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D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

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-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

A

S F O O T E Diameter Model No d2 CK S5 K1 K2 13 G1 l1 G2 EM G3 CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 D I M E N S

5 Port Solenoid Valve Series SY3000/5000/7000/9000

11 7.5 (P, EA, EB port) 1/8 20.5 41 L plug connector (L): M plug connector (M): M8 connector (WO): 10-SY3 40(R)-M-01 3 4 5 10-SY3 40(R)-WO-01 3 4 5 10-SY3 40(R)-L-01 3 4 5 Approx. 300 (Lead wire length) 38.1 53.5[60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6[71.6] 66.5 34 41.4 115.3 60 97.5[101.9] 117.1[121.5] 42.3[44.5] 20.5 11 11 20.5 11 20.5 11 11 11 32.5[34.7] 27.5 7.5 16.5

Hydraulic

(mm) Bore size (mm) C B BB GA LX P LW LT F J LH NA T SS S Z X1 Y1 R M CD 32 62 58 38 11 16 158 220 11 32 11 40 8 3/8 40 222 37 30 39 32 M10 x 1.25 25 to 800 13 0.15 0.13 40 69 65 45 11 12 158 220 11 32 11 43 8 3/8 46 222 36 33 42 32 M10 x 1.25 25 to 800 13 50 85 76 52 14 15 176 241 13 35 11 50 8 1/2 58 246 43 37 46 40 M10 x 1.25 25 to 800 15 63 98 90 63 18 15 186 263 15 42 14 60 10 1/2 65

V100

(50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or equivalent (130C) (6) 51 45 17 (5.3) 11 (2.9) 5.5 50 Hz 60 Hz 50 Hz 60 Hz Inrush Apparent power (VA) (Power consumption (W)) VP AC Holding S070 Power consumption (W) DC Bracket (AXT338-11)/For body ported type VQ Accessory (Option) Indicator

Air Slide Table

Bottom view of MXQ12A-40Z Dimensions [mm] Model F G GB H HB I J M N NN Z ZZ MXQ12A-10Z 28 17 11 32 46 11 32 82.5 4 2 62.5 75 MXQ12A-20Z 28 19 11 32 48 13 32 92.5 4 2 64.5 77 MXQ12A-30Z 38 21 11 40 58 15 40 102.5 4 2 74.5 87 MXQ12A-40Z 34 27 60 23 50 120.5 6 3 92.5 105 MXQ12A-50Z 34 11 37 39 60 23 60 130.5 6 3 102.5 115 MXQ12A-75Z 36 25 41 36 100 42 85 174.5 8 4 146.5 159 MXQ12A-100Z 36

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60 1.

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Stroke range (mm) Bore size (mm) A N AD AC M AF L AE F K AB C E J AA AP B D G H I 99 45 75 16.5 25 80 30 60 11 92 55 24 5.5 12 25 108 60 30 20 75, 100, 125, 150, 200 M5 x 0.8 depth 10 9.5 depth 6 M8 x 1.25 depth 14 109 54 85 16.5 35 100 30 70 13 26.5 113 6.6 65 16 30 130 65 35 25 11 depth 8 M10 x 1.5 depth 18 M6 x 1 depth 12 75, 100 125, 150 200, 250 300 129 60 100 19 35 106 35 80 16 118

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D 35 40 45 50 55 60 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 50 55 60 65 70 75 80 D' 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D' 40 45 50 55 60 65 45 50 55 60 65 70 45 50

CQ2

Model C Mounting bolt Mounting bolt D 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 Model C Mounting bolt D 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 55 60 65 70 75 80 85 90 95 C' D' 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70

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Frequency (Hz) 45 40 55 50 65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.

Smooth Cylinder/Low Speed Cylinder

(mm) DDH10 (Hole) Bore size (mm) DA DL DU DC DX DE DO DR DT DS DH DF B Z Part no. +0.058 0 40 CA2-B04 57 35 11 65 15 85 10 9 17 8 40 52 60 165 10 +0.070 0 50 CA2-B05 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 +0.070 0 63 CA2-B06 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 196 16 +0.084 0 80 CA2-B08 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 +0.084 0 100 CA2-B10 93 60 16.5 100

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-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

ZP

Model Model 14 A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) ZP3-Y10B:3-B5 ZP3-Y10B:6-B5 ZP3-Y10B:10-B5 ZP3-Y13B:3-B5 ZP3-Y13B:6-B5 ZP3-Y13B:10-B5 13.2 14.2 16.3 13.4 14.4 16.5 26.5 29 33 44 50 60 11 14.5 20.5 13.8 15.1 17.5 26.5 29 33 44 50 60 11 14.5 20.5 14.0 15.3 17.7 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

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EXH block disk SUP block disk 3-5-85 86 Series VFR5000 Manifold Plug-in type/Non plug-in type Plug-in type (With terminal block): VV5FR-01TStation 1Bore size 235.5 204 (72) 60 11 60 4 U side Manual override (Non-locking) 21 R5.5 B B B B n A A A A B B B A B B B B A A A A 3 A A L2 L1 2 P = 51 11 11 71.5 (Pitch) P = 51 (Pitch) 1 6 [2] 71.5 Stations Light/Surge voltage suppressor 24 [23] 20 91

Made to Order

WB WA E A + Stroke MGPM-Z, MGPL-Z, MGPA-Z/WA, WB Dimensions Bore size (mm) Stroke range (mm) WA WB 11 to 39 st 41 to 99 st 101 to 199 st 201 to 249 st 11 to 39 st 41 to 99 st 101 to 199 st 201 to 249 st 12 11 to 249 20 40 110 200 15 25 60 105 16 24 44 110 200 17 27 60 105 Bore size (mm) Stroke range (mm) WA WB 21 to 39 st 41 to 124 st 126 to 199 st 201 to 299 st 301 to 399 st 21 to 39 st

CL

11 13 16 71 81 101 119 133 145 160 180 80 90 105 130 150 190 212 236 59 67 73 77 85 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 60 70 86 102 116 15 17 17 21 21 16 16 11 11 11 11 11 16 16 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 32 40 40 52 52 14 14 14 9.0 9.0 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145

5

Bore size (mm) B TA TL TU TC TX TE TO TR TT TS TH TF Z** TDH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15 130 110 150 20 11 22 14 60 80 129 20+0.084 0 MB-S10 100 114 120

JIS Standard Hydraulic Cylinder

10 27 19 11 43 35 1/2 46 142 14 45 17 18 115 35 18 108 60 52 55 25 to 1400 63 30 20 M12 x 1.5 90 165 63 10 27 19 14 43 35 1/2 52 148 18 50 19 20 132 41 19 106 71 65 55 25 to 1500 80 35 20 1/4 stroke M16 x 1.5 110 190 80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 65 80 25 to 1800 100 39 15 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 80 100