L2 26 L3 L4 M1 AS3001F-11D AS3001F-09D AS3001F-07D AS2051F-09D AS2051F-07D AS2051F-05D AS2001F-07D AS2001F-05D AS2001F-03D AS1001F-07D AS1001F-05D AS1001F-03D AS1001F-01D AS4001F-12D 12 AS4001F-10D 10 AS3001F-12D 12 AS3001F-10D 10 AS3001F-08D 8 AS3001F-06D 6 AS2051F-08D 8 AS2051F-06D 6 AS2001F-06D 6 AS2001F-04D 4 AS1001F-06D 6 AS1001F-04D 4 AS1001F-23D 3.2 8 12.7 12.7 5/32" 9.3 39.2 5.2 26.6
valve Nil E 1 station 03R 04R 03L 04L 03Y 04Y 1 10 stations 10 Note) In case of mixed ports, indicate piping specifications using the manifold specification sheet on page 36.
-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,
10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S
Series: 2 (10-SV2000), Enclosure: W10CD, Valve Stations: 03 (3 Stations), P, E Port Locations: U (U Side, 2-10 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: N3 (One-touch Fitting for Ø5/32)
Series: 10-SV2000, Enclosure: W10CD, Valve Stations: 3 Stations, P, E Port Locations: U Side, 2-10 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø5/32, Mounting: -
Series: 10-SV3000, Enclosure: W10CD, Valve Stations: 4 Stations, P, E Port Locations: D Side, 2-10 Stations, SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: One-touch Fitting for Ø3/8, Mounting: -
Series: 3 (10-SV3000), Enclosure: W10CD, Valve Stations: 04 (4 Stations), P, E Port Locations: D (D Side, 2-10 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: N11 (One-touch Fitting for Ø3/8)
is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.
10 10 14 14 15 17 17 21 21 51 58 58 71 72 6 7 7 10 10 14 18 18 22 26 30 35 40 48 58 M14 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 10 12 16 20 25 16 19 23 28 36 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 8 11 11 13 16 M8 x 1.25 M18 x 1.5 M10 x 1.25 M18 x 1.5 M12 x 1.75 M22 x 1.5 31.5 M12 x 1.75 M26 x 1.5 35.5 6-8-36 37 Series CA2Q Air
Rubber seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R
M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ
Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled
10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow
Series: 2 (10-SV2000), Enclosure: W10CD, Valve Stations: 12 Stations, P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)
Series: 4 (10-SV4000), Enclosure: W10CD, Valve Stations: 12 Stations, P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: N11 (One-touch Fitting for Ø3/8)
Series: 1 (10-SV1000), Enclosure: W10CD, Valve Stations: 06 (6 Stations), P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)
Series: 3 (10-SV3000), Enclosure: W10CD, Valve Stations: 07 (7 Stations), P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: N11 (One-touch Fitting for Ø3/8)
Series: 2 (10-SV2000), Enclosure: W10CD, Valve Stations: 05 (5 Stations), P, E Port Locations: B (Both Sides, 2-20 Stations), SUP/EXH Block Assembly Specifications: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6), Mounting: D (DIN Rail Mounting w/DIN Rail)