Regulator AR30 to 60

AR30 Option Thread type Port size Symbol Nil B E G P Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 40 Contents With bracket With square embedded type pressure gauge (with limit indicator) Round pressure gauge (with limit indicator) Panel mount (with set nut) Metric thread (M5) Rc NPT G Nil Note 1) 1 4 02 03 04 06 10 N F 3 8 Note 2) 1 2 3 4 1 Note 1) Bracket assembly is not

1

2 (n = 2, 4, 6) Note 3) 50 + 27.5 (n 2) (n = 2, 3, 4, 5) CQ2 CQS Luberetainer D-M9lV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) JA D-M9l D-A9l 10 (5) Note 5) 10 15 + 15 (n 2) (n = 4, 6) Note 4) MXH D-M9lWV D-M9lAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) MXQ D-M9lW 15 (10) Note 5) 15 20 + 15 (n 2) (n = 4, 6) Note 4) MGP D-M9lA 15 (10) Note

Compressed Air Preparation Filter

Regulator AR30-03-D 1 pc. Spacer with Bracket Y300T-D 1 pc.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

J M N 10-/21-AR20-B 10-/21-AR25-B 10-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41

Modular Type Lubricators Series AL

Example) AL30-03B-2R Symbol Description Body size 20 30 40 50 60 10 Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket + Polycarbonate bowl 1000 cm3 tank 1000 cm3 tank (with switch) Lowest limit ON 1000 cm3 tank (with switch) Lowest limit OFF Metal bowl Nylon bowl

Process Pump

Symbol Nil N F Option Option Symbol Applicable actuation Built-in solenoid valve Air Operated PB1013A Air operated Port size Port size 1/8 Nil B N None With foot With silencer Symbol 01 When option is more than one, suffix in alphabetical order.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Model *1 Port size A B D E300-03-A 3/8 31.8 30 30 E400-04-A 1/2 31.8 36 36 Port size B *1 in model numbers indicates a pipe thread type. No indication is necessary for Rc; however, indicate N for NPT, and F for G. * Separate spacers are required for modular units.

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series RoHS How to Order ISE35 N 25 M L Electrical entry Option 2 Nil None Wiring bottom entry AR/AW series mounting kit Lock pin N Mounting thread A Wiring top entry Adapter O-ring Example) Regulator R ARM10/11 series mounting kit Mounting thread s Adapter PRESSURE O-ring MPa OUT Lock pin B Output specifications 25 65 NPN output PNP

CATALOG

-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T

Table of Contents

size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy

5 Port Solenoid Valve Series SY3000/5000/7000/9000

R A A A A A B B B B B P One-touch fitting (P , R port) Applicable tubing O.D.: 10, 3/8" (L4) L3 D side U side 27.5 48.5 (4.9) (3.5) 8 B B PORT SOL.a PORT SOL.a 5.5 17 16 15 14 13 12 11 10 17 8 7 6 5 4 3 2 1 COM 8 7 6 5 4 3 2 1 COM 35 SOL.b SOL.b 16 15 14 13 12 11 10 9 114.3 A A A DIN rail 6 3 4 5 6 7 8 9 10 stations Stations n L1 L2 L3 L4 2 stations 160.5 150 126 17 9 285.5 275 254 15.5 273

Table of Contents

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

AC

VE Description 0 1 M5 01 0 1 VY110 01 02 0 1 VY120 01 02 0 1 VY130 02 03 04 0 1 02 03 04 0 1 04 06 10 0 1 VY140 VY170 10 12 0 1 VY190 14 20 0 1 VY1D00-M5 VY1A0 -M5 VY150 VY1B0 VY VEX1-18-1 VEXA-18-2 VEX3-32 VEX5-32 VEX7-32 VEX9-32 B Braket (with bolt, washer) G VEX1-18-2 VEXA-18-3 F G36-10-01 G46-10-01 G G27-10-01 Pressure gauge G27-10-R1-X207 AL Pilot EXH. port silencer N AN120-M5 AN101-

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

SY

2 4 A B 2 4 A B 2 4 A B 2 4 A B 2 56.3 5.5 53 53 38.1 35 5 EA 3 EB 1 P 25.5 25.5 184.1 16.3 33.6 167.6 25 96.6 8 130.4 38.1 48.3 n 2 6-Rc 3/8 (P, EA, EB port) + + + + + Triangle mark 2-M5 x 0.8 (pilot, EXH port) 2n1-Rc 1/4, 3/8 (A, B port) 76.4 (for E type) (5.5) 2n2-One-touch fitting (A, B port) Applicable tube O.D.: 8 10 12 92.5 1 2 n (Indicator

V

-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T

VFS

R1, R2 P 1 Side 2 Common Common Bottom Option D-sub connector Non Plug-in Type: Grommet Terminal, DIN Terminal Wiring for every valve. 10 VV5FS4 2 05 03 DIN terminal Thread type Series VFS4000 Manifold Stations Port size Nil N Rc NPT NPTF G Grommet terminal 02 2 stations Symbol 03 04 A, B P, R1, R2 T Non plug-in type 3 8 Rc Rc Rc M Mixed F 10 10 stations 1 2 1 2 Option Symbol For bottom