ZU

Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19.

lVFl 10

N212 VaY' 3 Port lVFl 10 seies Direct Solenoid Operated o Cv 0.055 (0-100 PSI); 0.05 (0 -150 PSI) Port Size 118" NPTF (Standard) High Speed Response Time 8mSec.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

Indicator light Load voltage Pre-wired connector Applicable load DC AC Auto switch model Lead wire length (m) Special function Wiring (Output) Electrical entry Type Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire

JIS Standard Compact Hydraulic Cylinder

-wire (PNP) 2-wire 12 V 3-wire (NPN) Diagnostic indication (2-color indicator) 5 V, 12 V IC circuit Relay PLC 24 V 3-wire (PNP) 2-wire Yes Grommet 12 V 3-wire (NPN) 5 V, 12 V 12 V Water resistant (2-color indicator) IC circuit M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 A96V A96 5 V 3-wire (NPN) 100 V IC circuit 24 V Yes A93V 2 A90V A93 Grommet Relay PLC 2-wire 12 V A90 No IC circuit

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

Auto switch model Lead wire length (m) Load voltage Pre-wired connector Applicable load DC AC Indicator light Type Electrical entry Wiring (Output) Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 3 (L) 1 (M) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 M9N M9P M9B M9NW M9PW M9BW M9NA1 IC circuit 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

MXF

Load voltage Auto switch model Lead wire length (m) Applicable load Pre-wired connector Indicator light Special function Type Electrical entry Wiring (Output) 3 (L) DC AC Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9N M9P M9B M9NW M9PW M9BW 3-wire (NPN equivalent) Reed switch Solid state switch 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2

Compact Pad

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1

Pilot Operated Regulator AR425 to 935 Series

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 39.5 43 75 90 50.0 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 680

EXxx-OMC0002

Node address SW1 SW2 SW3 SW4 Node address SW1 SW2 SW3 SW4 0 0 0 0 0 8 0 0 0 1 1 1 0 0 0 9 1 0 0 1 2 0 1 0 0 10 0 1 0 1 3 1 1 0 0 11 1 1 0 1 4 0 0 1 0 12 0 0 1 1 5 1 0 1 0 13 1 0 1 1 6 0 1 1 0 14 0 1 1 1 7 1 1 1 0 15 1 1 1 1 0: OFF 1: ON Set the node address so that it does not duplicate the node address of other slaves.

EX260-SDN_eng

Address HW/SW 9 10 7 8 5 6 3 4 1 2 ON Note: Be sure to switch off the power supply when set on the switch. Safety Instructions Address setting (switch No. 5 to 10) Set the DeviceNetTM node address (MAC ID) in binary coded. Address range is 0 to 63. Note: Factory default setting is 63.

Jxx-OMT0084

98 9 Revision history NOTE: This manual is subject to change without prior notice. 2012 SMC Corporation All Rights Reserved 10

LVQ

Variations LVQ20 Model LVQ30 LVQ40 LVQ50 LVQ60 Orifice diameter Tubing outside dia. 4 8 10 16 22 Fitting type Millimeter Symbol V S Fittings LQ1 LQ2 Body class 2, 3, 4, 5, 6 2, 3, 4, 5 6 10 12 19 25 Valve type Inch Type Symbol 1/4 3/8 1/2 3/4 1 Basic type N.C. N.C. PB PA PA Applicable tubing size Body class Connecting tubing O.D. N.O. PB B A B A B A Symbol 2 3 4 6 5 N.C. N.O.

Low Friction Cylinders Metal Seal Type

Bore size [mm] (Pressure receiving diameter) 4 6 10 16 20 Operating pressure range [MPa] Weight of moving parts [g] 4 8 24 62 103 Thrust control standard [N] 0.01 to 8 0.03 to 19 0.08 to 50 0.20 to 140 0.30 to 200 Stroke [mm] 0.001 to 0.7 10 (Except for moving parts weight) Features 3 (Metal Seal Type/Single Acting) /4, 6, 10, 16, 20 control range of 0.01 N to 200 N Application Examples

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

Symbol How to Order 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D. (mm) 04 06 08 10 12 Type 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Control type Meter-out Meter-in 0 1 With residual pressure release valve With One-touch fitting 15-9-36

FQ1

Model symbol (In-line filters) Element size 250mm M005 M010 M020 M040 M074 M105 EM100-005 EM100-010 EM100-020 EM100-040 EM100-074 EM100-105 5 10 20 40 74 105 Bore size 65 x 250mm 04 06 10 Rc 1/2 Rc 3/4 Rc 1 M005 M010 M020 M040 M074 M105 EM200-005 x 4 EM200-010 x 4 EM200-020 x 4 EM200-040 x 4 EM200-074 x 4 EM200-105 x 4 5 10 20 40 74 105 Housing O-ring material N V NBR FPM 65 x 125mm Element

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.

SMC KQ2P-23 fitting, plug, KQ2 FITTING (sold in packages of 10; price is per piece) $0.79 + Add to Quote Add To Cart Add to Cart SMC VQZ200-FB foot bracket (vqz200), VQZ200 VALVE, SOL 3-PORT***

EX600-SPN_eng

Up to 10 units (including the SI unit) can be connected to one manifold. 3 4 3 4 RD4 Danger: Green ST(M) LED is flashing. Either of the following conditions: The valve ON/OFF counter has exceeded the set value. The valve is short circuited or disconnected. Red ST(M) LED is flashing.