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point L (mm) Gripping point L (mm) 15 15 5 5 10 10 20 20 25 25 30 30 MHW F F MRHQ MHS3-20D MHS3-20D 40 Pressure 0.6 MPa Misc. 35 Pressure 0.6 MPa 35 30 External grip 0.5 MPa 0.5 MPa DGripping force (N) Gripping force (N) 30 25 25 20 20 15 15 0.4 MPa 0.4 MPa F 200.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 10 10 5 5 0 0 5 5 25 25 10 10 15 15 20 20 30 30 35 35 Gripping point L (mm) Gripping point L (mm

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10 15 With auto switch Size: 10, 15 90 L CDRB2 10 WU F 180 S With auto switch Size: 20, 30, 40 CDRB2 20 WU B 180 S R73 L Number of auto switches With auto switch (With switch unit) Size S Nil 1 pc. 20 30 40 With angle adjuster 2 pcs.

LEC-OM02704CN

DI7 14 26 14 (4) ON/OFF (a) [1][2][C][0] [1][2] [C][0] (b) b31 b 1 b 0 1 ON 0 OFF bit 16 bit CN6 bit CN6 bit CN6 bit CN6 0 14 8 16 24 1 15 9 17 25 2 16 10 18 26 3 11 19 27 4 12 20 28 5 13 21 29 6 14 22 30 7 15 23 31 14 27 14 (5) ON/OFF (a) [1][2] [1][2] [8][0] [8][1] (b) b31 b 1 b 0 1 ON 0 OFF bit 16 bit [8][0] [8][1] 0 RD 1 2 ZSP 3 TLC 4 5 INP 6 7 WNG 8 ALM 9 10

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, 15, 20, 30, 40 How to Order Size 10 15 20 30 40 CRB2 10 W B 180 S E Without auto switch Connecting port location Size 10 15 Nil E Side ported Axial ported 90 L CDRB2 10 W F 180 S Axial ported Side ported With auto switch Size: 10, 15 CDRB2 20 W B 180 S R73 L With auto switch Size: 20, 30, 40 Fittings are sold separately.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

10 15 With auto switch Size: 10, 15 90 L CDRB2 10 WU F 180 S With auto switch Size: 20, 30, 40 CDRB2 20 WU B 180 S R73 L Number of auto switches With auto switch (With switch unit) Size S Nil 1 pc. 20 30 40 With angle adjuster 2 pcs.

Made to Order

/J79W/F7WV D-F7BA/F7BAV D-F7NT D-M9WV D-M9AV D-F7WV D-F7BAV D-A79W 10 15 10 + 15 (n2)Note) (n=4, 6...) 4.5 4 4.5 5 5 6 6 6 10 15 15 + 15 (n2)Note) (n=4, 6...)

CQ2

13 16 16 18.5 13.5 11.5 14 D-F9W D-F9WV D-F9BAL D-A7 D-A80 D-A9 D-A9V D-F9 D-F9V D-A79W Bore (mm) A 9.5 12.5 15.5 15.5 18 13 11 13.5 A 7 10 13 13 15.5 10.5 8.5 11 B 5.5 5 6.5 7 6 8.5 11.5 14.5 B 6 5.5 7 7.5 6.5 9 12 15 B 3 2.5 4 4.5 3.5 6 9 12 B 10 9.5 11 11.5 10.5 13 16 19 A 17 12 10 12.5 B 5 7.5 10.5 13.5 A 21 16 14 16.5 B 9 11.5 14.5 17.5 A 20 15 13 15.5 B 8 10.5 13.5 16.5 12 16 20 25

Compact 5-Port Solenoid Valve

2 B 2 B 2 B 2 B 53 45.9 P 1 P 1 38.1 38 8.4 26.4 23.9 17.1 V V V V 4 A 4 A 4 A 4 A 4 A One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 (SMC) 15.8 17.3 3.5 (11.8) (For DIN rail mounting) (7.5) P = 15 18 15 15 (Pitch) P = 11.5 One-touch fitting [4(A), 2(B) port] One-touch fitting (Built-in suction filter) [Vacuum (V) port] Applicable tubing O.D.

CV/MVGQ

-15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1

CV/MVGQ

10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 2 Series CV Valve Mounted Cylinder

SY

24.8 13.5 P = 10.5 (Pitch) 78.3 [84.8] 42 34.5 DIN rail 90.5 (64) 38.5 B B B 34 77 30 17 35 A A A Manual override 15 77.5 SS5Y3-45-D .

V100

10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10 98 (Pilot EXH) M5 x 0.8 (Pilot EXH) 4-15-14 15 Series VZ400 Manifold Specifications Manifold Variations: VV3Z4 Model VV3Z4-50-061V100 Single base, B mount Common SUP/EXH type Max. 20 stations Manifold type Passage Valve stations SY VV3Z4-S50 Common exhaust VV3Z4-20 VV3Z4-30 VV3Z4-50 Manifold base model

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Bottom Mount LG1H20/ Without coupling LG1H21/ With coupling 95( ) 95(160) A( ) B( ) 95( ) 95(170) A( ) B( ) 10 95(140) 95(150) 10 30 30 A A B B A B B A Stroke Stroke Stroke Stroke 700 570 700 580 655 100 645 100 800 670 800 680 155 755 200 80 745 145 200 70 900 770 900 780 855 255 300 180 245 845 300 170 1000 870 1000 880 355 955 400 280 945 345 400 270 1200 1070 1200 1080 1155 455 500

Fluoropolymer Piping Equipment

Tubing size (D) LQ1E21-T-R8 6 8 x 6 TH TIH 8 30.5 20 3.6 LQ1E21-T-R9 10 x 8 10 LQ1E21-T-R10 12 x 10 12 34.5 24 LQ1E22-T-R8 B side D 4 6 15 14 28 16.5 6 x 4 6 25.5 15 2.6 LQ1E22-T-R9 8 x 6 8 30.5 20 LQ1E22-T-R10 10 x 8 10 LQ1E22-T-R11 12 x 10 12 34.5 24 LQ1E31-T-R1 4 B L3 8 x 6 5 9 8 36.6 33.6 20 6 LQ1E31-T-R2 6 x 4 6 28.6 15 3.9 LQ1E31-T-R8 12 x 10 12 37.6 24 7.4 LQ1E31-T-R9 19 x 16 19

CRB2/CRBU2/CRB1

Double vane type CDRB2BW40-S, D Keyway dimensions h (h9) L b (h9) Model CDRB2BW400 0.030 20 4 0 0.030 4 CRB1 Free-Mounting Type CRBU2 CRB2 15 Vane Type Rotary Actuator with Angle Adjuster Series CRB2BWU Sizes: 10, 15, 20, 30, 40 How to Order CRB2 10 WU B 180 S Standard Size 10 15 20 30 40 Size 10 15 With auto switch Sizes: 10, 15 90 L CDRB2 10 WU F 180 S CDRB2 20 WU B 180 S R73 L With auto

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ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 12 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

CJ2

D-A7 D-A80 D-A73C D-A80C 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 CP95 Symbol Specifications D-C7 D-C80 NCM -XA Change of rod end shape D-A7H D-A80H Band mounting style (6, 10, 16) -XB6 Heat resistant cylinder (150C) Not available with switch & with air cushion NCA -XB7 Not available

Electric Actuator/Slider Type

A 10 B 15 C 20 Produced upon receipt of order (Robotic cable only) Refer to the specications Note 2) on pages 9 and 10.

Rotary Actuator/Vane Type

) 7 to 20 10-(20-X) to (X-1.5) 30 10 to 22 12-(22-X) to (X-5) 7 to 22 10-(22-X) to (X-2) 40 7 to 15 9-(15-Y) to (Y-2) [9-(15-Y) to (Y-4.5)] Note) Note) Values inside [ ] are for the CRBU2.