Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Blue e Power supply (Light terminal) N.C. N.O. q IFW50--75/76 e Color of lead wire Black Symbol Contact q w Power supply (Common) w Red Terminal (Relay terminal) 24 VDC Gray e Power supply (Light terminal) N.O. N.C. q IFW50--85/86 e Color of lead wire Black Symbol Contact q w Power supply (Common) White Terminal (Relay terminal) w 24 VDC Gray e Power supply (Light terminal) N.C. N.O.

NCRAI seies

8363C.A5 & @l w Gommd DA8 ,n e), s63 121t2) 00 {3 1/8), 0100 (a) HailTyp DA5 O D-46 o : Available, X: Nol avilad NCDRAIBW3o-O-A7 Re e d Sw ilc h Spe c ific atio ns [od6l I}472 D{72H tra?t. BATTI D Tdl sr80 , &ttdr &r51 tr56 trt6,w D-lft Rday, Seqlericer lC CircLiil Applc.ton Rlay, Sequenc6r tc Cir!

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

Low torque Metal seal type Rotary joint

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-www.stevenengineering.com SYA3220-M5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 3 position closed center/exhaust center/pressure center SYA3 20(-F2) C4, N3 C6, N7 3 4 5 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 2.2 (For manifold mounting) Manual override

VZA2000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics Pilot port size Pilot port piping location b Cv b C [dm3/(sbar)] 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Function Port size Valve model VHS VZA2121-M5 VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

B 2 (EA)5 1 (P) 3(EB) M5: M5 x 0.8 3 position closed center 2(B) (A)4 Back pressure check valve 3 J: With switch A 4 Nil None (EA)5 1 (P) 3(EB) K Built-in 2 B 3 position exhaust center The built-in back pressure check valve type has an effective area approximately 20% smaller.

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 N.C.

VZA200/400

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

0.31 0.28 0.31 0.28 U W M5 x 0.8 U W 597 4 Port Direct Operated Poppet Solenoid Valve 10-VQD1000 Dimensions L plug connector: 10-VQD1121-L-M5 M plug connector: 10-VQD1121-M-M5 Directional Control Valves Air Grippers Modular F.

KS/KX

<M5, M6> <M5, M6> Weight (g) H (Hex.) Part No.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH ASSEMBLY, VACUUM SERIES, ZSE30 VACUUM SWITCH, 1E, ZSE30 OTHER SIZE RATING, .09479 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH ASSEMBLY, VACUUM SERIES, ZSE30 VACUUM SWITCH, 1E, ZSE30 OTHER SIZE RATING, .08157 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH ASSEMBLY, VACUUM SERIES, ZSE30 VACUUM SWITCH, KF, ZSE30 1/4 ONE TOUCH FITTING, .08818 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH ASSEMBLY, VACUUM SERIES, ZSE30 VACUUM SWITCH, KF, ZSE30 1/4 ONE TOUCH FITTING, .07716 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH ASSEMBLY, VACUUM SERIES, ZSE30 VACUUM SWITCH, KF, ZSE30 1/4 ONE TOUCH FITTING, .08818 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH ASSEMBLY, VACUUM SERIES, ZSE30 VACUUM SWITCH, JD, ZSE30 1/8 PORTED, .27998 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH ASSEMBLY, VACUUM SERIES, ZSE30 VACUUM SWITCH, KF, ZSE30 1/4 ONE TOUCH FITTING, .08157 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SWITCH ASSEMBLY, VACUUM SERIES, ZSE30 VACUUM SWITCH, KF, ZSE30 1/4 ONE TOUCH FITTING, .08157 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay