DOC1020530

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: H (Set Nut for Panel Mount)

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: None, Thread: Rc, Port Size: 1/8, Accessory: Set Nut for Panel Mount, Specifications: -, Pressure Unit: -

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: H (Set Nut for Panel Mount), Specifications: 1 (0.005 to 0.2 MPa Setting)

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: None, Thread: Rc, Port Size: 1/8, Accessory: Set Nut for Panel Mount, Specifications: 0.005 to 0.2 MPa Setting, Pressure Unit: -

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: H (Set Nut for Panel Mount)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 1/8, Accessory: Set Nut for Panel Mount, Specifications: -, Pressure Unit: -

EXxx-OMS0026CN

Enable Val165000 4 ON 8 ON/OFF 3 Disable ON/OFF 0 83 9 ON/OFF Auto 10 HDX 10 BUS IN BUS IN 10 FDX 100 HDX 100 FDX Auto 10 HDX 11 BUS OUT BUS OUT 10 FDX 100 HDX 100 FDX 1Hold/Clear Via software 2PLC 330 4x1000 -44No.EX-OMS0026CN No.

A_HEC-OM-J017

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 () () Thermo-con ACK UT CR 4-2 Reading setting temperature As 0.1 deg.C is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

JXCx-OMT0061CN

CC-Link (P.77) 4.2 (P.18)4.3 PLC (P.18)PLC 10 - 8() ()() () 9 10. (P.32) PLC 14.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

JXCx-OMT0028CN

LEC (LECP6LECA6) 9 - 3 3.1 DC24V10% 200mA () 300mA () LEC (LECP6, LECA6) 12 *UL UL1310 Class2 EtherNet/IP EtherNet (IEEE802.3) 100BASE-TX 10/100Mbps () 100m(328ft) EtherNet/IP (/) 2048 (256byte)/2048 (256byte) IP DHCP ID7 0(Generic device) 154 LEC-GEN1 10 - RS485(Modbus ) 115.2k 230.4kbps (115.2kbps) (3m)(3m12 ) 39m 3m 3m 3m 3m 3m 0 40() 90%RH () -10 60() 90%RH () 2(0.5G

JXCx-OMT0034CN

90%RH () -10 60() 90%RH () 2(0.5G) 4.9m/s IP20 200g() 220g(DIN ) 11 - 3.2 1 LED 2 STATION No.

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: Backflow Function, Thread: Rc, Port Size: 1/8, Accessory: Set Nut for Panel Mount, Specifications: Upward Facing Knob, Pressure Unit: -

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: H (Set Nut for Panel Mount), Specifications: Y (Upward Facing Knob)

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, Y, "REGULATOR

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, Y, "REGULATOR

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, Y, "REGULATOR