Table of Contents 12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650
50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 88 18 177 188 With Rod Boot (mm) B3 e f h l Z Symbol Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 18 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125
22 19.5 17 16.5 10 14 2 12 10 40 6 31 M5 0.8 depth 7.5 5.5 8 M10 x 1.25 29 1/8 32 Up to 200 22 19.5 17 20 12 18 2 12 10 40 6 38 M5 0.8 depth 8 5.5 10 M10 x 1.25 35.5 1/8 40 Up to 200 30 27 19 26 16 25 2 13 10 50 8 47 M6 1 depth 12 6 14 M14 x 1.5 44 1/8 Female Rod End (mm) Bore size TA TB TC 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st S ZZ S ZZ S ZZ S ZZ 20 11 11 M5 x 0.8 94 131
24 22 11 62 13 12 13 24 95 115 126 25 22 M22 x 1.5 10 8 G1/8 16 22 8 8 50 20 8 M10 x 1.25 32 11 30 22 11 65 17 12 13 28 104 126 137 ( ): For air cushion With Rod Boot [mm] Bore size Stroke Item AM C e f K KK h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 22 8 M10 x 1.25 74 87 99 112 137 162 187 Auto Switch
SS5Y33, #5 (#5 + #8 + #9 + #11) 4 3 2 5 6 7 8 9 10 11 12 13 14 15 16 Stations n L1 L2 L3 91.5 81 102 112.5 123 133.5 144 154.5 173 160.5 185.5 198 210.5 210.5 223 235.5 148 260.5 273 285.5 298 310.5 310.5 162.5 150 175 187.5 200 200 212.5 225 137.5 250 262.5 275 287.5 300 300 234 70.5 181.5 192 202.5 213 223.5 11.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 For 11 or more stations, two
12 13 16 17 19 12 14 18 25 30 32 5 6 6 8 11 11 Up to 150 Up to 200 Up to 200 Up to 300 Up to 300 Up to 300 26 31 38 47 58 72 6.6, 11 counterbore depth 7 M10 x 1.25 9, 14 counterbore depth 9 M10 x 1.25 11, 17.5 counterbore depth 12 M14 x 1.5 14, 20 counterbore depth 14 M18 x 1.5 18, 26 counterbore depth 18 M18 x 1.5 With Air Cushion Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 W P WA
m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Me L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 600 600 600 600 L5 Wall Y 400 400 400 400 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load
5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 Stations 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 8 223 212.5 200 11.5 9 248 237.5 216 16 10 260.5 250 232 14 L1 L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5
OUT2 setting/(CH1 only) MPa or kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE Normally Open Normally Closed SET SET 16-3-11 11 Series PSE530/200 Operation 1: Initial Setting 4 Response time setting MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE 5 ms 20 ms 160 ms 640 ms SET Press SET button.
-57 58 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.
One-touch fitting Basic Front flange Built-in One-touch fitting Spring return CM2F20SCM220A, #11 SCM220A, #11, #4 SCM220A, #11, #4, #19 CM2F25SCM225A, #11 SCM225A, #11, #4 SCM225A, #11, #4, #19 CM2F32SCM232A, #11 SCM232A, #11, #4 SCM232A, #11, #4, #19 CM2F40SCM240A, #11 SCM240A, #11, #4 SCM240A, #11, #4, #19 Bore P Q 20 6 23 25 6 26 Basic Front flange Built-in One-touch fitting Spring extend
11 13 16 147 157 173 189 203 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.
11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.
11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3240(R)-L-01 M8 connector (WO): 10-SY3240(R)-WO-01 M plug connector (M): 10-SY3240(R)-M-01 108.6 [113] Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 79 89 [93.4] 20.5 11 11 20.5 11 92 106.8 20.5 11 11 11 7.5 16.5 7.5 16.5 24.5 7.5 16.5 24.5 24.5 50 Note) Refer to page 176
30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight [kg] 1 1.14 1.37 1.66 1.83 1.7 1.89 2.21 2.63 2.97 3.31 3.57 2.95 3.21 3.76 4.32 4.99 5.48 5.92 Series LEYG16LmE LEYG25LmE LEYG32LmE Stroke [mm] 30 50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight [kg] 1.01 1.14 1.31 1.6 1.75 1.71 1.92 2.16 2.59 2.85 3.17 3.41 2.95 3.22 3.61 4.16 4.7 5.21
R1 S5 XD Z 32 E5032 32 10 11 47 26 0.2 0.6 21 18 31 8 38 51 7 10 10 6.6 200 222 40 E5040 36 12 11 54 28 0.2 0.6 24 22 35 10 41 54 9 10 11 6.6 226 250 50 E5050 45 12 15 66 32 0.2 0.6 33 30 45 12 50 65 11 12 12 9 245 277 63 E5063 50 16 15 77 40 0.2 0.6 37 35 50 12 52 67 11 14 15 9 269.5 301.5 80 E5080 63 16 18 99 50 0.2 0.6 47 40 60 14 66 86 12.5 18 15 11 320 360 100 E5100 71 20 18 118 60 0.2
ZK2 Combination Manifold n: Stations L: Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 101 110 119 128 137 146 155 164 173 182 191 200 209 218 227 L2 61.4 70.4 79.4 88.4 97.4 106.4 115.4 124.4 133.4 142.4 151.4 160.4 169.4 178.4 187.4 L3 135.5 148 160.5 160.5 173 185.5 185.5 198 210.5 223 223 235.5 248 248 260.5 L4 125 137.5 150 150 162.5 175 175 187.5 200 212.5 212.5 225 237.5 237.5
) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.