1

Reference) R D Bore size (mm) 11 41 11 36 8 8 C76 6 1 13 13 46 13 38 10 10 10 2.5 21 15 54 15 46 12 12 Connecting port side C85 15 3 27 21 64 21 56 14 14 20 3 32 25 78 25 80 25 25 Dimensional Range Not Possible to Machine Additionally C95 25 4 39 25 86 25 90 25 25 32 A B Model MGF40 MGF63 MGF100 5 50 30 110 30 100 30 30 CP95 40 90 120 6 59 30 124 30 110 30 30 50 120 160 6 75 34 156 34 140

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Table of Contents

2.5) a b c d e Y Model 13.5 5 1.8 14.5 5 1.8 G: M5 x 0.8 G: M6 x 1 G: M8 x 1.25 Model A B C D E Y F ZPY2004U 2 4 2.6 4.6 1.2 0.3 25 5 F 6 F U6 (Soft tube 6/4) U6 (Soft tube 6/4) 15.5 7 2.5 16.5 7 2.5 8 28 20 30 48 10 ZPY25D ZPY3507U 3.5 7 4.3 7.8 1.8 0.5 ZPY4010U 4 10 5 11 2 0.8 C Y A B Model ZPY10UT 10 11 1 ZPY13UT 13 14 1.5 ZPY16UT 16 17 2.5 ZPY10CT 10 11 0.8 ZPY13CT 13 14 1 ZPY16CT 16

MY1

) 11 7.5 MY1C (Cam follower guide type) B A (mm) 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A (mm) 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 11 8-11-102 98 Auto Switch Series MY1 Proper Auto Switch Mounting Position (Detection at stroke end) D-Z7, D-Z80 Note) The operating range is a guide

5

86 30 111 12.5 11 22 10 65 228 22+0.084 0 Rotating Angle Bore size (mm) A B A + B + 90 32, 40 25 45 160 50, 63 40 60 190 80, 100 30 55 175 190 Smooth Cylinder MBY Series Dimensions of Accessories 30 Rod end nut (Standard) Knuckle joint pin Clevis pin d Dd9 2 x d D C L l m REA H B Part no.

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50

CQ2

13.5 17.5 21.0 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5 22.5 31 33.5 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 9 12 12 12 13.5 17.5 15.5 18 22 25.5 B 14.5 15 17.5 17.5

5 Port Solenoid Valve Series SY3000/5000/7000/9000

If valves other than non-polar type are used, this may cause malfunction. 8 0 1 9 B B B B B 10 2 11 3 12 4 D side U side 13 5 A A A A A 14 6 BOX CONNECTOR VZ3000-106-1A 15 7 + + + + + SoL. A SoL.

JIS Standard Hydraulic Cylinder

NB M Air release SS + Q + l S + Stroke SS FZ ZZ + Stroke ZZ +Q +l + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) e FD J B C F GA GB M NA NB P R S FT FX FY FZ SS l f Q B-rod C-rod B-rod C-rod 32 27 15 M10 x 1.25 58 38 16 21 15 11 37 31 3/8 39 130 11 11 40 88 109 30 25 to 1400 52 40 23 15 M10 x 1.25 65 45 12 21 15 11 36 30 3/8 42 130 11 11 46 95 118 30 25 to 1400 52 52 1/3.5

CA2

Local Area: (800) 258-9200-www.stevenengineering.com Ht Ht Bore size (mm) Hs Ht Hs Ht Hs Ht 40 33 42.5 30 30 30 30 50 37.5 46.5 34 34 34 34 B 32 A 63 43 52 41 41 41 41 80 51.5 58.5 49 49.5 49 49.5 100 58.5 66 55.5 57.5 55.5 56.5 Operating Range Bore size 63 9.5 Auto switch model 40 8.5 50 7.5 80 9.5 100 10.5 D-Z7/Z80 D-A3/A44/A3C/A44C D-A5/A6 D-B5/B64 9 10 11 11 11 D-A59W D-B59W D-Y59/

Table of Contents

S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5

CL

30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 12 12 15 18 18 14 20 20 15 17 17 21 21 16 16 22 27 27 32 41 100 110 130 160 180 230 255 275 8 11 11 13 16 71 81 101 119 133 145 160 180 80 90 105 130 150 190 212 236 59 67 73 77 85 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 60 70 86 102 116 15 17 17 21 21 16 16 11 11 11 11 11 16 16 40

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-X7 Heat resistance 100C Both sides angle adjustable One side angle adjustable, One side with cushion -X10 -X11 Fluoro rubber for seals -X16 11-7-1 2 Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 How to Order Mounting style B L Basic style Foot style Rotating angle 90 180 Rod end shape 90 180 Double shaft CRA1 B W 30 90 Size 30 CRA1 B S 50 90 Size 50 to 100 Mounting

Table of Contents

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Keyway dimensions b l AU Model Port size Rc D (g6) DD (h9) W BA BB SA SC SU SB SD BU SE CU F DU H EU J K MU S U A B C M8 x 1.25 depth 8 156 (189) 0 0.030 62 98 17 17 8.5 13.5 45 M16 x 1.5 48 33 12 15 25 5 25 46 14 11 34 9 15 2.5 14 36 12 5 1/8 CDRA1BSU50 175 (213.5) 199 (243) 259 (325) M10 x 1.5 depth 12 0 0.030 6 76 117 19.5 20 10 14.5 54.5 M20 x 1.5 60 33 12 19 30 30 57 21 13 34 11

SY

B B 34 77 30 17 35 A A A Manual override 15 77.5 SS5Y3-45-D .

Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Air Cylinder

Flange: CG1WFl F FT 4 x FD FX0.15 B E 0 0.05 B FX0.15 H (mm) Bore size Stroke range B E F FX FD FT H 20 Up to 1500 40 12 2 28 5.5 6 35 25 Up to 1500 44 14 2 32 5.5 7 40 32 Up to 1500 53 18 2 38 6.6 7 40 40 Up to 1500 61 25 2 46 6.6 8 50 50 Up to 1500 76 30 2 58 9 9 58 63 Up to 1500 92 32 2 70 11 9 58 80 Up to 1500 104 40 3 82 11 11 71 100 Up to 1500 128 50 3 100 14 14 71 * End boss is machined