1

CP95 Front mounting flange Hs B A A B B B A Hs Hs Hs Hs Hs A NCM 20 22.5 7 5 12 6.5 4 11 23.5 29.5 26 29 25 8 7.5 25 B 25.5 7 5 12 6.5 4 11 26.5 32.5 29 32 28 8 7.5 CDM2 NCA 32 29 8 6 13 7.5 5 12 30 36 32.5 35.5 31.5 9 8.5 HS 40 C D 33 13 11 18 12.5 10 17 34 40 36.5 39.5 35.5 14 13.5 D20 25.5 30.5 [9.5] 21.5 (29.5) 18.5 (26.5) 25.5 (33.5) 28 [7] 35 [14] 21 (29) View C-C 26.5 32.5 29 32 28

Swivels

PS1690202-16-16 4.32 3.46 2.16 1.62 1-11 1/2 1-11 1/2 109.8 mm 87.9 mm 54.9 mm 41.3 mm NPTF NPTF 3 Piece Design D Swivels A B D Part Number A B C D Wrench Flats Dia.

CV/MVGQ

B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7)

CV/MVGQ

B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7)

CL

CLAD40SCLA40, #6 (#1+#6+#11) CLAD50SCLA50, #6 (#1+#6+#11) CLAD63SCLA63, #6 (#1+#6+#11) CLAD80 SCLA80, #6 (#1+#6+#11) CLAD100SCLA100, #6 (#1+#6+#11) Trunnion/CLAT MXF MXW MXP MG MGP MGQ MGG MGC MGF (mm) CY1 Bore (mm) Stroke range (mm) W/o rod boot BN K KA LZ J AL BP BQ C GB MM B D GC B1 E GD F GL GA GR H1 A W/ rod boot 40 50 63 80 100 6 7 7 11 11 14 18 18 22 26 71 80 99 117 131 M14 X 1.5 22

CA2

73 70 15 130 150 20 22 14 55 90 107 100 18 80 +0.084 0 140 13.5 100 90 15 166 192 26 24 17 75 110 129 120 25 MB-S10 100 +0.084 0 162 13.5 100 90 15 188 214 26 24 17 75 130 135 120 25 B Z + Stroke Double clevis bracket Material: Cast iron DX DO DF 4-DT DH DS DA DL 4-DL B 90 DU DU DO DO DC Rotation DE Bore size (mm) A B A + B + 90 A 40 to 100 12 60 162 Note) This assembly drawing is provided

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e CD J B BB C F GA GB M NA NB P R S T LH LT LX LW X1 Y1 SS Z l f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 58 62 38 16 32 15 11 37 31 3/8 39 141 11 11 40 8 40 30 32 13 203 205 21.5 15 52 25 to 1400 40 M10 x 1.25 65 69 45 12 32 15 11 36 30 3/8 42 141 11 11 43 8 46 33 32 13 203 205 52 12 15 52 25 to 1400 1/3.5 stroke 50 M10 x 1.25 76 85 52

Table of Contents

245 258 A 25 40 53 70 75 90 95 M 2.3 2.3 2.3 2.3 3.2 3.2 L 40 53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specifications Model With barb fitting B 137 173 177 253 266 Metal bowl B

Electric Actuators

(B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) 6mm 12mm A B Stroke 25 50 75 100 25mm 50mm 75mm 100mm Use a driver with CE marking.

Cylinder with Lock

T TG1 32 DS5032 14 34 3.3 10 30 10.5 6.6 45 22 10 11.5 5 5.5 17 11 3 32.5 40 DS5040 16 40 4.3 12 35 11 6.6 55 25 10 12 5 5.5 20 13 4 38 50 DS5050 21 45 4.3 16 40 15 9 65 27 12 14 5 6.5 22 18 4 46.5 63 DS5063 21 51 4.3 16 45 15 9 75 32 12 14 5 6.5 25 18 4 56.5 80 DS5080 25 65 4.3 20 45 18 11 95 36 16 16 5 10 30 22 4 72 100 DS5100 25 75 6.3 20 55 18 11 115 41 16 16 5 10 32 22 4 89 * Supplied

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

V100

Cv b Cv VZ312 VZ322 VZ314 VZ324 N.C. 0.53 0.66 1.2 1.3 0.45 0.45 0.41 0.37 0.14 0.18 0.32 0.33 0.47 0.66 1.1 1.2 0.39 0.45 0.46 0.48 0.12 0.18 0.32 0.34 M5 75 Body ported N.O.

CL

75 75 242 269 288 336 365 437.5 456 494 11 11 11 11 11 16 16 18.5 16 19 23 28 36 35 40 45 244 273 296 347 381 443.5 465 509 16.5 16.0 16.0 18.0 18.0 40 40 40 8 11 11 13 16 8 0 0 0 0 59 66 66 80 81 133 133 141 6 7 7 11 11 15 15 17 51 58 58 71 72 110 110 120 14 18 18 22 26 31 31 36 30 35 40 48 58 65 75 80 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 27 30

Table of Contents

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 4-One-touch fitting 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting One-touch fitting [4 (A), 2 (B) port] Applicable tube

10

A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

MXQ

20 6.5 Adjuster at extension end 54.5 (Adjuster at extension end) Bottom view of MXQ25L-75 1.5 16 8 17 15 I J 8 2-M8 x 1.25 thread depth 9 Operating port 2-Rc 1/8 4 16 Max. 17 (Retraction end adjuster) 22 50 65 6H9 depth 6 +0.030 0 HA GA NN-M8 x 1.25 thread depth 16 7 B A 35 12 12 6H9 depth 6 +0.030 0 6.6 6.6 11 11 B H A 32 11.5 32 11.5 Section AA Section BB (NN 1) x H G (mm) Model F 55

Table of Contents

11 11 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 7 6 6 7 6 Some switches cannot be mounted.

CM2

#3 SCM220A, #11, #3, #19 CM2L25SCM225A, #11 SCM225A, #11, #3 SCM225A, #11, #3, #19 CM2L32SCM232A, #11 SCM232A, #11, #3 SCM232A, #11, #3, #19 CM2L40SCM240A, #11 SCM240A, #11, #3 SCM240A, #11, #3, #19 1.4-40 Series CM2 Front Flange (F) CM2F Bore size Stroke S T (mm) Bore N NA NN P E B2 C2 D H2 I A F K AL FD Z B FT MM B1 FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/4 13 26 30

High Vacuum Angle Valve

XLG50, 63, 80, 100, 160/ Air operated (b) D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY DJ K XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 70 183 80 31 10.5 75 52 77 29 10.5 88 209 100 39 11 87 95 70 76.5 36 9 90 250 117 45.5 11 114 110 83 105 44 9 108 270.5 154 55 11 134 130 102 92 58 9 138 339 200 65 11