Smooth Cylinder/Low Speed Cylinder

45 8 30 15 30 9 62 14 22 26 0 0.033 32 34.5 37.5 5.5 M10 x 1.25 19.5 17 10.5 6 M26 x 1.5 139 148 9 30 25 10 19 12 13 8 45 10 30 15 9 64 14 22 26 0 0.039 40 21 41.2 7 M14 x 1.5 21.5 M32 x 2 42.5 46.5 22 13.5 8 177 188 10 38 15 30 14 16 11 50 12 39 11 88 18 24 32 Clevis pin and snap ring (cotter pin for bore size 40) are shipped together.

Made to Order

D-M9W D-M9A D-A7/A80 D-A7H/A80H D-A73C/A80C 9 9 10 11 11 13.5 13 13.5 5 5 15 + 15 (n2)Note) (n=4, 6...) D-F7 D-J79 11 D-A79W 11 13 14 14 16.5 16 16.5 D-F7W/J79W D-F7BA D-F79F/F7NT 10 15 15 + 20 (n2)Note) (n=4, 6...) Since the operating range is provided as a guideline including hysteresis, it cannot be guaranteed. (Assuming approximately 30% dispersion.)

5

Bore size (mm) DA DL DU DC DX DE DO DR DT DS DH DF B Z DDH10 (Hole) CA2-B04 40 57 35 11 65 15 85 10 9 17 8 40 52 60 165 10 +0.058 0 CA2-B05 50 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 +0.070 0 CA2-B06 63 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 196 16 +0.070 0 CA2-B08 80 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 +0.084 0 CA2-B10 100 93 60 16.5 100 35.5 130 15 13.5 24 12

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

Electric Actuator/Slider Type

Return plate Aluminum alloy Coating 12 Pulley Aluminum alloy 13 Pulley Aluminum alloy 11 Electric Actuator/Slider Type Motor Parallel Type Series LEFS Dimensions: Ball Screw Drive LEFS16 Connector Motor cable Lock cable 15 20 Step motor 20 20 20 With lock: LEFS16 B 24 15 Servo motor 24 Motor cable (2 x 5) Cable length 400 65 65 Cable length 250 3H9 ( ) depth 3 + 0.025 0 Cable length 250

Rotary Actuator/Vane Type

L1-(3 x P) X = L1 = X = Q2 = M CRJ CRA1 [mm] Size CRB2, CRBU2 Y L2 max Q2 10 5.5 to 8 Y-1 3 15 7.5 to 9 Y-1.5 3, 4 20 9 to 10 Y-1.5 3, 4, 5 30 11 to 13 Y-2 3, 4, 5, 6 40 14 to 15 Y-4.5 3, 4, 5, 6, 8 [mm] CRQ2 Size CRB2 CRBU2 X L1 max Q1 X L1 max Q1 10 7.5 to 14 X-3 3 5.5 to 14 X-1 3 15 10 to 18 X-4 3, 4 7.5 to 18 X-1.5 3 20 12 to 20 X-4.5 3, 4, 5 9 to 20 X-1.5 3, 4 30 14 to 22 X-5 3, 4, 5

Air Cylinder

x 1.25 15 29 1/8 11 81 11 M6 x 0.75 10+0.08 0 5 1 6.5 15 123 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12+0.08 0 5.5 1 7.5 24 123 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14+0.08 0 6 1.25 8.5 24 144 50 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16+0.08 0 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18+0.08 0 11.5 3 14.5 24 167 80 10 22 M22 x 1.5 23 80

High Vacuum Angle Valve

55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

15

Motor flange Body side hub [Built-in parts] Spider [Built-in parts] Size: 25 Hub Mounting Dimensions [mm] Size: 32 Hub Mounting Dimensions [mm] Size: 40 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M2.5 x 10 1.00 8 11 NY M2.5 x 10 1.00 8 11 NX M2.5 x 10 1.00 8 5.5 NM1 M3 x 4 0.63 5 11 NM2 M2.5 x 10 1.00 6 11 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M4 x 12 2.5 11 17.5 NX

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5 22.5

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 10 15 58.7 D2 0.020 0.053 MHZ2-20E 20f8 22 12 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 15 10 58.7 D2 0.020 0.053 MHZ2-20E 20f8 12 22 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

x 2 44 36 37.4 60 M8 x 1.25 16 80 146 4 32.2 60 205 to 500 227.6 190.2 505 to 800 262.6 225.2 LAT LZ Body Bottom Tapped [mm] Size Stroke range [mm] Without lock With lock F G W X Z W X Z Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 25 15 to 100 82.5 115.5 11 127.5 160.5 11 2 4 105 to 400 15 to 35 24 32 50 32 20 to 100 80 120 14 120 160 14 2 4 105 to 500 M5 x 0.8 6.5 4 5 40

Auto Switch Guide

Grommet Tie-rod Terminal conduit 9-15-36 D-G39C/K39C D-M9N/M9P/M9B 9-15-37 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B D-F9G/F9H 9-15-39 Direct Grommet D-Y59A/Y59B/Y7P 9-15-38 D-Y69A/Y69B /Y7PV D-Y7G/7H 9-15-40 D-M5N/M5P/M5B 9-15-41 D-H7NW/H7PW/H7BW 9-15-42 Band Grommet D-G59W/G5PW/K59W 9-15-43 2-color indication D-F79W/F7PW/J79W 9-15-44 Solid State Switch Rail Grommet D-F7NWV/F7BWV 9-15-45 D-F59W/F5PW

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

-9-9 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11-9-10 11 Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7 How to Order CRB2 CRBU2 MSQA A M9B 1 High precision type CRB1 MSQB A M9B 1 Basic type MSU Number of auto

Table of Contents

22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2 4.5 4.5 4.5 16.5 Note) 19 21.5 23 Without auto switch

Specification: Clean Series, Vacuum Type, Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm, Adjuster: -, Function: -, Switch Rail: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 6 mm, Symmetric Type: Standard, Stroke: 15mm

MY1

FH a EC EY E EA EB EC EY F FH h S T TT FB FC Shock absorber model a FW W Applicable bore size MY1M20 5 50 57.5 73 87 115 138.5 46.7 67.3 73.2 73.2 58 70 88 104 7 12 15 15 14 17 22 22 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) RB1007 RB1412 RB2015 RB2015 5 4.5 6 4 3.5 4.5 5.5 5.5 11 11 20 24 29 35 10 12 14 17 32 38 50 57 7.7 9 11.5 12 18.5 19 MY1M25 MY1M32 MY1M40 6 8 8 66 82 95 52 67

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5 22.5