Clean Regulator/Fluororesin Type

t y r i r u i !

Rotary Cylinder Series MRQ Size: 32, 40 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CXWM/CXWL

9 @0 No. q w e r t y u i o Rod cover Housing Piston Piston rod Plate Adjusting bolt Hexagon socket head set screw Snap ring Magnet Spring Type CR snap ring Round R type retainer Shock absorber Hexagon socket head set screw Hexagon socket head plug Hexagon socket head set screw Piston seal Rod seal Cylinder tube gasket Piston gasket Locking body Lock finger Lock piston Rod cover Steel ball

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Description Material Note Component Parts Heat treated Stainless steel Body q Heat treated Table Stainless steel w u q w i o y !3 !2 !

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, Y, "REGULATOR

HEC_W-E

Manufacturing month o: January U: July P: February V: August Q: March W: September R: April X: October Manufacturing year S: May y: November J: 2005 T: June Z: December K: 2006 L: 2007 . . . 4-1 Unit Overview 4.3 Model No. label Model No. label is attached to the unit and indicated as shown below.

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Size Foot bracket Description Mounting screws included in foot bracket 50 CRA1L50 -Y-1Z M8 1.2535 Foot bracket 2pcs. 63 CRA1L63 -Y-1Z M10 1.540 Mounting thread4pcs. 80 CRA1L80 -Y-1Z M121.7550 Collar 4pcs. M121.7550 100 CRA1L100-Y-1Z After the foot bracket removed the mounting screws of the basic style, mount to the cover with the mounting screws included in foot bracket.

Standby Regulator

DOC1018957-1 PRODUCT NAME Standby Regulator MODEL / Series / Product Number AR20S-(F,N)02E-Y(Z)-15V(E) AR30S-(F,N)03E-Y(Z)-15V(E) AR40S-(F,N)04E-Y(Z)-15V(E) AR50S-(F,N)10E-Y(Z)-15V(E) Contents Page 1. Safety Instructions 2-9 2. Application 10 3. Standard Specifications 10 4. How to Order 11 5. Structural Drawing and Replacement Parts 12 6. Operation and Adjustment 13-14 7.

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

Speed Controller: Standard Type Series AS In-line Type 1

Description Model AS2000 AS3000 Valve O-ring Spring 14283 14284 14282 143022 143021 143023 e t y Electroless nickel plated Construction: AS4000 Component Parts No. Description Material Note Body Cap Chromated Zinc chromated 4 x 0.7 x 8 JIS B 2805 Nominal 6 Aluminum alloy Rolled steel Steel wire Stainless steel Zinc alloy Steel wire Zinc alloy Aluminum alloy NBR q w e r t y u i !

MRHQ

Gripper unit q Two types for 90and 180 Rotary unit w E R P P I Aluminum alloy Body C Gray-White R e N G A P Two types for 90and 180 Stopper lever Carbon steel r A SMC R J N I Stopper guide Stainless steel t A I E Y D R Retainer Carbon steel A y A M T O R Switch guide Resin u Switch holder A Resin i Switch case Resin o Switch holder B Resin !0 Bearing High carbon bearing steel !

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

VT317

When an electric current is applied to the molded coil r, the armature t is attracted to the core y, and through the push rod u, it pushes down the spool valve w. Then, port P and port A are connected. At this time, there will be gaps between the armature t and the core y, but the armature will be magnetically attracted to the core y.

SX

Note Material Aluminum die-casted (SX3000: Zinc die-casted) White Body q Adapter plate White White White Resin Resin w e End plate Pilot body Piston Spool valve assembly Molded coil r Resin t Resin y Aluminum, HNBR Gray u Resin Caution Replacement Parts Part no. SX340 SX540 SX740 Mounting Screw Tightening Torques No.

PF2D

2 w y r !0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

VCA

y End plate assembly (U side, front port) End plate assembly (U side, front port) Note 2) O-ring e is included with manifold valve r.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

-mGm-m VX VNl VQ Dotted line: Bracket mounting style (-F) 4.3-9 Series VQ20/30 Dimensions/Series VQ30 DIN connector (Y) VQ31A1-mYmm-m Dotted line: Bracket mounting style (-F) 4.3-10 Series VQ20/30 For Dry Air, Pilot Operated 2 Port Solenoid Valve How to Order Manifold VV2Q 2 2 08 How to Order Manifold Assembly List valve and option part numbers under the manifold base part number.

VQ

Latching Negative COM Large flow capacity H Y B Option Note) Latching style manual override: Looking-push slotted style only. (1) L Electrcal entry N L plug connector, With lead wire and light/surge voltage suppressor L U Option Note 1) Except for latching and large flow capacity style.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,