ZP

(Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11-89 to 90 P. 13-11-93 to 94 Buffer stroke Pad dia. 40 50 63 80 100 125 Buffer stroke (mm) 25 50 75 100 Pad Material and Characteristics : Little or no influence : Can be used depending

NCQ2/CQ2

75, 100 10 to 50 75, 100 10 to 50 75, 100 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore size (mm) FD FT FV FX FZ L M CZ RR L B A 54 64 63.5 73.5 75 85 B 36 46 43.5 53.5 53 63 A 63 43.5 108 18 60 9 9 80 92 37.5 46 64 63 44 33.5 14 7/16-14UNC M10 x 1.5 8 27.5 80 53.5 11 11 99 116 134 20 77 45.5 53.5 73.5 80 56 43.5 18 1/2-13UNC M12 x 1.75 10 35.5 100 53.5 11 11

Table of Contents

) 12 (14) 104 11 21 47.5 175 37 46 28.3 40 25 25 25 107 (115) 12 (14) 104 11 21 48 201 37 52 31.3 43 32 32 32 110 (118) 12 (14) 106 11 21 49 238 44 62 38.3 52.5 40 40 40 121 (130) 12 (15) 123 11 25 53 285 55 75 44.5 58.5 50 50 50 137 (149) 14 (16) 140 16 26 59 Note) ( ): Denotes the dimensions for long stroke.

AC Servo Motor Driver (Network card type ）

OPTIONS AND PERIPHERAL EQUIPMENT 111 to 11-34 11.1 Cable/connector sets . 11-2 11.1.1 Combinations of cable/connector sets . 11-3 11.1.2 STO cable . 11-6 11.1.3 Encoder cable/connector sets . 11-7 11.1.4 Motor cables . 11-9 11.1.5 Lock cables . 11-10 11.2 Regenerative options . 11-11 11.2.1 Combination and regenerative power . 11-11 11.2.2 Parameter setting . 11-11 11.2.3 Selection of regenerative

Table of Contents

MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20 0.2 MPa 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) 0.5 MPa

MY1

Therefore, also check the allowable load for the selected conditions. 6.1 10 16 20 25 32 40 MX 0.8 6.1 1.1 0.8 6.1 10.8 3.7 10.8 4.9 3.7 10.8 40 50 40 50 40 50 17.6 MTS 11 17.6 16 11 17.6 MY1H 27.5 23 27.5 26 23 27.5 30 30 30 39.2 MY 39 39.2 50 39 39.2 20 50 39 50 50 50 50 20 20 CY The above values are the maximum allowable values for moment and load.

ZP

Vacuum Pad Series ZP Non-rotating 2 to 8: Stroke 6, 10, 15, 25 mm 10 to 32: Stroke 10, 20, 30, 40, 50 mm 40, 50: Stroke 10, 20, 30, 50 mm Type Without buffer With buffer VAC VAC Vacuum entry port Mounting Vacuum entry port Mounting ZX 13-11-2 to 13-11-27 VAC VAC Buffer body Female thread Female thread Male thread Series (Common) ZR ZPT Barb fitting VAC Barb fitting Buffer body ZM Vertical

Air Slide Table

50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10

AC Servo Motor Driver (Pulse input type/Positioning type ）

) (Note 11) (Note 11) PD44 38 I (Note 11) (Note 11) (Note 11) PD46 39 40 41 I DI1 DI1 DI1 PD14 42 I EM2 EM2 EM2 43 I LSP LSP LSP PD18 44 I LSN LSN LSN PD20 45 I DOG DOG SIG PD22 46 DOCOM DOCOM DOCOM 47 DOCOM DOCOM DOCOM 48 O ALM ALM ALM 49 O RD RD RD PD28 50 16 19 16.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

24.5 7.5 16.5 11 11 20.5 (P, EA, EB port) 1/8 41 L plug connector (L): 10-SY3140(R)-L-01 M plug connector (M): 10-SY3140(R)-M-01 M8 connector (WO): 10-SY3140(R)-WO-01 Approx. 300 (Lead wire length) 38.1 53.5[60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6[71.6] 76.8[79] 68.5 75.9 62 67[69.2] 20.5 2 11 11 20.5 2 11 2 11 11 11 20.5 7.5 16.5 24.5 7.5 16.5 7.5 16.5 24.5 24.5 50 Note

5-Port Solenoid Valve

-1A SY50M-11-1A SY70M-11-1A Part numbers shown on the left are for 10 valves (10 pcs.).

CL

X 1.25 M12 X 1.75 M12 X 1.75 M14 X 1.5 M14 X 1.5 M16 X 1.5 40 45 50 65 75 85 100 106 30 35 35 40 40 50 50 56 59 67 73 77 85 6 7 7 11 11 15 15 17 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 15 17 17 21 21 16 16 11 11 11 11 11 16 16 14 18 18 22 26 31 31 36 9 9 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 32

Electric Actuator

Screw Drive Horizontal Vertical 20 20 Lead 6: 11-LEFS25B Work load: W [kg] Work load: W [kg] Lead 6: 11-LEFS25B 15 15 10 10 Lead 12: 11-LEFS25A 5 5 Lead 12: 11-LEFS25A 0 0 0 100 200 300 400 500 600 Speed: V [mm/s] 0 100 200 300 400 500 600 Speed: V [mm/s] 11-LEFS32/Ball Screw Drive Horizontal Vertical 50 50 Lead 8: 11-LEFS32B 40 40 Work load: W [kg] Work load: W [kg] 30 30 Lead 16: 11-LEFS32A

V100

(50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or equivalent (130C) (6) 51 45 17 (5.3) 11 (2.9) 5.5 50 Hz 60 Hz 50 Hz 60 Hz Inrush Apparent power (VA) (Power consumption (W)) VP AC Holding S070 Power consumption (W) DC Bracket (AXT338-11)/For body ported type VQ Accessory (Option) Indicator

Made to Order

(A: 25 mm, B: 50 mm) CA2 series 40 50 63 80 100 9 8 36 8 M12 x 1.25 171 Width across flats ka 11 13 42 8 M16 x 1.5 190 MM 11 17 44 8 M20 x 1.5 200 15 19 54 10 M24 x 1.5 241 15 19 55.5 10 M24 x 1.5 253.5 CA2K, CBA2 (With lock on rod side only) (mm) Bore size (mm) b c d ka MM ZZ ZZ + Stroke + Adjustment d + Adjustment b c 40 50 63 80 100 9 11 44 8 M16 x 1.5 179 11 11 42 8 M16 x 1.5 190 CS1

Table of Contents

10 117 132 Weight by Stroke (g) Stroke (mm) Model 10 15 20 25 30 40 50 ZPY02 to 08 ZPY10 to 25 ZPY40, 50 +7 +8 +9 +12 +14 +26 5.5 +28 +30 5.5 P . 13-11-65 to 13-11-68 13-11-50 51 Series ZPY Vacuum Pad: Lateral Vacuum Entry with Barb Fitting with Buffer How to Order Series ZPY With buffer ZPY A10 U 16 K GS 20 U6 Mounting thread (Refer to Table (3) for applications.)

Smooth Cylinder/Low Speed Cylinder

TB Td TE TF TH TN Rod End Nut CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 3.2 3.2 4.5 4.5 6 8 11 12 (29.3) (33.1) (40.4) (49.2) (60.4) (74.6) 28 01 13 15 17 21 24 26 36 50 36 43 50 58 70 82 73 90 8 10 12 14 16 18 18 22 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 25 30 35 40 50 60 55 65 RZQ 03 32 01 03 Applicable bore (mm) 20 25 32 40 50 63

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

) Without auto switch With auto switch FZ FX FV FT FD A B A B MU 46 56 53.5 63.5 63 73 64 74 73.5 83.5 85 95 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 108 92 80 9 9 74 56 D80 134 116 99 11 11 83.5 63.5 -X 100 154 136 117 11 11 95 73 B + Stroke A + Stroke Bore size (mm) Stroke range (mm) 20L M L1 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 Data 18 43.5 60 80 20 53.5 77

Combination Cylinder

25 30 36 36 40 40 50 55 65 80 90 90 90 32 40 40 52 52 6.5 6.0 6.0 8.0 8.0 43 43 43 15 17 17 21 21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 14 18 18 22 26 31 31 36 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 14 14 14 8 11 11 13 16 M8 M8 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 6 7 7 11 11 15 15 17 9 9 40 45 50 65

ZP

115 117 132 Weight by Stroke (g) Stroke (mm) Model 10 15 20 25 30 40 50 ZPY02 to 08 ZPY10 to 25 ZPY40, 50 +7 +8 +9 +12 +14 +26 5.5 +28 +30 5.5 P . 13-11-65 to 13-11-68 13-11-50 Series ZPY Vacuum Pad: Lateral Vacuum Entry with Barb Fitting with Buffer How to Order Series ZPY With buffer ZPY A10 U 16 K GS 20 U6 Mounting thread (Refer to Table (3) for applications.)