand pressure 1.5 MPa 500 kPa Applicable Air, inert gases and incombustible gases Power supply voltage 12 to 24 VDC10%, ripple (p-p) 10% or less (Protected against inverse connection) Current consumption 15 mA or less Analog output: 1 to

P An abbreviation of Programmable Logic Controller. It controls timely along with a program for logic algorithm, sequential operation and arithmetic operation. PLC (Programmable Logic Controller) An output configuration which operates an output equipment by using PNP transistor. Referred to as negative common type because negative potential is applied to common wire of power supply.

P An abbreviation of Programmable Logic Controller. It controls timely along with a program for logic algorithm, sequential operation and arithmetic operation. PLC (Programmable Logic Controller) An output configuration which operates an output equipment by using PNP transistor. Referred to as negative common type because negative potential is applied to common wire of power supply.