Table of Contents

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

ISA2

In case of series VC (B type coil) Conduit terminal, DIN type connector PSE Rectifying device ZNR DC circuit AC circuit ZNR 1 (+, -) 1 Z I SE3 SOL. SOL.

Title not found

to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not

Table of Contents

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Digital Gap Checker

With bracket *5 *8 *9: Under the New Measurement Act, sales of digital gap checkers with the unit selection function have not been allowed for use in Japan. *10: Unit: kPa B 6 One-touch fitting *2 *7: Order DIN rail separately.

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

PSxx-OMR0001CN

0.4MPapsi 0.4MPapsi 10 5 N 1 2 3 4 5 6 1 2 NPN1 PNP1 P 10 6 3 4 0.2MPapsi 0.2MPapsi 7 10 4 5 6 M 5 SI 10 8 1 7 L 7 L N S 6 7 8 R 6 7 8 T 2 9 B -9No.PS-OMR0001CN-J 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMR0001CN-J 2 / (2 2 2 1 ) ((38)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Secondary Batteries

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R A, B port size (inch) A, B port size (metric) P, E port Applicable series P, E port Applicable series A, B port A, B port Symbol C4 C6 C8 C8 C10 C12 M Symbol N3 N7 N9 N9 N11 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting

Booster Regulator/Air Tank

VBA10A-N02 VBA10A-T02 : when -Z VBA43A-N04 VBA43A-T04 : when -Z G27-20-01 G27-P20-01-X30 AN20-N02 VBA20A-N03 VBA20A-T03 : when -Z VBA40A-N04 VBA40A-T04 : when -Z VBA22A-N03 VBA22A-T03 : when -Z VBA42A-N04 VBA42A-T04 : when -Z VBA11A-N02 VBA11A-T02 : when -Z Model ITVH Description ITVX Pressure gauge : when Nil Pressure gauge : when -Z Note 4) G36-10-N01 G36-P10-N01-X30 AN30-N03 ANA1-N03

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

Title not found

,oox'o''"n' ar3oro 60 Nole 2) Drain guide is G1i 4 (app cable 10 AF30lo 60) Nore 1) Wlhoul a valve name plate and caulion A F 1 0 1 0 6 0 Port size Symbol Port 1 0 20 30 40 50 60 Symbol Descrlption Applicable M5 a 1 B O AF20 to 60 1t4 a a a 3a a a 1t2 a g4 a a 1 a a auto dlain (N C.)

ARX Series

gauge Rc(PT) NPT G(PF) Nil N F ARX20Nmm ARX21Nmm P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

modular-press-e

6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Port Plug VVQ0 58A 10 Single unit regulator/ Port plug for regulator block 10 Semi-standard Description None Oil-free Symbol Nil X17 239

Modular F.R.L. Pressure Control Equipment

6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Port Plug VVQ0 58A 10 Single unit regulator/ Port plug for regulator block 10 Semi-standard Description None Oil-free Symbol Nil X17 239

This is a legacy product, and replaced byAR20K-N01BG-Z-B, REGULATOR, MODULAR, AIRLINE EQUIPMENT, AR MASS PRO, CC, AR MASS PRO 1/8 MODULAR (NPT), .82172 lb

IDG

30 40 0 40 80 120 160 100 0 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG30H (Type B products group) IDG50H (Type B products group) P1 = 0.3 MPa 0 P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa P1 = 0.5 MPa 10 10 P1 = 0.7 MPa P1 = 0.7 MPa 20 20 HA 30 30 AT 40 40 ID 50 50 600 0 200

Digital Gap Checker

(B) Within the acceptable range (Seats correctly).

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.