5

58 11 M10 x 1.25 7 80 40 37 102 32 78 25 52 119 13.5 18 102 130 76 160 21 71 13 M12 x 1.75 10 100 40 37 116 41 92 30 52 133 13.5 18 116 150 92 180 21 72 16 M12 x 1.75 10 Bore size (mm) KA M MM N P S ZZ 40 14 11 M14 x 1.5 27 1/4 84 146 50 18 11 M18 x 1.5 30 3/8 90 159 63 18 14 M18 x 1.5 31 3/8 98 170 80 22 17 M22 x 1.5 37 1/2 116 204 100 26 17 M26 x 1.5 40 1/2 126 215 Head Flange: CA2YG B1

15

[mm/s] (Operating condition) a1: Acceleration [mm/s2] T1 = V/a1 [s] T3 = V/a2 [s] = = 0.57 [s] T2: Constant speed time can be found from the following equation.

Air Cylinder

40 6 38 M5 0.8 depth 8 5.5 10 M10 x 1.25 35.5 1/8 40 Up to 200 30 27 19 26 16 25 2 13 10 50 8 47 M6 1 depth 12 6 14 M14 x 1.5 44 1/8 Female Rod End (mm) Bore size TA TB TC 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st S ZZ S ZZ S ZZ S ZZ 20 11 11 M5 x 0.8 94 131 119 156 144 181 25 11 11 M6 x 0.75 94 136 119 161 144 186 169 211 32 11 10 M8 x 1.0 96 138 121 163 146 188 171 213 40

CM2

11 16 10 24 14 7 21 22 41 8 46.5 M14 x 1.5 21.5 42.5 M32 x 2 44.5 1/4 32 Dimensions by Stroke Boss-cut Style Built-in One-touch Fittings Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Symbol Symbol S ZZ S ZZ S ZZ ZZ S S ZZ Bore size (mm) 20 25 32 40 Bore size (mm) Bore size (mm) ZZ ZZ ZZ ZZ ZZ Q P 20 20 191 137 166

CQ2

166 191 161 11 191 99 136 116 161 134 20 10 77 10 to 50, 75, 100 179.5 145.5 11 179.5 204.5 170.5 11 204.5 117 145.5 136 170.5 154 22 12 94 2.3-37 Compact Cylinder/Standard: Single Acting Spring Return/Extend Series CQ2 12, 16, 20, 25, 32, 40, 50 How to Order 10 B 20 S CQ2 Standard A73 S B 20 10 S CDQ2 With auto switch Number of auto switches With auto switch 2 1 n Auto switch S n (Built-in

CV/MVGQ

M26 x 1.5 14 30 15 50 39 18 10 24 16 7 11 21 22 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 MVGQ Dimensions by Stroke Single Acting/Spring Extend CC Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Bore size (mm) 20 25 32 40 Q QY Symbol S Z ZZ S Z ZZ ZZ Z S ZZ Z S ZZ Z S RB 20 25 32 40 65.3 19.8 217 208 137 192 183 112 167 158 87 14 70.5 22 221 212 137 196 187

CV/MVGQ

11 18 18 18 20 20 8 11 11 13 16 100 110 130 160 180 42 50 59 76 92 80 90 105 130 150 60 70 86 102 116 12 12 15 18 18 9 9 11.5 13.5 13.5 32 40 40 52 52 16 20 20 25 30 44 52 64 78 92 MK(2) RS Q G Bore size (mm) LL MM N Q S W H ZZ d e f h With rod boot Without rod boot l ZZ RS H A 40 50 63 80 100 86 83 83 84 85 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 38 43.5 49 63

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

CL

11 13 16 M8 X 1.25 M8 X 1.25 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 59 67 73 77 85 112.5 121 133 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 32 40 40 52 52 6.5 6.0 6.0 8.0 8.0 43 43 43 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 14 14 14 30 35 35 40 40 50 50 56 15 17 17 21 21 16 16 18.5 27 32 32 37 37 47 47 53 60

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) TA TB TC S 94 94 96 103 ZZ 131 136 138 155 S 119 119 121 128 ZZ 156 161 163 180 S 144 144 146 153 ZZ 181 186 188 205 ZZ 211 213 230 20 25 32 40 11 11 11 12 11 11 10 10 M5 x 0.8 M6 x 0.75 M8 x 1.0 M10 x 1.25 169 171 178 Note) The drawing below shows the single acting/spring return style.

CA2

size (mm) 40 50 63 80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 B B1 C A AL D E F G H H1 J K KA M MM N S S ZZ 156 169 180 214 225 ZZ 146 159 170 204 215 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 11 11 14

Compact 5-Port Solenoid Valve

Cylinder speed [mm/s] Cylinder speed [mm/s] Refer to pages 9 to 12 for detailed conditions regarding the above cylinder speeds.

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

Table of Contents

(Refer to page 14-19-11.)

MGP

(2 to 19 in/s) Piston speed 80, 100 50 to 400mm/s (2 to 15 in/s) Cushion Rubber bumper at both ends Lubrication Non-lube +1.5 0 Stroke length tolerance mm Standard Strokes Bore size (mm) Standard stroke (mm) 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 12, 16 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 20, 25 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350,

MG

150 st 150 st or less Over 150 st 150 st or less Over 150 st 150 st or less Over 150 st 80 80 80 45.5 40.5 24 38.5 0 146.5 193 30 46.5 25 160 193 13.5 46.5 100 100 100 49 43.5 26.5 41 166 203 36 0 37 30 180 203 14 37 8-19-48 Compact Guide Cylinder Heavy Duty Guide Rod Type Series MGPS 50, 80 How to Order MX MGP 50 50 S Y7BW MTS MY CY Number of auto switches 2 pcs. 1 pc.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

mm/s or less !

Cylinder with Lock

A B C D E F G H M P U Load [kN] Weight [g] Rotating angle 32 JA30-10-125 49.5 19.5 24 5 8 8 17 M10 x 1.25 9 0.5 2.5 70 0.5 40 JA40-12-125 60 20 31 6 11 11 22 M12 x 1.25 13 0.75 4.4 160 50, 63 JA50-16-150 71.5 22 41 7.5 14 13.5 27 M16 x 1.5 15 1 11 300 80, 100 JAH50-20-150 101 28 31 59.5 11.5 24 16 32 M20 x 1.5 18 2 18 1080 * Black color Rod clevis: GKM (ISO 8140) l1 [mm] Bore size Part

Table of Contents

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Table of Contents

S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5