Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LEFS (Ball Screw), Type: H (High Precision Type), Body Size: 25, Motor Mounting: In-line, Lead: A (16: 10mm; 25: 12mm; 32: 16mm; 40: 20mm), Stroke: 600mm

Series: LEFS (Ball Screw Drive), Accuracy: H (High Precision Type), Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm), Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: R (Robotic

Series: Ball Screw Drive, Accuracy: High Precision Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Robotic Flexible Cable, Actuator

Series: Ball Screw Drive, Accuracy: High Precision Type, Size: 25, Motor Mounting Position: In-line, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32: 16mm, Size 40: 20mm, Stroke: 600mm, Motor Option: w/o Lock, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Actuator Cable: Standard Cable, Actuator Cable

2

) Note 11) Note 11) Note 11) Note 11) Note 11) 6C Nylon bowl with bowl guard Note 12) Note 12) Note 12) Note 12) Note 12) Note 12) 221 Air Combination Series AC20-B to AC60-B Modular F.R.L.

CATALOG

M 14 x 1.5 27 1/4 84 8 50 ~ 600 20 ~ 600 32 35 70 52 20 40 10 17 17 M 8 x 1.25 7 11 M 18 x 1.5 30 3/8 90 0 63 ~ 600 20 ~ 600 32 35 85 64 20 40 10 17 17 M 10 x 1.25 7 14 M 18 x 1.5 31 3/8 98 0 80 ~ 750 20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 17 M 26 x 1.5 40 1/2 126 0 With Gaiter Without Gaiter

1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

5 Port Solenoid Valve Series SY3000/5000/7000/9000

) 53.5[60.5] 50 24.5 16.5 11 11 7.5 (P, EA, EB port) 1/8 20.5 41 L plug connector (L): 10-SY3240(R)-L-01 M8 connector (WO) 10-SY3240(R)-WO-01 M plug connector (M): 10-SY3240(R)-M-01 Approx. 300 (Lead wire length) 38.1 53.5[60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6[71.6] 108.6[113] 79 89[93.4] 20.5 11 11 20.5 11 92 106.8 20.5 11 11 11 7.5 16.5 7.5 16.5 24.5 7.5 16.5 24.5 24.5

CA2

M14 x 1.5 27 CA2 50 70 11 7 up to 600 20 to 600 35 32 27 52 20 40 10 17 M8 x 1.25 18 11 M18 x 1.5 30 63 85 11 7 up to 600 20 to 600 35 32 27 64 20 40 10 17 M10 x 1.25 18 14 M18 x 1.5 31 CS1 80 102 13 11 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 22 17 M22 x 1.5 37 100 116 16 11 up to 750 20 to 750 40 37 41 92 30 52 14 21 M12 x 1.75 26 17 M26 x 1.5 40 C76 Without rod boot With

A

M14x1.5 40 27 7/16-20 ~600 20~600 35 70 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 M8x1.25 7 80 11 M18x1.5 50 32 3/4-16 ~600 20~600 35 86 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 M10x1.25 7 99 14 M18x1.5 63 32 3/4-16 ~750 20~750 40 102 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 M12x1.75 11 117 17 M22x1.5 80 37 3/4-16 ~750 20~750 40 116 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 M12x1.75

Table of Contents

85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5

CL

, #4 (#1+#4+#11) CLAG63SCLA63, #4 (#1+#4+#11) CLAG80SCLA80, #4 (#1+#4+#11) CLAG100SCLA100, #4 (#1+#4+#11) Single Clevis/CLAC (mm) Stroke range (mm) Bore (mm) CX GB BP BQ C GC J CD GD AL D GL A E GR B F H1 BN GA B1 W/o rod boot W/ rod boot 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 40 50 63 80 100 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 22 27 27 32

V100

Ground 4-7-11 12 Series VT317 How to Use DIN Terminal 1.

Table of Contents

st 4 1100 st 1000 st 3 900 st 800 st 2 600 st 700 st st: Stroke (mm) 400 st 500 st 1 100 st 200 st 300 st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Allowable end load F (N) 8-21-11 11 Series MGG Ball Bushing Bearing Allowable End Load and Deflection MGGL25Stroke MGGL32Stroke MGGL20Stroke 3.5 2.5 (Ball bushing bearing type) 4 (Ball bushing bearing type) (Ball bushing

Slider Type Ball Screw Drive/11-LEFS Series

11-LEFS32ll-450l 791 821 456 580 8 3 450 11-LEFS32ll-500l 841 871 506 630 10 4 600 11-LEFS32ll-550l 891 921 556 680 10 4 600 11-LEFS32ll-600l 941 971 606 730 10 4 600 11-LEFS32ll-650l 991 1021 656 780 12 5 750 11-LEFS32ll-700l 1041 1071 706 830 12 5 750 11-LEFS32ll-750l 1091 1121 756 880 12 5 750 11-LEFS32ll-800l 1141 1171 806 930 14 6 900 525 11-LEFS Series AC Servo Motor Clean Room Specification

15

35 LEFS25lll-600 760.5 606 710 12 5 600 35 LEFS25lll-650 810.5 656 760 12 5 600 35 LEFS25lll-700 860.5 706 810 14 6 720 35 LEFS25lll-750 910.5 756 860 14 6 720 35 LEFS25lll-800 960.5 806 910 16 7 840 35 LC3F2 Motor Mounting Dimensions [mm] Motor type FA FB FC FD FE FF FG FH FJ NZ M4 x 0.7 7.5 46 30 3.7 11 42 NY M3 x 0.5 5.5 45 30 5 11 38 NX M4 x 0.7 7 46 30 3.7 8 42 NM1/NM2 3.4 31

Electric Actuator/Slider Type

mm] 600 600 600 600 Me X 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Me L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 600 600 600 600 L5 Wall Y 400 400 400 400 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25

Table of Contents

Horizontal mounting Cylinder MY1HT50-600 Average operating speed a 700 mm/s Mounting orientation Vertical mounting CusionShock absorber ( = 1/100) 2. Wall mounting z y P. 8-11-36 P. 8-11-6 MY1HT50-600 x y x z Wd: Workpiece (500 g) x 3. Ceiling mounting 4.

Table of Contents

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note Solenoid assembly Epoxy/Stainless steel DXT170-APush rod Body Resin NBR O-ring NBR 13 x 11 x 1 Common with Series VZ 000 3 5 o EXH poppet Back up spring FKM V seal Stainless steel Brass, NBR Retainer assembly Stainless steel Poppet spring 3-3-11 11 Series VZ1000 2 Position Single Grommet (G), (H) VZ1120-M5 G H VZ1120 (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm Manual override