Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1)Note 1, 2)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability

range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability Note 5)Temperature characteristicsDisplay methodStatus LED?

Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1)Note 1, 2)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability

range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability Note 5)Temperature characteristicsDisplay methodStatus LED?

Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1)Note 1, 2)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability

range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability Note 5)Temperature characteristicsDisplay methodStatus LED?

Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1)Note 1, 2)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability

Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1)Note 1, 2)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability

Wide Type Parallel Style Air Gripper ø 10, ø 16, ø 20, ø 25 MHL2 Series

Load voltage Auto switch model Lead wire length [m]1 Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V Solid state auto switch 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability Note 5)Temperature characteristicsDisplay methodStatus LED?

Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1)Note 1, 2)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability

range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability Note 5)Temperature characteristicsDisplay methodStatus LED?

range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability Note 5)Temperature characteristicsDisplay methodStatus LED?

range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability Note 5)Temperature characteristicsDisplay methodStatus LED?

range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability Note 5)Temperature characteristicsDisplay methodStatus LED?

Set flow rate range Note 1)Minimum set unit Note 1)Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1)Note 1, 2)Display unitsAccumulated flow range Note 1)Power supply voltageCurrent consumptionPower supply voltage for sensorPower supply current for sensor Note 3)Sensor input--Output Note 4)specificationsHysteresisResponse time Note 5)Linearity Note 5)Repeatability

MSQ

Rotary Table/Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7 How to Order MSQA A M9BW 1 High precision type MSQB A M9BW 1 Basic type Number of auto switches Size Nil S n 2 pcs. 1 pc. n pcs. 1 2 3 7 Auto switch type Nil Without auto switch (built-in magnet) Refer to the table below for auto switch types. The auto switch is included in the package (unmounted).

Switches Solid State Switch Connection and Examples

Applicable actuator Terminal arrangement 1 Brown + Vcc 1 L 2 White 2 Sensor 3 Black OUTPUT 3 4 Blue GND (OV) 4 Normally ON when light is blocked.

5% F.S. or less?2% F.S. or less?2% F.S. or less (15 to 35C, based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?

5% F.S. or less?2% F.S. or less?2% F.S. or less (15 to 35C, based on 25C), ?3% F.S. or less (0 to 50C, based on 25C)Pulse output, N channel, open drain, output for display unit PF2W3 . (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V)Voltage output 1 to 5 VLinearity: ?